Illumination optical system

Claim 2

An illumination optical system usable with a projection optical system for projecting a pattern of a first object upon a second object, for illuminating a surface of the first object, said illumination optical system comprising: an optical system effective to direct light from a light source to the surface to be illuminated and also being effective to form an image of the light source on a pupil of the projection optical system; and optical means disposed in a path of the light defined by said directing optical system, said optical means having a variable refracting power which is variable in accordance with the size of the surface to be illuminated; wherein said image of the light source is formed at a constant position irrespective of the change in the refracting power of said optical means.

Claim 3

An illumination optical system according to claim 1, wherein said optical means comprises a plurality of single-lens groups at least one of which is movable in a direction of an optical axis defined by said optical system.

Claim 4

An illumination optical system according to claim 1, wherein said optical means comprises a plurality of compound-eye lens groups at least one of which is movable in a direction of an optical axis defined by said optical system.

Claim 5

An illumination optical system according to claim 1, wherein said optical system includes multibeam producing means for receiving the light from the light source and producing a number of light beams which are superimposed upon one another on the surface to be illuminated.

Claim 6

An illumination optical system according to claim 1, further comprising means for restricting a range of illumination by the light and wherein said optical means is arranged to illuminate said restricting means.

Claim 7

An illumination optical system according to claim 1, wherein said light source is formed by a secondary light source, said secondary light source includes a lamp.

Claim 8

An illumination optical system usable with a projection optical system for projecting a pattern of a first object upon a second object, for illuminating a surface of the first object, said illumination optical system comprising: a multi-beam producing system for receiving light from a light source and for forming a secondary light source which emits a plurality of light beams; a condensing optical system for directing the light beams to the surface to be illuminated, said condensing optical system being effective to form an image of said secondary light source on a pupil of the projection optical system and also being effective to superimpose the light beams upon one another on the surface to be illuminated; and said condensing optical system including optical means disposed in a path of the light beams from said multi-beam producing system, said optical means having a variable refracting power which is variable in accordance with the size of the surface to be illuminated; wherein said image of said secondary light source is formed at a constant position irrespective of the change in the refracting power of said optical means.

Claim 9

An illumination optical system usable with a projection optical system for projecting a pattern of a first object upon a second object, for illuminating a surface of the first object, said illumination optical system comprising: a multi-beam producing system for receiving light from a light source and for forming a secondary light source which emits a plurality of light beams; a condensing optical system for directing the light beams to the surface to be illuminated, said condensing optical system being effective to form an image of said secondary light source on a pupil of the projection optical system and also being effective to superimpose the light beams upon one another on the surface to be illuminated; and said condensing optical system including optical means disposed in a path of the light beams from said multi-beam producing system, said optical means having a variable refracting power which is variable in accordance with the size of the surface to be illuminated; wherein said image of said secondary light source is formed at a constant position irrespective of the change in the refracting power of said optical means.

Claim 10

An illumination optical system according to claim 7, further comprising means for restricting a range of illumination by the light beams and wherein the light beams from said multi-beam producing system path through said restricting means and are directed to the surface to be illuminated.

Claim 11

An illumination optical system according to claim 7, wherein said optical means comprises a plurality of lens groups at least one of which is movable in a direction of an optical axis of said illumination optical system.

Claim 12

An illumination optical system according to claim 9, wherein said multi-beam producing system comprises a plurality of compound-eye lens groups at least one of which is movable in a direction of an optical axis of said illumination optical system.

Claim 13

An illumination optical system usable with a projection optical system for projecting a pattern of a first object upon a second object, for illuminating a surface of the first object, said illumination optical system comprising: a multi-beam producing system for receiving light from a light source and for forming a secondary light source which emits a plurality of light beams, said multi-beam producing system having a variable refracting power which is variable in accordance with the size of the surface to be illuminated; and a condensing optical system effective to direct the light beams from said multi-beam producing system to the surface to be illuminated, and also being effective to superimpose the light beams upon one another on the surface to be illuminated, said condensing optical system being further effective to bring said secondary light source into a conjugate relationship with a pupil of the projection optical system; wherein the conjugate relationship is maintained irrespective of the change in the refracting power of said multi-beam producing system.

Claim 14

An illumination optical system usable with a projection optical system for projecting a pattern of a first object upon a second object, for illuminating a surface of the first object, said illumination optical system comprising: a multi-beam producing system for receiving light from a light source and for forming a secondary light source which emits a plurality of light beams, said multi-beam producing system having a variable refracting power which is variable in accordance with the size of the surface to be illuminated; and a condensing optical system effective to direct the light beams from said multi-beam producing system to the surface to be illuminated, and also being effective to superimpose the light beams upon one another on the surface to be illuminated, said condensing optical system being further effective to bring said secondary light source into a conjugate relationship with a pupil of the projection optical system; wherein the conjugate relationship is maintained irrespective of the change in the refracting power of said multi-beam producing system.

Claim 15

An illumination device comprising: light source means for supplying light; and an optical system for receiving the light from said light source means and for directing the light to a surface to be illuminated, said optical system having optical means whose refracting power is variable in accordance with the size of the surface to be illuminated; wherein said optical system has a rear principal plane which is at a distance from the surface to be illuminated, substantially corresponding to the focal length of said optical system and wherein said distance and said focal length are in a fixed relation irrespective of the change in the refracting power of said optical means.

Claim 16

An illumination device comprising: light source means for supplying light; and an optical system for receiving the light from said light source means and for directing the light to a surface to be illuminated, said optical system having optical means whose refracting power is variable in accordance with the size of the surface to be illuminated; wherein said optical system has a rear principal plane which is at a distance from the surface to be illuminated, substantially corresponding to the focal length of said optical system and wherein said distance and said focal length are in a fixed relation irrespective of the change in the refracting power of said optical means.

Claim 17

A device according to claim 12, wherein said light source means comprises a light source and an elliptical mirror effective to collect the light from said light source.

Claim 18

An illumination device according to claim 12, wherein said optical means comprises a plurality of lens groups which are movable in a direction of an optical axis of said illumination device.

Claim 19

An illumination device according to claim 14, wherein each of said lens groups comprises a compound-eye lens.

Claim 20

An illumination device comprising: light source means for supplying light; means for receiving light from said light source means and for forming, by use of the light, a secondary light source; condensing optical means for receiving light from said secondary light source and for directing the light to a surface to be illuminated; and optical means operable to change the range of illumination to be defined by the light from said secondary light source, in accordance with the size of the surface to be illuminated, said optical means changing the range of illumination by changing an angle of emission of light from said secondary light source while retaining a constant angle of incidence of the light upon the surface to be illuminated.

Claim 21

An illumination device comprising: light source means for supplying light; means for receiving light from said light source means and for forming, by use of the light, a secondary light source; condensing optical means for receiving light from said secondary light source and for directing the light to a surface to be illuminated; and optical means operable to change the range of illumination to be defined by the light from said secondary light source, in accordance with the size of the surface to be illuminated, said optical means changing the range of illumination by changing an angle of emission of light from said secondary light source while retaining a constant angle of incidence of the light upon the surface to be illuminated.

Claim 22

A projection exposure system usable with a mask having a circuit pattern and a wafer, said projection exposure system comprising: supplying means for supplying light; secondary light source forming means, disposed to receive the light from said supplying means, for forming a secondary light source by use of the received light; an illumination optical system disposed to receive light from said secondary light source, for illuminating the mask by use of the received light, said illumination optical system having an optical means which has a variable refracting power; and a projection optical system operable to form an image of the circuit pattern of the mask upon the wafer, said projection optical system having a pupil which is in a conjugate relationship with said secondary light source; wherein said illumination optical system is adapted to change the refracting power of said optical means in accordance with the range of an area on the mask to be illuminated, while substantially maintaining the conjugate relationship between said secondary light source and the pupil.

Claim 23

A projection exposure system usable with a mask having a circuit pattern and a wafer, said projection exposure system comprising: supplying means for supplying light; secondary light source forming means, disposed to receive the light from said supplying means, for forming a secondary light source by use of the received light; an illumination optical system disposed to receive light from said secondary light source, for illuminating the mask by use of the received light, said illumination optical system having an optical means which has a variable refracting power; and a projection optical system operable to form an image of the circuit pattern of the mask upon the wafer, said projection optical system having a pupil which is in a conjugate relationship with said secondary light source; wherein said illumination optical system is adapted to change the refracting power of said optical means in accordance with the range of an area on the mask to be illuminated, while substantially maintaining the conjugate relationship between said secondary light source and the pupil.

Claim 24

A projection exposure system according to claim 17, wherein said optical means includes a plurality of lens elements disposed on said optical axis and being movable along said optical axis.

Claim 25

A projection exposure system according to claim 17, wherein said illumination optical system includes (i) a field stop disposed on a patch of the light from said optical means and having an aperture of a predetermined shape and (ii) a condensing optical system effective to illuminate the mask by use of the light passed through said field stop, wherein said aperture of said field stop has a size which is changeable and wherein the refracting power of said optical means is changed with the change in the size of said aperture.

Claim 26

A projection exposure system according to claim 17, wherein said illumination optical system is arranged to change the refracting power of said optical means while maintaining an interval between a rear principal plane of said illumination optical system and the mask to be substantially equal to a focal length of said illumination optical system.

Claim 27

An exposure system usable with a mask having a circuit pattern and a wafer, said exposure system comprising: supplying means for supplying light; secondary light source forming means disposed to receive the light from said supplying means, for forming a secondary light source by use of the received light; and an illumination optical system disposed to receive light from said secondary light source, for illuminating the mask by use of the received light so that the circuit pattern of the mask is transferred onto the wafer, said illumination optical system having an optical means which has a variable refracting power; wherein said illumination optical system has a focal length and a rear principal plane which is set at such distance from the mask that is substantially equal to said focal length of said illumination optical system and wherein said illumination optical system is adapted to change the refracting power of said optical means in accordance with the range of an area on the mask to be illuminated, while substantially maintaining a fixed relation between said distance and said focal length.

Claim 28

An exposure system usable with a mask having a circuit pattern and a wafer, said exposure system comprising: supplying means for supplying light; secondary light source forming means disposed to receive the light from said supplying means, for forming a secondary light source by use of the received light; and an illumination optical system disposed to receive light from said secondary light source, for illuminating the mask by use of the received light so that the circuit pattern of the mask is transferred onto the wafer, said illumination optical system having an optical means which has a variable refracting power; wherein said illumination optical system has a focal length and a rear principal plane which is set at such distance from the mask that is substantially equal to said focal length of said illumination optical system and wherein said illumination optical system is adapted to change the refracting power of said optical means in accordance with the range of an area on the mask to be illuminated, while substantially maintaining a fixed relation between said distance and said focal length.

Claim 29

An exposure system according to claim 21, wherein said optical means includes a plurality of lens elements disposed on said optical axis and being movable along said optical axis.

Claim 30

An exposure system according to claim 21, wherein said illumination optical system includes (i) a field stop disposed on a path of the light from said optical means and having an aperture of a predetermined shape and (ii) a condensing optical system effective to illuminate the mask by use of the light passed through said field stop, wherein said aperture of said field stop has a size which is changeable and wherein the refracting power of said optical means is changed with the change in the size of said aperture.

Claim 31

A projection exposure system usable with a mask having a circuit pattern and a wafer, said projection exposure system comprising: a light source for providing light; an optical arrangement effective to form a secondary light source of a predetermined size by use of the light from said light source and to illuminate the mask with light from said secondary light source, said optical arrangement having an optical means whose refracting power is variable; and a projection optical system operable to form an image of the circuit pattern of the mask upon the wafer, said projection optical system having a pupil which is in conjugate relationship with said secondary light source; wherein the refracting power of said optical means is changed in accordance with the range of an area on the mask to be illuminated, such that the range of illumination by the light from said secondary light source is changed while substantially maintaining the conjugate relationship between said pupil and said secondary light source.

Claim 32

A projection exposure system usable with a mask having a circuit pattern and a wafer, said projection exposure system comprising: a light source for providing light; an optical arrangement effective to form a secondary light source of a predetermined size by use of the light from said light source and to illuminate the mask with light from said secondary light source, said optical arrangement having an optical means whose refracting power is variable; and a projection optical system operable to form an image of the circuit pattern of the mask upon the wafer, said projection optical system having a pupil which is in conjugate relationship with said secondary light source; wherein the refracting power of said optical means is changed in accordance with the range of an area on the mask to be illuminated, such that the range of illumination by the light from said secondary light source is changed while substantially maintaining the conjugate relationship between said pupil and said secondary light source.

Claim 33

A projection exposure system according to claim 24, wherein said optical arrangement has a focal length and a rear principal plane which is maintained at a distance substantially equal to said focal length irrespective of the change in the refracting power of said optical means.

Claim 34

A projection exposure system according to claim 24, wherein said optical arrangement includes an optical integrator by which said secondary light source is formed.

Claim 35

A projection exposure apparatus according to claim 26, wherein said optical means is disposed to receive the light from said secondary light source and wherein said optical means includes at least three movable lens elements, said lens elements being movable in a predetermined interrelation to thereby change the range of illumination while forming the image of said secondary light source substantially at a constant position.

Claim 36

A projection exposure system according to claim 26, wherein said optical means is provided by said optical integrator and wherein said optical integrator includes at least three fly's eye lens systems which are movable in a predetermined interrelation to change the range of illumination while forming the image of said secondary light source substantially at a constant position.

Claim 37

A projection exposure apparatus, comprising: a light source; means for supporting a reticle; means for supporting a wafer, arrangement means for forming a secondary light source by use of light from said light source and for illuminating the reticle with light from said secondary light source, said arrangement means including an adjustment optical system having a variable refracting power; a projection optical system for projecting a pattern of the reticle upon the wafer, said projection optical system having a pupil disposed in a conjugate relationship with said secondary light source; and an actuator for actuating said adjustment optical system to change an area to be illuminated by said arrangement means, while substantially maintaining the conjugate relationship between said pupil and said secondary light source.

Claim 38

A projection exposure apparatus, comprising: a light source; means for supporting a reticle; means for supporting a wafer, arrangement means for forming a secondary light source by use of light from said light source and for illuminating the reticle with light from said secondary light source, said arrangement means including an adjustment optical system having a variable refracting power; a projection optical system for projecting a pattern of the reticle upon the wafer, said projection optical system having a pupil disposed in a conjugate relationship with said secondary light source; and an actuator for actuating said adjustment optical system to change an area to be illuminated by said arrangement means, while substantially maintaining the conjugate relationship between said pupil and said secondary light source.

Claim 39

An apparatus according to claim 29, wherein said arrangement means includes a masking member having a variable size aperture and being disposed between said adjustment optical system and the reticle, and wherein a change in the refracting power of said adjustment optical system is related to a change in size of said aperture.

Claim 40

An apparatus according to claim 30, wherein said adjustment optical system is disposed between said secondary light source and said masking member.

Claim 41

An apparatus according to claim 31, wherein said adjustment optical system includes a plurality of lenses displaceable along an optical axis of said adjustment optical system, and wherein said actuator is operable to adjust the relative position of said lenses.

Claim 42

An apparatus according to claim 29, wherein said secondary light source is formed with the intervention of said adjustment optical system.

Claim 43

An apparatus according to claim 33, wherein said adjustment optical system includes a fly's-eye lens system displaceable along an optical axis of said adjustment optical system and wherein said actuator is operable to adjust the position of said fly's-eye lens system.