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US4479927A Expired / Lapsed US ⏱️ 0.0 years remaining

Regenerable cold trap for aluminum chloride effluent

Assignee: Lam Research Corp
•
Filing: 1982-08-09
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Granted: 1984-10-30
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Expires: 2002-08-09
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Abstract

Abstract Aluminum chloride gases and other gases from a processing system are directed to a cold trap including a blower connected thereto. The blower directs the gases, except for the aluminum chloride, out of the cold trap. The aluminum chloride is solidified in the trap. Means including a heater are provided to convert the solid aluminum chloride to a vapor and selectively empty the aluminum chloride out of the cold trap into another trap associated with means for chemically treating the aluminum chloride. The cold trap is then cooled and ready to receive additional aluminum chloride from the processing system.

Inventors

  • 👤 Barry Gelernt

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 00:23
CPC Classifications
C; C01; C01F; C01F7/00; C01F7/48; C01F7/56; C01F7/58; C01B; C01B7/00; C01B7/01; C01B7/03; C01B7/035

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 120 words
In a chemical processing system which produces aluminum chloride gas as a by-product, a process for rendering said aluminum chloride gas harmless comprising the steps of: selectively transferring said aluminum chloride gas to a cold trap, cooling said cold trap to cause said aluminum chloride gas to solidify while said system is in operation, heating said cold trap to cause said aluminum chloride solid to vaporize while the operation of said processing system is discontinued, transferring said aluminum chloride vapor to a second trap, cooling said second trap to cause said aluminum chloride vapor to solidify, injecting water into said second trap for reaction with said aluminum chloride to form hydrogen chloride, draining said hydrogen chloride from said second trap.
Claim 2
Dependent Claim 120 words
In a chemical processing system which produces aluminum chloride gas as a by-product, a process for rendering said aluminum chloride gas harmless comprising the steps of: selectively transferring said aluminum chloride gas to a cold trap, cooling said cold trap to cause said aluminum chloride gas to solidify while said system is in operation, heating said cold trap to cause said aluminum chloride solid to vaporize while the operation of said processing system is discontinued, transferring said aluminum chloride vapor to a second trap, cooling said second trap to cause said aluminum chloride vapor to solidify, injecting water into said second trap for reaction with said aluminum chloride to form hydrogen chloride, draining said hydrogen chloride from said second trap.
Claim 3
Dependent Claim 43 words
A process as set forth in claim 1 wherein said step of selectively transferring said aluminum chloride to said cold trap comprises the step of selectively opening and closing a valve connected in a conduit between said processing system and said cold trap.
Claim 4
Dependent Claim 53 words
A process as set forth in claim 2 wherein said chemical treatment station comprises a second trap and the step of transferring said aluminum chloride to said second trap comprises the step of selectively opening and closing a second valve connected in a second conduit between said cold trap and said second trap.
Claim 5
Dependent Claim 51 words
A process as set forth in claim 3 wherein the additional steps are provided of selectively closing said second valve when said first valve is opened during the operation of said processing system and for selectively closing said first valve when said second valve is opened when said operation is discontinued.
Claim 6
Dependent Claim 159 words
Apparatus for removing aluminum chloride gas from a group of by-product gases generated in a chemical processing system, first trap means connected in said processing system for receiving said by-product gases, means for cooling said first trap means as said by-product gases pass therethrough to solidify and trap the aluminum chloride in said first trap, means for heating said first trap means to vaporize said aluminum chloride gas after a predetermined amount has been solidified, second trap means connected to said first trap means for collecting said vaporized aluminum chloride, valve means disposed between said first and second trap means to open only to permit passage of said aluminum chloride gas to said second trap means, means for cooling said second trap means to solidify said aluminum chloride gas, means for inserting water into said second trap means for reacting with the aluminum chloride to form hydrogen chloride, means for draining the hydrogen chloride from said second trap means.
Claim 7
Dependent Claim 159 words
Apparatus for removing aluminum chloride gas from a group of by-product gases generated in a chemical processing system, first trap means connected in said processing system for receiving said by-product gases, means for cooling said first trap means as said by-product gases pass therethrough to solidify and trap the aluminum chloride in said first trap, means for heating said first trap means to vaporize said aluminum chloride gas after a predetermined amount has been solidified, second trap means connected to said first trap means for collecting said vaporized aluminum chloride, valve means disposed between said first and second trap means to open only to permit passage of said aluminum chloride gas to said second trap means, means for cooling said second trap means to solidify said aluminum chloride gas, means for inserting water into said second trap means for reacting with the aluminum chloride to form hydrogen chloride, means for draining the hydrogen chloride from said second trap means.

References Cited (Backward Citations)

US1478750A Cited
US2450289A Cited
US2813786A Cited
US3690827A Cited
JPS5230147A Cited
US4252772A Cited
GB2037966A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-10-30 1988-04-30 1988-10-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-10-30 1992-04-30 1992-10-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-10-30 1996-04-30 1996-10-30 $7700.00 Window Closed / Lapsed

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