Patent US4859993A successfully refreshed from Google Patents.
US4859993A
Expired / Lapsed
US
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Wafer accounting and processing system
Assignee: Tokyo Electron Ltd
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Filing: 1988-02-12
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Granted: 1989-08-22
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Expires: 2008-02-12
Abstract
Abstract According to the invention, each detecting element pair of a wafer detector is constituted by light-emitting and light-receiving elements of transmission-type and is arranged at a position corresponding to a fitting edge portion of one of a plurality of wafers. The number of detecting element pairs is equal to the number of wafers which can be stored in the wafer counter. Light emitted from a light-emitting element to a light-receiving element is kept substantially perpendicular to a surface of a wafer and is shielded when a wafer is engaged in a wafer counter. A change in the amount of light received by the light-receiving element is detected by a signal processor electrically connected to each of the detecting element pairs. The positions and number of a large number of wafers can be accurately and instantaneously detected with an extremely simple structure.
Inventors
- 👤 Toshihiko Kagami
- 👤 Kazuyoshi Kobayashi
- 👤 Eiji Asakawa
- 👤 Atushi Osada
- 👤 Kozo Hara
- 👤 Yasuji Abe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:13
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/06; H10P72/0606; H10P72/0608; Y; Y10; Y10S; Y10S269/00; Y10S269/903
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
102 words
A wafer accounting and processing system, comprising: plural wafer guides spaced apart from each other formed within a cassette to engage with edges of wafers each aligned at a predetermined pitch; plural detecting element pairs, each detecting element pair consisting of a light-emitting element and a light-receiving element also formed within said cassette in cooperation with said plural wafer guides such that an optical path is shielded when said wafer is engaged with a corresponding wafer guide; and a signal processor electrically connected to said detecting element pair, said signal processor being adapted to detect the presence or absence of a wafer.
Claim 2
Dependent Claim
102 words
A wafer accounting and processing system, comprising: plural wafer guides spaced apart from each other formed within a cassette to engage with edges of wafers each aligned at a predetermined pitch; plural detecting element pairs, each detecting element pair consisting of a light-emitting element and a light-receiving element also formed within said cassette in cooperation with said plural wafer guides such that an optical path is shielded when said wafer is engaged with a corresponding wafer guide; and a signal processor electrically connected to said detecting element pair, said signal processor being adapted to detect the presence or absence of a wafer.
Claim 3
Dependent Claim
14 words
A system according to claim 1, wherein: said detecting element pair comprise transmission-type elements.
Claim 4
Dependent Claim
20 words
A system according to claim 1, wherein: said detecting element pair comprises a photo-coupler consisting of light-emitting and light-receiving elements.
Claim 5
Dependent Claim
28 words
A system according to claim 1, wherein: wafer guides are arranged on a base to guide the respective wafers to each place formed between said detecting element pair.
Claim 6
Dependent Claim
15 words
A system according to claim 4, wherein said wafer guides are formed of a fluoroplastic.
Claim 7
Dependent Claim
18 words
A system according to claim 1, wherein said detecting element pair is held on a base by insulators.
Claim 8
Dependent Claim
15 words
A system according to claim 6, wherein said insulators are formed of glass epoxy resin.
Claim 9
Dependent Claim
38 words
A system according to claim 1, wherein: said detecting element pair is arranged such that an optical axis between said light-emitting and light-receiving elements is closer to the center than to an orientation flat side of a wafer.
Claim 10
Dependent Claim
39 words
A system according to claim 1, wherein: said detecting element pair is arranged on a base such that the wafer is inserted in and removed from a place formed between said detecting element pair and another detector element pair.
Claim 11
Dependent Claim
42 words
A system according to claim 1, wherein: two detecting element pair are arranged such that an optical axis between a light-emitting element and a light-receiving element is substantially perpendicular to a surface of a wafer located between said two detecting element pairs.
Claim 12
Dependent Claim
145 words
A wafer accounting and processing system, comprising: a base; a plurality of wafer guiding means arranged in a plurality of columns and rows for properly positioning a plurality of wafers in said wafer accounting and processing system, said plurality of wafer guiding means being mounted to said base; a plurality of insulators mounted in a single column and in a plurality of rows on said base such that each wafer of said plurality of wafers can be inserted between adjacent rows of said plurality of wafer guiding means and said plurality of insulators; each insulator of said plurality of insulators having a detecting element pair such that a light-emitting element of one insulator is focused upon a light-receiving element of another insulator in an adjacent row; and signal processing means electrically connected to the detecting element pair of each insulator of said plurality of insulators.
Claim 13
Dependent Claim
145 words
A wafer accounting and processing system, comprising: a base; a plurality of wafer guiding means arranged in a plurality of columns and rows for properly positioning a plurality of wafers in said wafer accounting and processing system, said plurality of wafer guiding means being mounted to said base; a plurality of insulators mounted in a single column and in a plurality of rows on said base such that each wafer of said plurality of wafers can be inserted between adjacent rows of said plurality of wafer guiding means and said plurality of insulators; each insulator of said plurality of insulators having a detecting element pair such that a light-emitting element of one insulator is focused upon a light-receiving element of another insulator in an adjacent row; and signal processing means electrically connected to the detecting element pair of each insulator of said plurality of insulators.
Claim 14
Dependent Claim
48 words
A wafer accounting and processing system according to claim 11, further comprising: a wafer cassette having a first side wall and a second side wall between which said base is mounted; and a plurality of complementary grooves arranged on said first side wall and said second side wall.
Claim 15
Dependent Claim
39 words
A wafer accounting and processing system according to claim 11, wherein: when a wafer is located between the light-emitting element of one insulator and the light receiving element of another insulator, an output of the light-receiving element is zero.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-21 | 1993-02-20 | 1993-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-21 | 1997-02-20 | 1997-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-21 | 2001-02-20 | 2001-08-22 | $7700.00 | Window Closed / Lapsed |