Method of making photoelectric conversion device

Claim 1

A method of making a photoelectric conversion device in which a plurality n (where n is an integer layer than 2) of semiconductor elements U 1 to U n are sequentially formed side by side on a substrate having an insulating surface and connected in series one after another, the semiconductor element U i (i=1, 1, . . . n) comprising a first electrode E i and a second electrode F i on a non-single-crystal semiconductor laminate member Q i , the second electrode F j+1 (j=1,2, . . . (n-1) being connected via a coupling portion K j to the first electrode E j , comprising the steps of: forming on the substrate sequentially arranged first electrodes E 1 to E n ; forming on the substrate a non-single-crystal semiconductor laminate layer having formed therein at least one semiconductor junction to cover the first electrodes E 1 to E n ; forming (n-1) sequentially arranged grooves O 1 to O n-1 in the non-single-crystal semiconductor laminate layer to form n sequentially arranged non-single-crystal semiconductor laminate members Q 1 to Q n extending on the first electrodes E 1 to E n , respectively, and to expose the first electrodes E 1 to E n-1 to the outside through the grooves O 1 to O n-1 , respectively; forming a conductive layer which continuously extends on the non-single-crystal semiconductor laminate members Q 1 to Q n-1 to provide coupling portions K 1 to K n-1 which are connected to the first electrode E 1 to E n-1 through the grooves O 1 to O n-1 , respectively; forming (n-1) sequentially arranged isolating grooves H 1 to H n-1 in at least the conductive layer by using a laser beam to form n sequentially arranged second electrodes F 1 to F n separated by the isolating grooves H 1 to H n-1 and opposing the first electrodes E 1 to E n through the non-single-crystal semiconductor laminate members Q 1 to Q n , respectively, the second electrodes F j-1 (j=1, 2, . . . (n-1)) being connected to the first electrodes E j through the coupling portions K j ; following the formation of the isolating grooves H 1 to H n-1 with a debburing or an etch using a gas or liquid.

Claim 2

A method of making a photoelectric conversion device in which a plurality n (where n is an integer layer than 2) of semiconductor elements U 1 to U n are sequentially formed side by side on a substrate having an insulating surface and connected in series one after another, the semiconductor element U i (i=1, 1, . . . n) comprising a first electrode E i and a second electrode F i on a non-single-crystal semiconductor laminate member Q i , the second electrode F j+1 (j=1,2, . . . (n-1) being connected via a coupling portion K j to the first electrode E j , comprising the steps of: forming on the substrate sequentially arranged first electrodes E 1 to E n ; forming on the substrate a non-single-crystal semiconductor laminate layer having formed therein at least one semiconductor junction to cover the first electrodes E 1 to E n ; forming (n-1) sequentially arranged grooves O 1 to O n-1 in the non-single-crystal semiconductor laminate layer to form n sequentially arranged non-single-crystal semiconductor laminate members Q 1 to Q n extending on the first electrodes E 1 to E n , respectively, and to expose the first electrodes E 1 to E n-1 to the outside through the grooves O 1 to O n-1 , respectively; forming a conductive layer which continuously extends on the non-single-crystal semiconductor laminate members Q 1 to Q n-1 to provide coupling portions K 1 to K n-1 which are connected to the first electrode E 1 to E n-1 through the grooves O 1 to O n-1 , respectively; forming (n-1) sequentially arranged isolating grooves H 1 to H n-1 in at least the conductive layer by using a laser beam to form n sequentially arranged second electrodes F 1 to F n separated by the isolating grooves H 1 to H n-1 and opposing the first electrodes E 1 to E n through the non-single-crystal semiconductor laminate members Q 1 to Q n , respectively, the second electrodes F j-1 (j=1, 2, . . . (n-1)) being connected to the first electrodes E j through the coupling portions K j ; following the formation of the isolating grooves H 1 to H n-1 with a debburing or an etch using a gas or liquid.