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US4872758A
Expired / Lapsed
US
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Film thickness-measuring apparatus
Assignee: JFE Engineering Corp
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Filing: 1988-07-22
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Granted: 1989-10-10
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Expires: 2008-07-22
Abstract
Abstract Circularly polarized light caused to be incident on a film surface is converted into three light beams by optical flats to obtain electrical signals corresponding to the intensities of the respective light beams. Two ellipsometric parameters ψ and Δ are claculated from these three electrical signals.
Inventors
- 👤 Takao Miyazaki
- 👤 Yoshiro Yamada
- 👤 Isamu Komine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:36
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0641; G01B11/065; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
134 words
A film thickness-measuring apparatus comprising: circularly polarized light forming means for forming circularly polarized light which can be incident on an incidence plane of an object to be measured at a predetermined angle; beam splitter means for converting the light reflected by the object into a plurality of light beams; a plurality of analyzers for allowing the plurality of light beams obtained by said beam splitter means to pass at different transmission polarization azimuths, respectively; electrical signal output means for outputting electrical signals corresponding to light amounts/intensities of the plurality of light beams from said analyzers; and an arithmetic processing section for receiving the respective electrical signals from said electrical signal output means and performing predetermined arithmetic processing for the electrical signals to obtain an amplitude ratio and a phase of two ellipsometric parameters.
Claim 2
Dependent Claim
134 words
A film thickness-measuring apparatus comprising: circularly polarized light forming means for forming circularly polarized light which can be incident on an incidence plane of an object to be measured at a predetermined angle; beam splitter means for converting the light reflected by the object into a plurality of light beams; a plurality of analyzers for allowing the plurality of light beams obtained by said beam splitter means to pass at different transmission polarization azimuths, respectively; electrical signal output means for outputting electrical signals corresponding to light amounts/intensities of the plurality of light beams from said analyzers; and an arithmetic processing section for receiving the respective electrical signals from said electrical signal output means and performing predetermined arithmetic processing for the electrical signals to obtain an amplitude ratio and a phase of two ellipsometric parameters.
Claim 3
Dependent Claim
47 words
An apparatus according to claim 1, wherein said circularly polarized light forming means includes a monochromatic light source, a polarizer for converting output light from said light source into linearly polarized light, and a λ/4 plate for receiving the linearly polarized light and forming circularly polarized light.
Claim 4
Dependent Claim
52 words
An apparatus according to claim 2, wherein the amplitude ratio Δ and phase ψ of the two ellipsometric parameters are calculated by said arithmetic processing section using the following equations, provided light intensity signals of the three light beams split by said three optical flats are I1, I2, and I3, respectively: ##EQU14##
Claim 5
Dependent Claim
36 words
An apparatus according to claim 2, further comprising an optical modulator arranged between said light source and said polarizer, and means for synchronously detecting the electrical signals in synchronism with an operation of said optical modulator.
Claim 6
Dependent Claim
38 words
An apparatus according to claim 1, wherein said beam splitter means is arranged such that three optical flats of an identical material and shape are fixed parallel to each other, and split reflected light into three light beams.
Claim 7
Dependent Claim
55 words
An apparatus according to claim 1, wherein said signal output means comprises lens means for focusing the respective light beams transmitted through said analyzers at the same focal point, pinhole means located at the focal point, and photodetector means for forming electrical signals corresponding to intensities of the light beams transmitted through said pinhole means.
Claim 8
Dependent Claim
22 words
An apparatus according to claim 6, wherein film thickness d to be obtained is calculated as: d=KΔ where K is a constant.
Claim 9
Dependent Claim
41 words
An apparatus according to claim 6, wherein when a focal length of said focusing lens means is f and a diameter of a pinhole of a pinhole plate is D, said apparatus has a measurement visual field set by: D≦0.7×10.sup.-3 f.
Claim 10
Dependent Claim
42 words
An apparatus according to claim 1, wherein said beam splitting means comprises four optical flats made of the same material, having the same shape, positioned parallel to each other, for splitting the light beam reflected from said film, into three light beams.
Claim 11
Dependent Claim
47 words
An apparatus according to claim 1, wherein said polarizer of said light-applying means applies at least two circularly polarized light beams having different wavelengths and a predetermined orientation angle, to a film at the same predetermined incidence angle in order to measure the thickness of the film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-09 | 1993-04-10 | 1993-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-09 | 1997-04-10 | 1997-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-09 | 2001-04-10 | 2001-10-10 | $7700.00 | Window Closed / Lapsed |