Patent US4874920A successfully refreshed from Google Patents.
US4874920A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electronic device manufacturing methods
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 1989-01-13
•
Granted: 1989-10-17
•
Expires: 2009-01-13
Abstract
Abstract In a method of making an electronic device having at least a transparent conductive layer, which includes at least a step of forming a transparent conductive layer member and a step of forming a transparent conductive layer by patterning the transparent conductive layer member using a spot-shaped or linear laser beam or beams, each of which has a short wavelength of 400 nm or less and optical energy greater than the optical energy band gap of the transparent conductive layer.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Kenji Itoh
- 👤 Susumu Nagayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:55
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/10; H10F77/16; H10F77/169; H10F77/1692; H10F19/00; H10F19/30; H10F19/31; H10F19/33; H10F77/20; H10F77/244; H10P; H10P50/00; H05; H05K; H05K3/00; H05K3/02; H05K3/027; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
82 words
A laser scribing method for producing a plurality of grooves on a semiconductor layer comprising: expanding laser light emitted from an eximer laser with respect to the cross-section of the laser light; contracting the expanded laser light in only one direction by a convex lens; focusing the contracted laser light on said semiconductor layer; and subliming a part of said semiconductor layer wherein said convex lense is the lense nearest the semiconductor layer forming a focal point where said subliming takes place.
Claim 2
Dependent Claim
82 words
A laser scribing method for producing a plurality of grooves on a semiconductor layer comprising: expanding laser light emitted from an eximer laser with respect to the cross-section of the laser light; contracting the expanded laser light in only one direction by a convex lens; focusing the contracted laser light on said semiconductor layer; and subliming a part of said semiconductor layer wherein said convex lense is the lense nearest the semiconductor layer forming a focal point where said subliming takes place.
Claim 3
Dependent Claim
20 words
A laser scribing method as defined in claim 1 wherein said semiconductor layer is an element of a solar cell.
Claim 4
Dependent Claim
35 words
A laser scribing method as defined in claim 2 wherein said solar cell is formed with a plurality of photoconversion devices which are severed by said laser scribing and connected with each other in series.
Claim 5
Dependent Claim
32 words
A laser scribing method as defined in claim 3 further comprising, between said expanding step and said contracting step, a step of bending said expanded laser beam by reflection at a mirror.
Claim 6
Dependent Claim
18 words
A laser scribing method as defined in claim 1, wherein said convex lense is a cylindrical convex lense.
Claim 7
Dependent Claim
92 words
A laser scribing method for producing a plurality of grooves on a semiconductor layer comprising: expanding laser light emitted from an eximer laser with respect to the cross-section of the laser light; reflecting the expanding laser light on a mirror; contracting the reflected laser light in only one direction by means of a convex lens; focusing the contracted laser light on said semiconductor layer; and subliming a part of said semiconductor layer wherein said convex lense is the lense nearest the semiconductor layer forming a focal point where said subliming takes place.
Claim 8
Dependent Claim
92 words
A laser scribing method for producing a plurality of grooves on a semiconductor layer comprising: expanding laser light emitted from an eximer laser with respect to the cross-section of the laser light; reflecting the expanding laser light on a mirror; contracting the reflected laser light in only one direction by means of a convex lens; focusing the contracted laser light on said semiconductor layer; and subliming a part of said semiconductor layer wherein said convex lense is the lense nearest the semiconductor layer forming a focal point where said subliming takes place.
Claim 9
Dependent Claim
18 words
A laser scribing method as defined in claim 6, wherein said convex lense is a cylindrical convex lense.
Claim 10
Dependent Claim
137 words
A laser scribing method for producing a plurality of grooves on a semiconductor layer comprising: expanding laser light emitted from an eximer laser with respect to the cross-section of the laser light; contracting the expanded laser light in only one direction by means of a plurality of convex lenses; and focusing the contracted laser light on said semiconductor layer, wherein said expanded laser light is separated into a plurality of laser rays by said plurality of convex lenses and said contracing and focusing is performed by each of said convex lenses to produce a plurality of laser rays having a linear cross-section, said plurality of convex lenses being the lenses nearest the semiconductor layer with each laser ray respectively forming a focal point for subliming a line on said semiconductor layer to produce said plurality of grooves.
Claim 11
Dependent Claim
137 words
A laser scribing method for producing a plurality of grooves on a semiconductor layer comprising: expanding laser light emitted from an eximer laser with respect to the cross-section of the laser light; contracting the expanded laser light in only one direction by means of a plurality of convex lenses; and focusing the contracted laser light on said semiconductor layer, wherein said expanded laser light is separated into a plurality of laser rays by said plurality of convex lenses and said contracing and focusing is performed by each of said convex lenses to produce a plurality of laser rays having a linear cross-section, said plurality of convex lenses being the lenses nearest the semiconductor layer with each laser ray respectively forming a focal point for subliming a line on said semiconductor layer to produce said plurality of grooves.
Claim 12
Dependent Claim
19 words
A laser scribing method as defined in claim 8, wherein said plurality of convex lenses are cylindrical convex lenses.
References Cited (Backward Citations)
US4069080A
Cited
US4424435A
Cited
US4631801A
Cited
US4478677A
Cited
US4703166A
Cited
JPS6046892A
Cited
US4667058A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-16 | 1993-04-17 | 1993-10-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-16 | 1997-04-17 | 1997-10-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-16 | 2001-04-17 | 2001-10-17 | $7700.00 | Window Closed / Lapsed |