US4488507A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Susceptors for organometallic vapor-phase epitaxial (OMVPE) method
Assignee: United States Department of the Army
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Filing: 1982-09-30
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Granted: 1984-12-18
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Expires: 2002-09-30
Abstract
Abstract Susceptor formed with a base and with a pedestal made of materials respectively having low and high radio-frequency (r-f) absorptivities. Mercury is carried in a cavity in the base and a semiconductor substrate is carried in a cavity in the pedestal. When an r-f field is applied to the susceptor, the substrate is heated to a higher temperature than the mercury.
Inventors
- 👤 David A. Jackson, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:09
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/12
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
90 words
A susceptor for use in a vapor-growth reactor wherein two different temperature regions are required, and wherein said susceptor is a body constructed at least partially of a radio-frequency energy-absorbing material heated by an adjacent radio-frequency coil, whereby said body includes: a first volume of a first predetermined radio-frequency absorptivity and with a reservoir formed therein for holding a material to be vaporized; and a second volume of a second predetermined radio-frequency absorptivity higher than said first predetermined radio-frequency absorptivity and with a cavity formed therein for holding a substrate.
Claim 2
Dependent Claim
90 words
A susceptor for use in a vapor-growth reactor wherein two different temperature regions are required, and wherein said susceptor is a body constructed at least partially of a radio-frequency energy-absorbing material heated by an adjacent radio-frequency coil, whereby said body includes: a first volume of a first predetermined radio-frequency absorptivity and with a reservoir formed therein for holding a material to be vaporized; and a second volume of a second predetermined radio-frequency absorptivity higher than said first predetermined radio-frequency absorptivity and with a cavity formed therein for holding a substrate.
Claim 3
Dependent Claim
36 words
The susceptor as set forth in claim 1 wherein said body is in the form of a base with a pedestal thereon, and said first and second volumes correspond respectively to said base and said pedestal.
Claim 4
Dependent Claim
34 words
The susceptor as set forth in claim 2 wherein said base is generally in the shape of a parallelepiped, and said pedestal is generally in the shape a section of a right circular cylinder.
Claim 5
Dependent Claim
30 words
The susceptor as set forth in claim 2 wherein said base is generally cup-shaped and said pedestal is generally in the shape of a section of a right circular cylinder.
Claim 6
Dependent Claim
31 words
The susceptor as set forth in claim 4 wherein said base includes a columnar portion arising from the bottom of the cup and wherein said pedestal is atop said columnar portion.
Claim 7
Dependent Claim
31 words
The susceptor as recited in claim 4 wherein said base has a central perforation in the bottom of the cup and said pedestal includes a portion slidably extending into said perforation.
Claim 8
Dependent Claim
32 words
The susceptor as set forth in claim 3 wherein at least one of said base and said pedestal includes a bore therein with an r-f absorbing material slidably inserted in said bore.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-18 | 1988-06-18 | 1988-12-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-18 | 1992-06-18 | 1992-12-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-18 | 1996-06-18 | 1996-12-18 | $7700.00 | Window Closed / Lapsed |