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US4861641A
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Substrates with dense metal vias
Assignee: CPS Technologies Corp
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Filing: 1987-05-22
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Granted: 1989-08-29
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Expires: 2007-05-22
Abstract
Abstract Dense vias may be made with a metallizing composition containing tungsten, alumina, and either nickel or palladium. Further, an infiltration process ensures that vias in ceramic substrates are heremetic. Infiltrating materials, including metals and alloys, are applied to co-fired substrates and the composite is fired. The process may be repeated if necessary. Alternatively, the via holes may be bore-coated prior to infiltrating.
Inventors
- 👤 Brian C. Foster
- 👤 Roger S. Lind
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 07:50
CPC Classifications
H; H05; H05K; H05K1/00; H05K1/02; H05K1/09; H05K1/092; C; C22; C22C; C22C1/00; C22C1/04; C22C1/05; C22C1/059; C22C32/00; C22C32/001; C22C32/0015; C22C32/0031; H05K1/03; H05K1/0306; H05K3/00; H05K3/40; H05K3/4038; H05K3/4053; H05K3/4061; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24273; Y10T428/24322; Y10T428/24802; Y10T428/24917; Y10T428/24926
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
73 words
A green ceramic body having a substrate with a plurality of via holes, wherein the substrate is composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, and the via holes contain a composition with inorganic constituents consisting essentially of, by weight: ______________________________________
tungsten
85-97%
alumina
2-8%
______________________________________ and 1-7% of a metal selected from the group consisting of nickel and palladium, the via holes substantially free of glassy fillers.
Claim 2
Dependent Claim
73 words
A green ceramic body having a substrate with a plurality of via holes, wherein the substrate is composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, and the via holes contain a composition with inorganic constituents consisting essentially of, by weight: ______________________________________
tungsten
85-97%
alumina
2-8%
______________________________________ and 1-7% of a metal selected from the group consisting of nickel and palladium, the via holes substantially free of glassy fillers.
Claim 3
Dependent Claim
24 words
A green body according to claim 1, wherein the tungsten is in the form of particles having an average size of approximately 0.5-5.0 microns.
Claim 4
Dependent Claim
24 words
A green body according to claim 1, wherein the alumina is in the form of particles having an average size of approximately 0.5-5.0 microns.
Claim 5
Dependent Claim
33 words
A green body according to claim 1, wherein the metal selected from the group consisting of nickel and palladium is in the form of particles having an average size of approximately 0.5-10 microns.
Claim 6
Dependent Claim
34 words
A green body according to claim 1, wherein the composition further comprises less than approximately 2% of an additive selected from the group consisting of cobalt, Y 2 O 3 , and mixtures thereof.
Claim 7
Dependent Claim
24 words
A green body according to claim 5, wherein the additive is in the form of particles having an average size of approximately 0.5-10 microns.
Claim 8
Dependent Claim
62 words
A fired composite substrate comprising a ceramic and metallized vias, wherein the substrate is composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, and the vias consist essentially of, by weight: ______________________________________
tungsten
85-97%
alumina
2-8%
______________________________________ and 1-7% of a metal selected from the group consisting of nickel and palladium, the vias substantially free of glassy fillers.
Claim 9
Dependent Claim
62 words
A fired composite substrate comprising a ceramic and metallized vias, wherein the substrate is composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, and the vias consist essentially of, by weight: ______________________________________
tungsten
85-97%
alumina
2-8%
______________________________________ and 1-7% of a metal selected from the group consisting of nickel and palladium, the vias substantially free of glassy fillers.
Claim 10
Dependent Claim
23 words
A substrate according to claim 7, wherein the vias are substantially void-free and have a density of greater than approximately 80% theoretical density.
Claim 11
Dependent Claim
21 words
A substrate according to claim 8, wherein the vias exhibit a helium leak rate of less than approximately 10 -9 cc/sec.
Claim 12
Dependent Claim
18 words
A substrate according to claim 7, wherein the vias have a resistivity less than approximately 4×10 -3 ohm-centimeters.
Claim 13
Dependent Claim
18 words
A substrate according to claim 8, wherein the vias have a resistivity less than approximately 4×10 -3 ohm-centimeters.
Claim 14
Dependent Claim
75 words
A ceramic composite comprising: (a) a ceramic substrate having less than 1 wt. % of glassy phase and composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, said substrate defining a plurality of vias; and (b) a conductive material selected from the group consisting of tungsten, molybdenum, and mixtures thereof in association with an infiltrant metal or alloy in at least one via, the vias substantially free of a glassy phase.
Claim 15
Dependent Claim
75 words
A ceramic composite comprising: (a) a ceramic substrate having less than 1 wt. % of glassy phase and composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, said substrate defining a plurality of vias; and (b) a conductive material selected from the group consisting of tungsten, molybdenum, and mixtures thereof in association with an infiltrant metal or alloy in at least one via, the vias substantially free of a glassy phase.
Claim 16
Dependent Claim
30 words
A composite according to claim 12, wherein the infiltrant metal or alloy is selected from the group consisting of: nickel, palladium, cobalt, cooper, gold, silver and alloys of these materials.
Claim 17
Dependent Claim
24 words
A composite according to claim 13, wherein the via is substantially void free and has a density of greater than approximately 90% theoretical density.
Claim 18
Dependent Claim
21 words
A composite according to claim 13, wherein the via exhibits a helium leak rate of less than approximately 10 -9 cc/sec.
Claim 19
Dependent Claim
19 words
A composite according to claim 13, wherein the vias have a resistivity of less than approximately 6×10 -4 ohm-centimeters.
Claim 20
Dependent Claim
19 words
A composite according to claim 13, wherein the vias have a resistivity of less than approximately 4×10 -4 ohm-centimeters.
Claim 21
Dependent Claim
11 words
A composite according to claim 13, wherein the vias are ductile.
Claim 22
Dependent Claim
76 words
A ceramic composite, comprising: (a) a ceramic substrate substantially free of a glassy phase and composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, said substrate defining a plurality of bore-coated vias, the vias coated with a conductive material selected from the group consisting of tungsten, molybdenum, and mixtures thereof; and (b) an infiltrant metal or alloy in association with at least one bore-coated via, the vias substantially free of glassy fillers.
Claim 23
Dependent Claim
76 words
A ceramic composite, comprising: (a) a ceramic substrate substantially free of a glassy phase and composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, said substrate defining a plurality of bore-coated vias, the vias coated with a conductive material selected from the group consisting of tungsten, molybdenum, and mixtures thereof; and (b) an infiltrant metal or alloy in association with at least one bore-coated via, the vias substantially free of glassy fillers.
Claim 24
Dependent Claim
30 words
A composite according to claim 19, wherein the infiltrant material is selected from the group consisting of: nickel, palladium, cobalt, silver, copper, gold, tungsten, molybdenum, alloys thereof, and mixtures thereof.
Claim 25
Dependent Claim
21 words
A composite according to claim 20, wherein the infiltrant material has a thermal expansion approximately equal to that of the substrate.
Claim 26
Dependent Claim
21 words
A composite according to claim 20, wherein the vias exhibit a helium leak rate of less than approximately 10 -9 cc/sec.
Claim 27
Dependent Claim
19 words
A composite according to claim 20, wherein the vias have a resistivity of less than approximately 6×10 -4 .
Claim 28
Dependent Claim
19 words
A composite according to claim 20, wherein the vias have a resistivity of less than approximately 4×10 -4 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-28 | 1993-02-27 | 1993-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-28 | 1997-02-27 | 1997-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-28 | 2001-02-27 | 2001-08-29 | $7700.00 | Window Closed / Lapsed |