US4513430A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Missing or broken wafer sensor
Assignee: Varian Semiconductor Equipment Associates Inc
•
Filing: 1982-05-24
•
Granted: 1985-04-23
•
Expires: 2002-05-24
Abstract
Abstract Apparatus for sensing a missing or broken wafer in an automated wafer transfer system. The apparatus includes means for moving a wafer transfer mechanism from a first position along a prescribed path. A counter coupled to an oscillator is enabled when the wafer transfer mechanism and a wafer are moved away from the first position. A photosensor senses the presence of the wafer at a second position along the prescribed path and inhibits the counter. The count stored in the counter is compared with a predetermined count corresponding to the time required for movement of an unbroken wafer to the second position. If the counts do not agree, a missing or broken wafer is indicated and corrective action is taken.
Inventors
- 👤 Mahasukh Vora
- 👤 Rajender Malhotra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:38
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0616; H10P72/0606
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
221 words
Apparatus for detecting a condition wherein a wafer in a wafer transfer mechanism is missing or broken, said apparatus comprising: transfer means for moving said wafer from a first position along a prescribed path to a second position; oscillator means; counter means having a count input coupled to the output of said oscillator; first sensing means for sensing movement of said transfer means from said first position along said prescribed path and for thereupon enabling said counter means; second sensing means for non-contact sensing of said wafer in said transfer means at an intermediate position along said prescribed path without interrupting the movement of said wafer and for thereupon inhibiting said counter means, said second sensing means comprising a light emitting element having a beam directed laterally across said prescribed path and a photosensor directed laterally across said prescribed path and positioned to receive said beam; and comparator means for comparing the accumulated count in said counter means with a predetermined count representing the presence of a non-broken wafer and for providing an output signal of a first state when the accumulated count equals the predetermined count and of a second state when the accumulated count and the predetermined count are not equal, said second state of said comparator output signal representing said condition wherein said wafer is broken or missing.
Claim 2
Dependent Claim
221 words
Apparatus for detecting a condition wherein a wafer in a wafer transfer mechanism is missing or broken, said apparatus comprising: transfer means for moving said wafer from a first position along a prescribed path to a second position; oscillator means; counter means having a count input coupled to the output of said oscillator; first sensing means for sensing movement of said transfer means from said first position along said prescribed path and for thereupon enabling said counter means; second sensing means for non-contact sensing of said wafer in said transfer means at an intermediate position along said prescribed path without interrupting the movement of said wafer and for thereupon inhibiting said counter means, said second sensing means comprising a light emitting element having a beam directed laterally across said prescribed path and a photosensor directed laterally across said prescribed path and positioned to receive said beam; and comparator means for comparing the accumulated count in said counter means with a predetermined count representing the presence of a non-broken wafer and for providing an output signal of a first state when the accumulated count equals the predetermined count and of a second state when the accumulated count and the predetermined count are not equal, said second state of said comparator output signal representing said condition wherein said wafer is broken or missing.
Claim 3
Dependent Claim
28 words
The apparatus as defined in claim 1 wherein said photosensor is positioned to receive said beam after reflection from a surface of said wafer traversing said prescribed path.
Claim 4
Dependent Claim
166 words
Apparatus for detecting a condition wherein a wafer in a wafer transfer mechanism is missing or broken, said apparatus comprising: transfer means for moving said wafer from a first position along a prescribed path to a second position; first sensing means for sensing movement of said transfer means from said first position along said prescribed path and thereupon providing a first sensing signal; a plurality of second sensing means positioned along said prescribed path for non-contact sensing of predetermined different portions of said wafer surface without interrupting the movement of said wafer, and thereupon providing second sensing signals; and a plurality of sensor circuits, each associated with one of said second sensing means and including means for determining the measured time between said first sensing signal and each associated second sensing signal, and means for providing an output signal only when each said measured time is equal to a respective, associated predetermined time, whereby breaks in said predetermined different portions of said wafer surface are detected.
Claim 5
Dependent Claim
166 words
Apparatus for detecting a condition wherein a wafer in a wafer transfer mechanism is missing or broken, said apparatus comprising: transfer means for moving said wafer from a first position along a prescribed path to a second position; first sensing means for sensing movement of said transfer means from said first position along said prescribed path and thereupon providing a first sensing signal; a plurality of second sensing means positioned along said prescribed path for non-contact sensing of predetermined different portions of said wafer surface without interrupting the movement of said wafer, and thereupon providing second sensing signals; and a plurality of sensor circuits, each associated with one of said second sensing means and including means for determining the measured time between said first sensing signal and each associated second sensing signal, and means for providing an output signal only when each said measured time is equal to a respective, associated predetermined time, whereby breaks in said predetermined different portions of said wafer surface are detected.
Claim 6
Dependent Claim
98 words
The apparatus as defined in claim 3 wherein said sensor circuits each include oscillator means, counter means having a count input coupled to the output of said oscillator, said counter means being enabled by said first sensing signal and inhibited by the associated second sensing signal, and comparator means for comparing the accumulated count in said counter means with a predetermined count and for providing said output signal of a first state when the accumulated count and the predetermined count are equal and of a second state when the accumulated count and the predetermined count are not equal.
Claim 7
Dependent Claim
44 words
The apparatus as defined in claim 4 wherein said second sensing means are positioned to match the shape of the leading edge of the wafer so that said second sensing signal occur substantially simultaneously when an unbroken wafer is present in said transfer means.
Claim 8
Dependent Claim
52 words
The apparatus as defined in claim 5 wherein said second sensing means each comprise a light emitting element having a beam directed laterally across said prescribed path and a photosensor directed laterally across said prescribed path and positioned to receive said beam after reflection from said predetermined portion of said wafer surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-04-22 | 1988-10-22 | 1989-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-04-22 | 1992-10-22 | 1993-04-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-04-22 | 1996-10-22 | 1997-04-23 | $7700.00 | Window Closed / Lapsed |