US4860546A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum system with molecular flow line
Assignee: Azenta Inc
•
Filing: 1988-08-10
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Granted: 1989-08-29
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Expires: 2008-08-10
Abstract
Abstract In a vacuum system having a load lock cooperating with a work chamber, a flow line is connected between the cryopump of the load lock and the work chamber. The flow line passes noncondensible gases which are not absorbed by the cryopump of the load lock to the work chamber 12 for absorption by the cryopump of the work chamber. Alternatively, the flow line is connected between the load lock cryopump and the cryopump of the work chamber for directly passing the noncondensible gases to the work chamber cryopump. The flow line prevents buildup of noncondensible gases within the cryopump of the load lock. The flow line may include baffles to damp pressure surges during cryopumping of the load lock. A control valve connected to the flow line allows operator control of the passing of noncondensible gases from the load lock cryopump to the work chamber or to the work chamber cryopump through the flow line. The dimensions of the flow line provide molecular flow of the noncondensible gases.
Inventors
- 👤 John T. Harvell
- 👤 Philip A. Lessard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 14:50
CPC Classifications
F; F04; F04B; F04B37/00; F04B37/06; F04B37/08; B; B01; B01D; B01D8/00; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
88 words
A vacuum system comprising: a work chamber; a load lock for receiving material to be introduced into and removed from the work chamber; a first high vacuum pump for fluid communication with the load lock; a second high vacuum pump for fluid communication with the work chamber; and a flow line from the first high vacuum pump to the work chamber for allowing noncondensible gases in the first high vacuum pump to be passed to the work chamber and subsequently pumped away by the second high vacuum pump.
Claim 2
Dependent Claim
88 words
A vacuum system comprising: a work chamber; a load lock for receiving material to be introduced into and removed from the work chamber; a first high vacuum pump for fluid communication with the load lock; a second high vacuum pump for fluid communication with the work chamber; and a flow line from the first high vacuum pump to the work chamber for allowing noncondensible gases in the first high vacuum pump to be passed to the work chamber and subsequently pumped away by the second high vacuum pump.
Claim 3
Dependent Claim
29 words
A vacuum system as claimed in claim 1 wherein the flow line maintains molecular flow of the noncondensible gases from the first high vacuum pump to the work chamber.
Claim 4
Dependent Claim
17 words
A vacuum system as claimed in claim 1 wherein the flow line includes a low conductance pipe.
Claim 5
Dependent Claim
23 words
A vacuum system as claimed in claim 1 wherein the flow line includes a valve for enabling and disabling noncondensible gases to pass.
Claim 6
Dependent Claim
49 words
A vacuum system as claimed in claim 1 wherein the flow line includes a baffle arrangement at an end of the flow line associated with the first high vacuum pump, the baffle arrangement for damping pressure surges during operation of the first high vacuum pump on the load lock.
Claim 7
Dependent Claim
14 words
A vacuum system as claimed in claim 1 wherein the noncondensible gases include helium.
Claim 8
Independent Claim
100 words
A method of continuously processing material in a high vacuum system comprising the steps of: placing said material in a load lock; reducing the load lock pressure to a crossover pressure by means of a first high vacuum pump; reducing the pressure in a work chamber by means of a second high vacuum pump; passing noncondensible gases through a flow line from the first high vacuum pump to the work chamber for subsequent pumping by the second high vacuum pump; connecting the load lock to the work chamber; and transferring the material from the load lock into the work chamber.
Claim 9
Independent Claim
100 words
A method of continuously processing material in a high vacuum system comprising the steps of: placing said material in a load lock; reducing the load lock pressure to a crossover pressure by means of a first high vacuum pump; reducing the pressure in a work chamber by means of a second high vacuum pump; passing noncondensible gases through a flow line from the first high vacuum pump to the work chamber for subsequent pumping by the second high vacuum pump; connecting the load lock to the work chamber; and transferring the material from the load lock into the work chamber.
Claim 10
Dependent Claim
41 words
A method as claimed in claim 7 wherein the step of passing noncondensible gases through a flow line includes maintaining a molecular flow of the noncondensible gases in the flow line from the first high vacuum pump to the work chamber.
Claim 11
Dependent Claim
35 words
A method as claimed in claim 7 wherein the step of passing noncondensible gases through a flow line is accomplished at user desired times by opening and closing a valve connected to the flow line.
Claim 12
Dependent Claim
29 words
A method as claimed in claim 7 further comprising the step of damping pressure surges during operation of the first high vacuum pump with baffles in the flow line.
Claim 13
Dependent Claim
92 words
A vacuum system comprising: a work chamber; a load lock for receiving material to be introduced into and removed from the work chamber; a first high vacuum pump for fluid communication with the load lock; a second high vacuum pump for fluid communication with the work chamber; and a flow line from the first high vacuum pump to the second high vacuum pump for allowing noncondensible gases from the first high vacuum pump to be passed to the second high vacuum pump and subsequently pumped away by the second high vacuum pump.
Claim 14
Dependent Claim
92 words
A vacuum system comprising: a work chamber; a load lock for receiving material to be introduced into and removed from the work chamber; a first high vacuum pump for fluid communication with the load lock; a second high vacuum pump for fluid communication with the work chamber; and a flow line from the first high vacuum pump to the second high vacuum pump for allowing noncondensible gases from the first high vacuum pump to be passed to the second high vacuum pump and subsequently pumped away by the second high vacuum pump.
Claim 15
Dependent Claim
31 words
A vacuum system as claimed in claim 11 wherein the flow line maintains molecular flow of the noncondensible gases from the first high vacuum pump to the second high vacuum pump.
Claim 16
Dependent Claim
17 words
A vacuum system as claimed in claim 11 wherein the flow line includes a low conductance pipe.
Claim 17
Dependent Claim
23 words
A vacuum system as claimed in claim 11 wherein the flow line includes a valve for enabling and disabling noncondensible gases to pass.
Claim 18
Dependent Claim
49 words
A vacuum system as claimed in claim 11 wherein the flow line includes a baffle arrangement at an end of the flow line associated with the first high vacuum pump, the baffle arrangement for damping pressure surges during operation of the first high vacuum pump on the load lock.
Claim 19
Dependent Claim
14 words
A vacuum system as claimed in claim 11 wherein the noncondensible gases include helium.
Claim 20
Independent Claim
102 words
A method of continuously processing material in a high vacuum system comprising the steps of: placing said material in a load lock; reducing the load lock pressure to a crossover pressure by means of a first high vacuum pump; reducing the pressure in a work chamber by means of a second high vacuum pump; passing noncondensible gases through a flow line from the first high vacuum pump to the second high vacuum pump for subsequent pumping by the second high vacuum pump; connecting the load lock to the work chamber; and transferring the material from the load lock into the work chamber.
Claim 21
Independent Claim
102 words
A method of continuously processing material in a high vacuum system comprising the steps of: placing said material in a load lock; reducing the load lock pressure to a crossover pressure by means of a first high vacuum pump; reducing the pressure in a work chamber by means of a second high vacuum pump; passing noncondensible gases through a flow line from the first high vacuum pump to the second high vacuum pump for subsequent pumping by the second high vacuum pump; connecting the load lock to the work chamber; and transferring the material from the load lock into the work chamber.
Claim 22
Dependent Claim
43 words
A method as claimed in claim 17 wherein the step of passing noncondensible gases through a flow line includes maintaining a molecular flow of the noncondensible gases in the flow line from the first high vacuum pump to the second high vacuum pump.
Claim 23
Dependent Claim
35 words
A method as claimed in claim 17 wherein the step of passing noncondensible gases through a flow line is accomplished at user desired times by opening and closing a valve connected to the flow line.
Claim 24
Dependent Claim
30 words
A method as claimed in claim 17 further comprising the step of damping pressure surges during operation of the first high vacuum pump with baffles positioned in the flow line.
Claim 25
Dependent Claim
92 words
A vacuum system comprising: a work chamber; a load lock for receiving material to be introduced into and removed from the work chamber; a first high vacuum pump for fluid communication with the load lock; a second high vacuum pump for fluid communication with the work chamber; and valving means coupling the first high vacuum pump, load lock and work chamber for allowing noncondensible gases in the first high vacuum pump to be passed through the load lock to the work chamber and subsequently pumped away by the second high vacuum pump.
Claim 26
Dependent Claim
92 words
A vacuum system comprising: a work chamber; a load lock for receiving material to be introduced into and removed from the work chamber; a first high vacuum pump for fluid communication with the load lock; a second high vacuum pump for fluid communication with the work chamber; and valving means coupling the first high vacuum pump, load lock and work chamber for allowing noncondensible gases in the first high vacuum pump to be passed through the load lock to the work chamber and subsequently pumped away by the second high vacuum pump.
Claim 27
Independent Claim
81 words
A method of minimizing accumulation of noncondensible gases in a high vacuum system comprising the steps of: simultaneously providing fluid communication between a load lock and work chamber and between the load lock and a first high vacuum pump associated with the load lock; allowing noncondensible gases to flow from the first high vacuum pump, through the load lock to the work chamber; and pumping the noncondensible gases out of the work chamber by means of a second high vacuum pump.
Claim 28
Independent Claim
81 words
A method of minimizing accumulation of noncondensible gases in a high vacuum system comprising the steps of: simultaneously providing fluid communication between a load lock and work chamber and between the load lock and a first high vacuum pump associated with the load lock; allowing noncondensible gases to flow from the first high vacuum pump, through the load lock to the work chamber; and pumping the noncondensible gases out of the work chamber by means of a second high vacuum pump.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-28 | 1993-02-27 | 1993-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-28 | 1997-02-27 | 1997-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-28 | 2001-02-27 | 2001-08-29 | $7700.00 | Window Closed / Lapsed |