US4606641A
Expired / Lapsed
US
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Apparatus for measuring film thickness
Assignee: JFE Engineering Corp
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Filing: 1984-08-30
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Granted: 1986-08-19
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Expires: 2004-08-30
Abstract
Abstract An elliptically polarized monochromatic light is obtained from monochromatic light select unit and is reflected at an interface between an objective film and substrate. An extinction wavelength of the reflected light, when the amount thereof detected at photodetector becomes zero, is detected at control unit and the true thickness of the film is calculated from the detected extinction wavelength.
Inventors
- 👤 Takeo Yamada
- 👤 Kousaku Takasaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:57
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0641
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
111 words
An apparatus for measuring a film thickness, comprising: a light source for emitting light having continuous spectral components; polarization controlling means for polarizing the light along a predetermined direction and radiating polarized light onto the object; a photodetector for detecting an amount of light reflected by the object and generating a light amount signal; means for detecting data representing a wavelength of a spectral component in accordance with the light amount signal such that the amount of light reflected by the object and incident on the photodetector becomes zero; and film thickness calculating means for calculating the thickness of the film formed on the object in accordance with the detected data.
Claim 2
Independent Claim
111 words
An apparatus for measuring a film thickness, comprising: a light source for emitting light having continuous spectral components; polarization controlling means for polarizing the light along a predetermined direction and radiating polarized light onto the object; a photodetector for detecting an amount of light reflected by the object and generating a light amount signal; means for detecting data representing a wavelength of a spectral component in accordance with the light amount signal such that the amount of light reflected by the object and incident on the photodetector becomes zero; and film thickness calculating means for calculating the thickness of the film formed on the object in accordance with the detected data.
Claim 3
Dependent Claim
31 words
An apparatus according to claim 1, wherein said polarization controlling means includes means for selecting monochromatic light having a predetermined wavelength from said light source and giving a predetermined phase difference.
Claim 4
Dependent Claim
100 words
An apparatus according to claim 2, wherein said polarization controlling means comprises: wavelength select signal output means; means for generating an ultrasonic beam having a frequency corresponding to a wavelength select signal generated from said wavelength select signal output means; an acoustooptic filter driven by the ultrasonic beam generated from said ultrasonic generating means, the light from said light source being incident on said acoustooptic filter; means for producing linearly polarized light from light passing through said acoustooptic filter; and a phase compensator for giving a predetermined phase difference to output an ellipticaly polarized light from said linearly polarizing means.
Claim 5
Dependent Claim
38 words
An apparatus according to claim 1, wherein said photodetector includes means for producing a light amount signal to each of spectral components of the reflected light for detecting a wavelength at which an amount of light becomes zero.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-18 | 1990-02-17 | 1990-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-18 | 1994-02-17 | 1994-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-18 | 1998-02-17 | 1998-08-19 | $7700.00 | Window Closed / Lapsed |