US4875989A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer processing apparatus
Assignee: Texas Instruments Inc
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Filing: 1988-12-05
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Granted: 1989-10-24
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Expires: 2008-12-05
Abstract
Abstract A processing apparatus and method for edge-preferential processing of partially fabricated integrated circuit wafers or of other substantially flat and thin workpieces. A plasma remote from the workpiece is used to generate activated species, and a baffle which is in proximity to the wafer face but not in contact with it is used to direct the stream of activated species. This module can be set up to perform both edge bead removal and bake of spun-on photoresist.
Inventors
- 👤 Cecil J. Davis
- 👤 Robert T. Matthews
- 👤 Lee M. Loewenstein
- 👤 Joe V. Abernathy
- 👤 Timothy A. Wooldridge
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 01:43
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; G; G03; G03F; G03F7/00; G03F7/16; G03F7/168
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
116 words
An apparatus for processing of wafers comprising: (a) a vacuum processing chamber; (b) a wafer support within said vacuum processing chamber, said wafer support being capable of supporting a wafer; (c) an edge directing gas distribution device comprising a funnel-shaped distributor and a conical baffle concentrically positioned within said distributor to form an annulus for selectively directing the flow of process gases toward the circumference of the wafer; (d) a device for generating free radicals which is remote from said processing chamber and supplying the free radicals to the gas flow direction device; (e) a heating device within said vacuum processing chamber; whereby photoresist beads near the edge of the wafer can be selectively etched away.
Claim 2
Independent Claim
116 words
An apparatus for processing of wafers comprising: (a) a vacuum processing chamber; (b) a wafer support within said vacuum processing chamber, said wafer support being capable of supporting a wafer; (c) an edge directing gas distribution device comprising a funnel-shaped distributor and a conical baffle concentrically positioned within said distributor to form an annulus for selectively directing the flow of process gases toward the circumference of the wafer; (d) a device for generating free radicals which is remote from said processing chamber and supplying the free radicals to the gas flow direction device; (e) a heating device within said vacuum processing chamber; whereby photoresist beads near the edge of the wafer can be selectively etched away.
Claim 3
Dependent Claim
84 words
The apparatus of claim 1, further including a load lock connected to the adjacent vacuum processing chamber by a vacuum port, and wherein said vacuum port is also controlled by a computer control system for generating an output signal and wherein said control system is programmed to prevent opening of said vacuum port until said output signal has indicated that substantially no particulate has been present in the space within the interior of said processing chamber for at least a predetermined period of time.
Claim 4
Dependent Claim
27 words
The apparatus of claim 1, further comprising an environmental and vacuum control device for maintaining a vacuum in said processing chamber and for removal of any particulate.
Claim 5
Dependent Claim
26 words
The apparatus of claim 1, wherein the wafer is supported in a manner such that a side on which circuit components are to formed faces downward.
Claim 6
Dependent Claim
20 words
The apparatus of claim 1, wherein said heating device is a resistively heated susceptor which provides a maximum specific power.
Claim 7
Dependent Claim
25 words
The apparatus of claim 1, wherein said heating device is a radiant heat source which provides maximum specific power at wavelengths in the visible range.
Claim 8
Dependent Claim
16 words
The apparatus of claim 6, wherein said radiant heat source comprises a plurality of incandescent lamps.
Claim 9
Dependent Claim
19 words
The apparatus of claim 6 further including radiant heat source reflectors cooled by contact with a water cooled housing.
Claim 10
Dependent Claim
18 words
The apparatus of claim 6, further comprising a transparent vacuum wall separating said heat source from the wafer.
Claim 11
Dependent Claim
28 words
The apparatus of claim 9, wherein said vacuum wall is sealed to said process chamber by a radially elastically expandable metallic seal which includes a deformable soft portion.
Claim 12
Dependent Claim
12 words
The apparatus of claim 6, wherein said reflectors are coated with gold.
Claim 13
Dependent Claim
27 words
The apparatus of claim 1, wherein the gas flow direction device is a cone whose tip faces the gas discharge tube and whose base faces the wafer.
Claim 14
Dependent Claim
20 words
The apparatus of claim 12, said cone has a passage formed from the perpendicular to its base through its tip.
Claim 15
Dependent Claim
24 words
The apparatus of claim 12, wherein said baffle having a concave surface formed around the periphery of the location of a wafer during processing.
Claim 16
Dependent Claim
23 words
The apparatus of claim 1, wherein the gas flow direction device comprises a substantially solid cone with several standoffs on its conical surface.
Claim 17
Dependent Claim
15 words
The apparatus of claim 15, wherein the gas flow direction device is fabricated of aluminum.
Claim 18
Dependent Claim
18 words
The apparatus of claim 16, wherein the aluminum is anodized over its entire surface except for its base.
Claim 19
Dependent Claim
18 words
The apparatus of claim 16, wherein the aluminum is coated over at least a part of its surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-23 | 1993-04-24 | 1993-10-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-23 | 1997-04-24 | 1997-10-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-23 | 2001-04-24 | 2001-10-24 | $7700.00 | Window Closed / Lapsed |