US4871919A
Expired / Lapsed
US
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Electron beam lithography alignment using electric field changes to achieve registration
Assignee: International Business Machines Corp
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Filing: 1988-05-20
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Granted: 1989-10-03
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Expires: 2008-05-20
Abstract
Abstract A system for the detection of features in a semiconductor wafer for registration. An E-beam scans across an insulator covered with a metallic layer. The high energy electrons penetrate and cause the generation of electron/holes pairs. The drift or migration can be sensed as a current, the intensity of which is a function of the applied field strength. The field strength is in turn varied by the topology of the feature or the presence of a junction in the device. Since the E-beam position is known, registration occurs by correlation with the underlying feature as it is mapped out by sensing variations in current. The feature may be an alignment mark or a device under construction on the wafer.
Inventors
- 👤 Thomas P. Donohue
- 👤 Fritz J. Hohn
- 👤 George A. Sai-Halasz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:12
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; B; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F9/00; H01J37/304; H01J37/3045
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
57 words
A method of determining the position of a buried feature in a semiconductor wafer having a surface covered by an insulative material comprising the steps of: moving an electron beam over said insulative material, impressing a voltage across said insulative material; and detecting variations in an induced current as said electron beam passes over said buried feature.
Claim 2
Independent Claim
57 words
A method of determining the position of a buried feature in a semiconductor wafer having a surface covered by an insulative material comprising the steps of: moving an electron beam over said insulative material, impressing a voltage across said insulative material; and detecting variations in an induced current as said electron beam passes over said buried feature.
Claim 3
Dependent Claim
36 words
The method of claim 1, wherein said current is induced by said electron beam by the generation of electron-hole pairs in said insulative material which cascades as a function of an electrostatic field in said wafer.
Claim 4
Dependent Claim
25 words
The method of claim 1, further comprising the step of depositing a conductive material on said insulative material. wherein said insulative material is a photoresist.
Claim 5
Dependent Claim
30 words
The method of claim 1, further comprises the step of varying said voltage to scale said voltage as a function of the depth of said insulative material over said feature.
Claim 6
Dependent Claim
12 words
The method of claim 1, wherein said insulative material comprises a photoresist.
Claim 7
Dependent Claim
30 words
The method of claim 5, further comprising the step of applying an insulative material having electron beam induced current characteristics over said photoresist in regions where alignment marks are present.
Claim 8
Dependent Claim
35 words
The method of claim 2, further comprising the step of writing with said electron beam a pattern of data on said insulative material through said conductive material, removing said conductive material and developing said photoresist.
Claim 9
Independent Claim
94 words
A system for the detection of a buried feature in a semiconductor wafer having a surface covered by an insulative material comprising: a circuit providing a voltage across said insulative material and said waver for generating electron-hole pairs in said insulative material, current sensing means in said circuit, and means for scanning an electron beam over said surface of said feature covered by said insulative material wherein said electron beam causes the generation of electrons that penetrate across said insulator creating electron-hole pairs, the drift/diffusion of which is a current detected by said circuit.
Claim 10
Independent Claim
94 words
A system for the detection of a buried feature in a semiconductor wafer having a surface covered by an insulative material comprising: a circuit providing a voltage across said insulative material and said waver for generating electron-hole pairs in said insulative material, current sensing means in said circuit, and means for scanning an electron beam over said surface of said feature covered by said insulative material wherein said electron beam causes the generation of electrons that penetrate across said insulator creating electron-hole pairs, the drift/diffusion of which is a current detected by said circuit.
Claim 11
Dependent Claim
15 words
The system of claim 8, further comprising a conductive film deposited on said insulative layer.
Claim 12
Dependent Claim
28 words
The system of claim 8, wherein said semiconductor comprises a silicon wafer and said feature is a plurality of trenches, said trenches defining a matrix of alignment marks.
Claim 13
Dependent Claim
26 words
The system of claim 8, wherein said semiconductor comprises a silicon wafer and said feature is a portion of a device being fabricated in said wafer.
Claim 14
Dependent Claim
27 words
The system of claim 8, wherein said semiconductor comprises a silicon wafer and said feature is an electrical junction in a device being fabricated in said wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-02 | 1993-04-03 | 1993-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-02 | 1997-04-03 | 1997-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-02 | 2001-04-03 | 2001-10-03 | $7700.00 | Window Closed / Lapsed |