Patent US4855673A successfully refreshed from Google Patents.
US4855673A
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US
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Electron beam apparatus
Assignee: Hitachi Ltd
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Filing: 1988-02-16
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Granted: 1989-08-08
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Expires: 2008-02-16
Abstract
Abstract In an electron beam apparatus in which an electron beam is irradiated on a specimen, secondary electrons are generated from the specimen under the bombardment of the electron beam, and voltage is applied to and a signal voltage is picked up from the specimen through a probe, a metal electrode is disposed on at least part of the outer peripheral surface of the probe through an insulator and the metal electrode is maintained at predetermined electrical potential. The secondary electrons can be shielded from a horizontal electric field generated from the probe and can be detected accurately by means of a detector.
Inventors
- 👤 Hideo Todokoro
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:05
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/18; G01R1/06; G01R1/067; G01R1/06711; G01R31/00; G01R31/28; G01R31/302; G01R31/305
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
65 words
An electron beam apparatus comprising: means for irradiating an electron beam on a specimen; detection means for detecting secondary electrons generated from said specimen under the bombardment of the electron beam; a probe for applying a voltage to said specimen and picking up a signal voltage from said specimen; and shield means for shielding the secondary electrons from an electric field generated from said probe.
Claim 2
Dependent Claim
65 words
An electron beam apparatus comprising: means for irradiating an electron beam on a specimen; detection means for detecting secondary electrons generated from said specimen under the bombardment of the electron beam; a probe for applying a voltage to said specimen and picking up a signal voltage from said specimen; and shield means for shielding the secondary electrons from an electric field generated from said probe.
Claim 3
Dependent Claim
51 words
An electron beam apparatus according to claim 1 wherein said shield means comprises a metal electrode disposed proximate to and electrically insulated from at least part of the outer peripheral surface of said probe by an insulator, and potential maintaining means for maintaining said metal electrode at a predetermined electrical potential.
Claim 4
Dependent Claim
21 words
An electron beam apparatus according to claim 2 wherein said potential maintaining means maintains said metal electrode at predetermined positive potential.
Claim 5
Dependent Claim
26 words
An electron beam apparatus according to claim 2 wherein said metal electrode is disposed proximate to said probe at only its surface confronting the electron beam.
Claim 6
Dependent Claim
23 words
An electron beam apparatus according to claim 2 wherein said metal electrode is a metal strip which is toroidally wound about said probe.
Claim 7
Dependent Claim
35 words
An electron beam apparatus according to claim 2 wherein said insulator is an insulating film formed on the surface of said probe, and said metal electrode is a metal film formed on said insulating film.
Claim 8
Dependent Claim
34 words
An electron beam apparatus according to claim 2 wherein said insulator is disposed on at least part of the outer peripheral surface of said probe and said metal electrode is disposed on said insulator.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-07 | 1993-02-06 | 1993-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-07 | 1997-02-06 | 1997-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-07 | 2001-02-06 | 2001-08-08 | $7700.00 | Window Closed / Lapsed |