Patent US4876984A successfully refreshed from Google Patents.
US4876984A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for forming a thin film
Assignee: Ricoh Co Ltd
•
Filing: 1988-06-09
•
Granted: 1989-10-31
•
Expires: 2008-06-09
Abstract
Abstract An apparatus for forming a thin film having a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a source of evaporation for evaporating a substance, a counter electrode holding a substrate to be vapor-deposited, a grid disposed between the source and the electrode for accelerating the evaporated substance, and an electronic gun for emitting thermions, which are hit on the evaporated substances to ionize them.
Inventors
- 👤 Mikio Kinoshita
- 👤 Wasaburo Ohta
- 👤 Toru Miyabori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:26
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C23C14/22; C23C14/24; C23C14/32
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
181 words
An apparatus for forming a thin film comprising; a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition therein, a source of evaporation disposed within said container for evaporating a substance to be evaporated, a counter electrode disposed within said container and holding a substrate to be vapor-deposited such that said substrate opposes said source, a grid disposed between said source and said electrode for allowing said evaporated substances to pass therethrough and accelerating said evaporated substances, an electronic gun disposed within said container for emitting thermions, which are hit on said evaporated substances existing between said source and said electrode to ionize said evaporated substances, a guiding means for deflecting electromagnetically a path of said emitted thermions and guiding said emitted thermions toward a space in the vicinity of said grid, a shielding member disposed within said container for preventing a direct impact, onto said substrate, of particles including said thermions emitted from said gun, and a slit disposed in said shielding member for allowing said guided thermions to pass therethrough and arrive at said space.
Claim 2
Independent Claim
181 words
An apparatus for forming a thin film comprising; a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition therein, a source of evaporation disposed within said container for evaporating a substance to be evaporated, a counter electrode disposed within said container and holding a substrate to be vapor-deposited such that said substrate opposes said source, a grid disposed between said source and said electrode for allowing said evaporated substances to pass therethrough and accelerating said evaporated substances, an electronic gun disposed within said container for emitting thermions, which are hit on said evaporated substances existing between said source and said electrode to ionize said evaporated substances, a guiding means for deflecting electromagnetically a path of said emitted thermions and guiding said emitted thermions toward a space in the vicinity of said grid, a shielding member disposed within said container for preventing a direct impact, onto said substrate, of particles including said thermions emitted from said gun, and a slit disposed in said shielding member for allowing said guided thermions to pass therethrough and arrive at said space.
Claim 3
Dependent Claim
26 words
The apparatus of claim 1, wherein said gas comprises an active gas, an inert gas or a mixture of said active gas and said inert gas.
Claim 4
Dependent Claim
17 words
The apparatus of claim 1, wherein said source takes a form of a coil or a boat.
Claim 5
Dependent Claim
14 words
The apparatus of claim 1, wherein said source is made of tungsten or molybdenum.
Claim 6
Dependent Claim
14 words
The apparatus of claim 1, wherein said source is of electronic beam using type.
Claim 7
Dependent Claim
16 words
The apparatus of claim 1, wherein said electronic gun comprises a filament for generating said thermions.
Claim 8
Dependent Claim
35 words
The apparatus of claim 1, wherein said guiding means comprises a deflecting coil for deflecting said path magnetically, a capacitor for deflecting said path electronically, or an assembly of said deflecting coil and said capacitor.
References Cited (Backward Citations)
GB581935A
Cited
GB809330A
Cited
GB866150A
Cited
GB1092744A
Cited
GB1209266A
Cited
US3583361A
Cited
GB1542496A
Cited
JPS55141562A
Cited
EP0035894A1
Cited
EP0095384A2
Cited
JPS5989763A
Cited
EP0141417A2
Cited
US4676194A
Cited
US4707238A
Cited
GB2175015A
Cited
US4725345A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-30 | 1993-05-01 | 1993-10-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-30 | 1997-05-01 | 1997-10-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-30 | 2001-05-01 | 2001-10-31 | $7700.00 | Window Closed / Lapsed |