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US4861750A
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Process for producing superconducting thin film
Assignee: Nissin Electric Co Ltd
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Filing: 1988-04-19
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Granted: 1989-08-29
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Expires: 2008-04-19
Abstract
Abstract A process for producing a superconducting thin film of the present invention comprises: supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and irradiating the substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.
Inventors
- 👤 Shuichi Nogawa
- 👤 Eiji Kamijo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:44
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0548; H10N60/0408
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
53 words
A process for producing a superconducting thin film comprising: supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and irradiating the substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.
Claim 2
Dependent Claim
53 words
A process for producing a superconducting thin film comprising: supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and irradiating the substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.
Claim 3
Dependent Claim
35 words
A process according to claim 1, wherein a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof are simultaneously vapor-deposited on the substrate.
Claim 4
Dependent Claim
40 words
A process according to claim 1, wherein a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof are successively evaporated to form layers in superposition on the substrate.
Claim 5
Dependent Claim
32 words
A process according to claim 1, wherein copper and/or an oxide thereof is evaporated alternately with the two other metals and or oxides thereof to form layers in superposition on the substrate.
Claim 6
Dependent Claim
40 words
A process according to claim 1, wherein a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof are successively sputtered to form layers in superposition on the substrate.
Claim 7
Dependent Claim
31 words
A process according to claim 1 wherein copper and/or an oxide thereof is sputtered alternately with the two other metals and/or oxides thereof to form layers in superposition on the substrate.
References Cited (Backward Citations)
US4634600A
Cited
JPS6124214A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-28 | 1993-02-27 | 1993-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-28 | 1997-02-27 | 1997-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-28 | 2001-02-27 | 2001-08-29 | $7700.00 | Window Closed / Lapsed |