US3580749A
Expired / Lapsed
US
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Method and apparatus for selective etching of insulating layers
Assignee: Westinghouse Electric Corp
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Filing: 1968-11-13
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Granted: 1971-05-25
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Expires: 1988-11-13
Abstract
Abstract IN SELECTIVE ETCHING BY THE BOMBARDMENT ENHANCE ETCHING RATE (BEER) EFFECT, A METAL LAYER ON THE BON BARDMENT INSULATOR IS USED TO PROVIDE INCREASED ETCH EN HANCEMENT. THE METAL LAYER ALSO MAY SERVE AS AN ELEC TRODE IN BIASING THE STRUCTURE TO PRODUCE A BEAM INDUCE CURRENT FROM WHICH THE APPLIED DOSE IS INDICATED.
Inventors
- 👤 Alan J Simon
- 👤 Joseph E Johnson
- 👤 Terence W O'keeffe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:52
CPC Classifications
H; H10; H10P; H10P95/00; H10W; H10W74/00; H10W74/40; H10W74/43; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/945
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-05-24 | 1974-11-23 | 1975-05-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-05-24 | 1978-11-23 | 1979-05-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-05-24 | 1982-11-23 | 1983-05-25 | $7700.00 | Window Closed / Lapsed |