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US4871962A
Expired / Lapsed
US
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Method for measuring the size of vias
Assignee: Advanced Micro Devices Inc
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Filing: 1988-10-28
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Granted: 1989-10-03
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Expires: 2008-10-28
Abstract
Abstract A method is disclosed for measuring or verifying the size of an opening such as a via in a layer of material such as found in an integrated circuit structure which comprises measuring the voltage drop while flowing a known current across a given length of a first rectangular test portion comprising a continuous layer of a material capable of carrying an electrical current, then measuring the voltage drop while flowing the same known current across the same length of a second rectangular test portion comprising another portion of the same layer of material and of identical width and measured length as the first test portion but with one or more openings formed therein, and determining the size of the one or more openings in the second test pattern from the measured difference in voltage drops between the first and second test patterns reflecting the difference in resistance between the solid test portion and the test portion containing the openings. The size of the openings in the second test pattern are determined by using the measured voltage drops together with the measured sheet resistance of the conductive material.
Inventors
- 👤 Robin W. Cheung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 22:18
CPC Classifications
G; G01; G01B; G01B7/00; G01B7/12; G01B7/13; G01B7/02; G01R; G01R27/00; G01R27/02; G01R27/14
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
136 words
A method for measuring the lateral size of openings which extend through a layer of material which comprises: (a) measuring the voltage drop while flowing a known current through a given length of a first rectangular test pattern comprising a continuous layer of a material capable of carrying an electrical current; (b) measuring the voltage drop while flowing the same known current through the same length of a second rectangular test pattern comprising another portion of said same layer of material and of identical width and length as said first test pattern but with openings formed through said second test pattern; and (c) determining the lateral size of said openings in said second test pattern from the number of said openings and the electrically measured difference in voltage drops between said first and second test patterns.
Claim 2
Independent Claim
136 words
A method for measuring the lateral size of openings which extend through a layer of material which comprises: (a) measuring the voltage drop while flowing a known current through a given length of a first rectangular test pattern comprising a continuous layer of a material capable of carrying an electrical current; (b) measuring the voltage drop while flowing the same known current through the same length of a second rectangular test pattern comprising another portion of said same layer of material and of identical width and length as said first test pattern but with openings formed through said second test pattern; and (c) determining the lateral size of said openings in said second test pattern from the number of said openings and the electrically measured difference in voltage drops between said first and second test patterns.
Claim 3
Dependent Claim
20 words
The method of claim 1 including the further step of electrically determining the sheet resistance of said layer of material.
Claim 4
Dependent Claim
102 words
The method of claim 2 wherein said openings are square and the step of determining the size of said openings includes using the following equation to determine the width of the square opening from the change in said measured voltage drops: ##EQU5## Wherein: w is the width of each opening; W is the width of the rectangular test portion; Vc is the measured change voltage in voltage drops between said first and second rectangular test patterns; n is the number of openings; Re is the sheet resistance of the layer of material; and I is the current flow through the test portions.
Claim 5
Dependent Claim
102 words
The method of claim 2 wherein said openings are round and the step of determining the size of said openings includes using the following equation to determine the diameter of the round opening from the change in said measured voltage drops: ##EQU6## Wherein: w' is the diameter of each opening; W is the width of the rectangular test portion; Vc is the measured change voltage in voltage drops between said first and second rectangular test patterns; n is the number of openings; Re is the sheet resistance of the layer of material; and I is the current flow through the test portions.
Claim 6
Independent Claim
130 words
A method of determining the dimensions of a via in an integrated circuit structure which comprises: (a) forming a first rectangular test pattern of a continuous conductive film on a substrate; (b) forming a second rectangular test pattern of the same conductive film on a substrate having the same width and thickness as said first test pattern but having formed therethrough one or more openings; (c) measuring the voltage drops of said first and second test patterns for the same length of each test pattern while flowing the same known amount of current through each of said test patterns; and (d) determining the size of each of said openings using the difference in voltage drops between the two test patterns and the number of openings in said second test pattern.
Claim 7
Independent Claim
130 words
A method of determining the dimensions of a via in an integrated circuit structure which comprises: (a) forming a first rectangular test pattern of a continuous conductive film on a substrate; (b) forming a second rectangular test pattern of the same conductive film on a substrate having the same width and thickness as said first test pattern but having formed therethrough one or more openings; (c) measuring the voltage drops of said first and second test patterns for the same length of each test pattern while flowing the same known amount of current through each of said test patterns; and (d) determining the size of each of said openings using the difference in voltage drops between the two test patterns and the number of openings in said second test pattern.
Claim 8
Dependent Claim
21 words
The method of claim 5 wherein said method further comprises the step of measuring the sheet resistance of said conductive film.
Claim 9
Dependent Claim
43 words
The method of claim 5 wherein said step of determining the size of each of said openings further comprises using the length and width of the test patterns, the sheet resistance, and the number of openings to determine the width of each opening.
Claim 10
Dependent Claim
38 words
The method of claim 7 wherein the width of each test pattern is determined from the measured voltage drop, the length of the test pattern and the sheet resistivity for a given current flow through the test pattern.
Claim 11
Independent Claim
106 words
A method of monitoring the size of vias formed in an integrated circuit structure which comprises: (a) forming a rectangular test pattern of a continuous conductive film on a substrate having a known width and thickness and a known number of vias of known shape but unknown size which extend through said conductive film; (b) measuring the voltage drop of said test pattern while flowing a known amount of current through said test pattern; (c) measuring the sheet resistance of said conductive film; and (d) comparing the measured voltage drop with a theoretical voltage drop amount calculated for a known number, size, and shape of vias.
Claim 12
Independent Claim
106 words
A method of monitoring the size of vias formed in an integrated circuit structure which comprises: (a) forming a rectangular test pattern of a continuous conductive film on a substrate having a known width and thickness and a known number of vias of known shape but unknown size which extend through said conductive film; (b) measuring the voltage drop of said test pattern while flowing a known amount of current through said test pattern; (c) measuring the sheet resistance of said conductive film; and (d) comparing the measured voltage drop with a theoretical voltage drop amount calculated for a known number, size, and shape of vias.
Claim 13
Independent Claim
212 words
A method of determining the width of square vias in an integrated circuit structure which comprises: (a) forming a first rectangular test pattern of a continuous conductive film on a substrate; (b) forming a second rectangular test pattern of the same conductive film on a substrate having the same width and thickness as said first test pattern but having formed therein a plurality of square vias which extend through said conductive film; (c) measuring the voltage drops of said first and second test patterns for the same length of each test pattern while flowing the same known amount of current through each of said test patterns; (d) measuring the sheet resistance of said conductive film; and (e) determining the size of said square vias using the difference in voltage drops between said two test patterns and the number of vias in said second test pattern in accordance with the following equation: ##EQU7## Wherein: w is the width of each via; W is the width of the rectangular test portion; Vc is the measured change voltage in voltage drops between said first and second rectangular test patterns; n is the number of vias; Re is the sheet resistance of the layer of material; and I is the current flow through the test portions.
Claim 14
Independent Claim
212 words
A method of determining the width of square vias in an integrated circuit structure which comprises: (a) forming a first rectangular test pattern of a continuous conductive film on a substrate; (b) forming a second rectangular test pattern of the same conductive film on a substrate having the same width and thickness as said first test pattern but having formed therein a plurality of square vias which extend through said conductive film; (c) measuring the voltage drops of said first and second test patterns for the same length of each test pattern while flowing the same known amount of current through each of said test patterns; (d) measuring the sheet resistance of said conductive film; and (e) determining the size of said square vias using the difference in voltage drops between said two test patterns and the number of vias in said second test pattern in accordance with the following equation: ##EQU7## Wherein: w is the width of each via; W is the width of the rectangular test portion; Vc is the measured change voltage in voltage drops between said first and second rectangular test patterns; n is the number of vias; Re is the sheet resistance of the layer of material; and I is the current flow through the test portions.
Claim 15
Independent Claim
216 words
A method of determining the diameter of a circular via in an integrated circuit structure which comprises: (a) forming a first rectangular test pattern of a continuous conductive film on a substrate; (b) forming a second rectangular test pattern of the same conductive film on a substrate having the same width and thickness as said first test pattern but having formed therein one or more circular vias which extend through said conductive film; (c) measuring the voltage drops of said first and second test patterns for the same length of each pattern while flowing the same known amount of current through each of said test patterns; (d) measuring the sheet resistance of said conductive film; and (e) determining the diameter of each of said circular vias using the difference in voltage drops between said two test patterns and the number of circular vias in said second test pattern in accordance with the following equation: ##EQU8## Wherein: w, is the diameter of circular via; W is the width of the rectangular test portion; Vc is the measured change voltage in voltage drops between said first and second rectangular test portions; n is the number of circular vias; Re is the sheet resistance of the layer of material; and I is the current flow through the test portions.
Claim 16
Independent Claim
216 words
A method of determining the diameter of a circular via in an integrated circuit structure which comprises: (a) forming a first rectangular test pattern of a continuous conductive film on a substrate; (b) forming a second rectangular test pattern of the same conductive film on a substrate having the same width and thickness as said first test pattern but having formed therein one or more circular vias which extend through said conductive film; (c) measuring the voltage drops of said first and second test patterns for the same length of each pattern while flowing the same known amount of current through each of said test patterns; (d) measuring the sheet resistance of said conductive film; and (e) determining the diameter of each of said circular vias using the difference in voltage drops between said two test patterns and the number of circular vias in said second test pattern in accordance with the following equation: ##EQU8## Wherein: w, is the diameter of circular via; W is the width of the rectangular test portion; Vc is the measured change voltage in voltage drops between said first and second rectangular test portions; n is the number of circular vias; Re is the sheet resistance of the layer of material; and I is the current flow through the test portions.
Claim 17
Independent Claim
190 words
A method for measuring the lateral size of vias which extend through a layer of insulating material using electrical measurements to determine the equivalent lateral size of vias formed in a conductive material using the same photolithographic mask which comprises: (a) measuring the voltage drop while flowing a known current through a given length of a first rectangular test pattern comprising a continuous layer of a conductive material; (b) measuring the voltage drop while flowing the same known current through the same length of a second rectangular test pattern comprising another portion of said same layer of conductive material and of identical width and length as said first test pattern but with vias formed therein which extend through said layer of conductive material; (c) measuring the resistivity of said layer of conductive material; and (d) determining the lateral size of said vias in said second test pattern from the electrically measured difference in voltage drops between said first and second test patterns and the resistivity of said layer of conductive material; to thereby determine the equivalent lateral size of vias formed in an insulating layer using the same photolithography mask.
Claim 18
Independent Claim
190 words
A method for measuring the lateral size of vias which extend through a layer of insulating material using electrical measurements to determine the equivalent lateral size of vias formed in a conductive material using the same photolithographic mask which comprises: (a) measuring the voltage drop while flowing a known current through a given length of a first rectangular test pattern comprising a continuous layer of a conductive material; (b) measuring the voltage drop while flowing the same known current through the same length of a second rectangular test pattern comprising another portion of said same layer of conductive material and of identical width and length as said first test pattern but with vias formed therein which extend through said layer of conductive material; (c) measuring the resistivity of said layer of conductive material; and (d) determining the lateral size of said vias in said second test pattern from the electrically measured difference in voltage drops between said first and second test patterns and the resistivity of said layer of conductive material; to thereby determine the equivalent lateral size of vias formed in an insulating layer using the same photolithography mask.
References Cited (Backward Citations)
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