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US4863245A
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Superlattice electrooptic devices
Assignee: ExxonMobil Technology and Engineering Co
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Filing: 1988-08-25
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Granted: 1989-09-05
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Expires: 2008-08-25
Abstract
Abstract Electrooptic devices for the modulation and conversion of light which include semiconductor superlattices which have large electrooptic and non-linear optical coefficients due to their built-in electric fields. These materials can be deposited at low temperatures onto virtually any substrate.
Inventors
- 👤 Charles B. Roxlo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:35
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/0009; G02F1/0018; B; B82; B82Y; B82Y20/00; G02F1/01; G02F1/015; G02F1/017; G02F1/17; G02F1/174; G02F1/21; G02F1/218; G02F1/225; G02F1/2257; G02F1/35; G02F1/355; G02F1/3556
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
66 words
An electrooptic device in which the active materials comprises a superlattice which includes a multilayered amorphous material having non-zero linear electrooptic coefficients due to the presence of internal built-in electric fields caused by charge distributed asymmetrically in the layers, wherein adjacent layers have different values of quadratic electrooptic coefficients and wherein an applied voltage of said active material controls propagation of light through said active material.
Claim 2
Dependent Claim
66 words
An electrooptic device in which the active materials comprises a superlattice which includes a multilayered amorphous material having non-zero linear electrooptic coefficients due to the presence of internal built-in electric fields caused by charge distributed asymmetrically in the layers, wherein adjacent layers have different values of quadratic electrooptic coefficients and wherein an applied voltage of said active material controls propagation of light through said active material.
Claim 3
Dependent Claim
25 words
An electrooptic device of claim 1 in which the superlattice includes a multilayered material whose optical index of refraction changes with an applied electric field.
Claim 4
Dependent Claim
23 words
The device of claim 2 wherein the superlattice includes layers of amorphous silicon hydride alternating with amorphous silicon nitride hydride (a-Si:H/a-SiN x :H).
Claim 5
Dependent Claim
23 words
The device of claim 2 wherein the superlattice includes layers of amorphous silicon hydride alternating with amorphous silicon carbide hydride (a-Si:H/a-SiC x :H).
Claim 6
Dependent Claim
17 words
An electrooptic device of claim 1 in which the superlattice includes a multilayered material which is anisotropic.
Claim 7
Dependent Claim
23 words
The device of claim 1 wherein the superlattice includes layers of amorphous silicon hydride alternating with amorphous silicon nitride hydride (a-Si:H/a-SiN x :H).
Claim 8
Dependent Claim
23 words
The device of claim 1 wherein the superlattice includes layers of amorphous silicon hydride alternating with amorphous silicon carbide hydride (a-Si:H/a-SiC x :H).
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-04 | 1993-03-06 | 1993-09-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-04 | 1997-03-06 | 1997-09-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-04 | 2001-03-06 | 2001-09-05 | $7700.00 | Window Closed / Lapsed |