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Semiconductor laser with an interposed gap

Assignee: Mitsubishi Electric Corp
•
Filing: 1987-12-09
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Granted: 1989-07-11
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Expires: 2007-12-09
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Abstract

Abstract A semiconductor laser includes a semiconductor substrate on which a first semiconductor layer forming a rectifying junction is disposed, a groove extending through the first layer and into the substrate, a first cladding layer disposed on the semiconductor substrate in the groove, an active layer provided on the first cladding layer in the groove, and a second cladding layer provided directly on the active layer and opposite the first semiconductor layer, with an interposed gap void of solid material or an interposed gap and a current blocking material having only negligible parasitic capacitance disposed at spaced locations in the gap.

Inventors

  • 👤 Etsuji Omura
  • 👤 Hirofumi Namizaki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 17:50
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/20; H01S5/24; H01S5/22; H01S5/223; H01S5/2237

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 139 words
In a semiconductor laser comprising: a semiconductor substrate of a first conductivity type; a first semiconductor layer of a second conductivity type different from said first conductivity type and disposed on said semiconductor substrate to form a rectifying junction therewith, said first layer containing a groove extending through said first layer and into said substrate; a first semiconductor cladding layer of said first conductivity type disposed in said groove in contact with said substrate; an active semiconductor layer disposed on said first cladding layer; a second semiconductor cladding layer of said second conductivity type disposed on said active layer and opposite said first semiconductor layer wherein said second cladding layer is separated from said first semiconductor layer, except at said groove, by a gap; and first and second electrodes respectively disposed on said substrate and said second cladding layer.
Claim 2
Dependent Claim 139 words
In a semiconductor laser comprising: a semiconductor substrate of a first conductivity type; a first semiconductor layer of a second conductivity type different from said first conductivity type and disposed on said semiconductor substrate to form a rectifying junction therewith, said first layer containing a groove extending through said first layer and into said substrate; a first semiconductor cladding layer of said first conductivity type disposed in said groove in contact with said substrate; an active semiconductor layer disposed on said first cladding layer; a second semiconductor cladding layer of said second conductivity type disposed on said active layer and opposite said first semiconductor layer wherein said second cladding layer is separated from said first semiconductor layer, except at said groove, by a gap; and first and second electrodes respectively disposed on said substrate and said second cladding layer.
Claim 3
Dependent Claim 24 words
The laser of claim 1 including a third semiconductor layer of said first conductivity type disposed on said second cladding layer adjacent said gap.
Claim 4
Dependent Claim 29 words
The laser of claim 1 including semiconductor regions of said first conductivity type disposed at spaced locations between and contacting said first semiconductor layer and said second cladding layer.
Claim 5
Dependent Claim 48 words
The laser of claim 1 including an electrical insulator disposed at spaced locations between and contacting said second cladding layer and said first semiconductor layer, thereby defining a plurality of gaps between said second cladding layer and said first semiconductor layer, said gaps being separated by said insulator.
Claim 6
Dependent Claim 20 words
The laser of claim 4 wherein said electrical insulator is selected from the group consisting of silicon dioxide and polyimide.
Claim 7
Dependent Claim 22 words
The laser of claim 1 wherein said substrate, said first semiconductor layer, and said first and second cladding layers are indium phosphide.
Claim 8
Dependent Claim 13 words
The laser of claim 6 wherein said first conductivity type is p type.
Claim 9
Dependent Claim 11 words
The laser of claim 6 wherein said active layer is InGaAsP.

References Cited (Backward Citations)

US3833435A Cited
US3865646A Cited
US3883219A Cited
JPS5858784A Cited
JPS59124183A Cited
JPS60235484A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-07-10 1993-01-09 1993-07-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-07-10 1997-01-09 1997-07-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-07-10 2001-01-09 2001-07-11 $7700.00 Window Closed / Lapsed

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