US4855775A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Developing apparatus
Assignee: Tokyo Electron Ltd
•
Filing: 1988-04-22
•
Granted: 1989-08-08
•
Expires: 2008-04-22
Abstract
Abstract In a developing apparatus according to the present invention, a supply path of a developing solution is formed in a cup member which constitutes a dip tank of the developing solution so that the spraying pressure of the developing solution is not directly applied to an object to be processed. As a result, uniform, high-quality images can be developed on an entire area of the object.
Inventors
- 👤 Fuminori Matsuoka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 08:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/3021; G03D; G03D5/00; G03D5/04; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
122 words
A developing apparatus, comprising: a cup member forming a dip tank for a developing solution and within which an object to be developed is positioned; means for supplying the developing solution to said cup member so that said object can be dipped in the developing solution for performance of dip development, wherein said means for supplying developing solution comprises a supply path for supplying said developing solution into said cup member and which includes a developing solution supply pipe positioned in said cup member and at least one arcuate slit-like spraying port formed in an inner circumferential wall of said cup member and connected to said supply pipe such that said developing solution is uniformly dispersed from a periphery of said object.
Claim 2
Dependent Claim
122 words
A developing apparatus, comprising: a cup member forming a dip tank for a developing solution and within which an object to be developed is positioned; means for supplying the developing solution to said cup member so that said object can be dipped in the developing solution for performance of dip development, wherein said means for supplying developing solution comprises a supply path for supplying said developing solution into said cup member and which includes a developing solution supply pipe positioned in said cup member and at least one arcuate slit-like spraying port formed in an inner circumferential wall of said cup member and connected to said supply pipe such that said developing solution is uniformly dispersed from a periphery of said object.
Claim 3
Dependent Claim
53 words
An apparatus according to claim 1, wherein said at least one, arcuate slit-like spraying port comprises a plurality of spraying tubes formed in said inner circumferential wall of said cup member at predetermined angular intervals such that a uniform amount of developing solution is supplied toward a central portion of said cup member.
Claim 4
Dependent Claim
30 words
An apparatus according to claim 1, wherein said at least one arcuate, slit-like spraying port is formed so as to be exposed to a bottom portion of said cup member.
Claim 5
Dependent Claim
28 words
An apparatus according to claim 1, wherein said cup member comprises an inner cup and a lower cup wherein said inner cup is positioned within said lower cup.
Claim 6
Dependent Claim
40 words
An apparatus according to claim 1 wherein said spraying port of said at least one arcuate, slit-like supplying port is formed on a bottom side portion of said cup member with respect to said object located in said cup member.
Claim 7
Dependent Claim
21 words
An apparatus according to claim 1, wherein a portion of said dip tank is formed by a portion of said object.
Claim 8
Dependent Claim
18 words
An apparatus according to claim 1 wherein said object comprises a resist film deposited on a semiconductor wafer.
Claim 9
Dependent Claim
121 words
A developing apparatus comprising: a cup member forming a dip tank for a developing solution and within which an object to be developed is positioned; means for supplying the developing solution to said cup member so that said object can be dipped in the developing solution for performance of dip development, wherein said means for supplying developing solution comprises a supply path for supplying said developing solution into said cup member and which includes a developing solution supply pipe positioned in said cup member and at least one slit-like spraying port formed in an inner circumferential wall of said cup member and connected to said supply pipe such that said developing solution is uniformly dispersed from a periphery of said object.
Claim 10
Dependent Claim
121 words
A developing apparatus comprising: a cup member forming a dip tank for a developing solution and within which an object to be developed is positioned; means for supplying the developing solution to said cup member so that said object can be dipped in the developing solution for performance of dip development, wherein said means for supplying developing solution comprises a supply path for supplying said developing solution into said cup member and which includes a developing solution supply pipe positioned in said cup member and at least one slit-like spraying port formed in an inner circumferential wall of said cup member and connected to said supply pipe such that said developing solution is uniformly dispersed from a periphery of said object.
References Cited (Backward Citations)
US4161356A
Cited
JPS5655047A
Cited
JPS5745232A
Cited
US4429983A
Cited
US4557785A
Cited
US4519846A
Cited
US4682615A
Cited
US4755844A
Cited
US4753258A
Cited
US4745422A
Cited
US4788994A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-07 | 1993-02-06 | 1993-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-07 | 1997-02-06 | 1997-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-07 | 2001-02-06 | 2001-08-08 | $7700.00 | Window Closed / Lapsed |