US4861393A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor heterostructures having Gex Si1-x layers on Si utilizing molecular beam epitaxy
Assignee: Nokia Bell Labs
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Filing: 1987-05-28
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Granted: 1989-08-29
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Expires: 2007-05-28
Abstract
Abstract A molecular beam epitaxy method of growing Ge x Si 1-x films on silicon substrate is described. Semiconductor heterostructures using Ge x Si 1-x layers grown on either Ge or Si substrates are described.
Inventors
- 👤 John C. Bean
- 👤 Leonard C. Feldman
- 👤 Anthony T. Fiory
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 10:31
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/82; H10D62/822; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3211; H10P14/3242; H10P14/3244; H10P14/3248; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; Y; Y10; Y10S; Y10S148/00; Y10S148/025; Y10S148/059; Y10S148/067; Y10S148/072; Y10S148/169
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
110 words
A structure comprising a substrate consisting of material selected from the group consisting of Ge and Si and disposed on said substrate, at least one pseudomorphic layer comprising Ge x Si 1-x , x greater than 0.0 and less than or equal to 1.0 when said substrate is Si, and x greater than or equal to 0.0 and less than 1.0 when said substrate is Ge, said at least one pseudomorphic layer having a thickness approximately equal to h c where h c is approximately equal to 0.014 af -2 , a is the silicon lattice constant and f=(b-a)/a where b is the bulk Ge x Si 1-x lattice constant.
Claim 2
Dependent Claim
110 words
A structure comprising a substrate consisting of material selected from the group consisting of Ge and Si and disposed on said substrate, at least one pseudomorphic layer comprising Ge x Si 1-x , x greater than 0.0 and less than or equal to 1.0 when said substrate is Si, and x greater than or equal to 0.0 and less than 1.0 when said substrate is Ge, said at least one pseudomorphic layer having a thickness approximately equal to h c where h c is approximately equal to 0.014 af -2 , a is the silicon lattice constant and f=(b-a)/a where b is the bulk Ge x Si 1-x lattice constant.
Claim 3
Dependent Claim
13 words
A structure as recited in claim 11 in which said substrate comprises Si.
Claim 4
Dependent Claim
23 words
A structure as recited in claim 2 further comprising a layer of Si between said substrate and said Ge x Si 1-x layer.
Claim 5
Dependent Claim
20 words
A structure as recited in claim 3 further comprising a layer of Si on said Ge x Si 1-x layer.
Claim 6
Dependent Claim
18 words
A structure as recited in claim 4 in which at least one of said Si layers is doped.
Claim 7
Dependent Claim
16 words
A structure as recited in claim 1 comprising a plurality of Ge x Si 1-x layers.
Claim 8
Dependent Claim
22 words
A structure as recited in claim 6 further comprising a layer of Si on said plurality of Ge x Si 1-x layers.
Claim 9
Dependent Claim
14 words
A structure as recited in claim 7 in which said Si layer is oxidized.
Claim 10
Dependent Claim
13 words
A structure as recited in claim 1 in which said substrate comprises Ge.
Claim 11
Dependent Claim
22 words
A structure as recited in claim 9 further comprising a layer of Si, said layer contacting said Ge x Si 1-x layer.
Claim 12
Dependent Claim
19 words
A structure as recited in claim 10 in which at least a portion of said Si layer is oxidized.
Claim 13
Dependent Claim
14 words
A structure as recited in claim 10 in which said Si layer is oxidized.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-28 | 1993-02-27 | 1993-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-28 | 1997-02-27 | 1997-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-28 | 2001-02-27 | 2001-08-29 | $7700.00 | Window Closed / Lapsed |