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US4845542A Expired / Lapsed US ⏱️ 0.0 years remaining

Interconnect for layered integrated circuit assembly

Assignee: Unisys Corp
•
Filing: 1989-01-17
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Granted: 1989-07-04
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Expires: 2009-01-17
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Abstract

Abstract Enhanced density of electrical and/or mechanical interconnections between adjacent wafers within integrated circuit assemblies and structural integrity of those interconnections under temperature cycling conditions, is attained by utilizing laser assisted chemical vapor deposition to fabricate precisely configured metal posts which serve as such interconnections.

Inventors

  • 👤 Steve J. Bezuk
  • 👤 Tushar R. Gheewala
  • 👤 Stephen A. Campbell
  • 👤 Robert J. Baseman

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 14:21
CPC Classifications
H; H10; H10W; H10W90/00; H10W72/00; H10W72/20; H10W72/251; H10W90/701; H10W90/721; H10W90/722; Y; Y10; Y10S; Y10S257/00; Y10S257/915

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 145 words
A layered, integrated circuit assembly, comprising: a substrate having a planar major surface; electrical conductors lying on said major surface; elongated metal posts which have a first end connected to said conductors and which extend therefrom substantially perpendicular to said major surface; each of said metal posts having a second end which lies above said surface; a semiconductor device connected to said second end of said metal posts; said semiconductor device and said substrate being made of materials that expand and contract at different rates when they are subjected to temperature changes; and each of said metal posts having a length-to-width ratio which exceeds that which is possible for a metal bump of the same length; said posts being relatively flexible in comparison to said metal bumps and of the same length and operating to accommodate said different expansion rates without overstressing said semiconductor device.
Claim 2
Dependent Claim 145 words
A layered, integrated circuit assembly, comprising: a substrate having a planar major surface; electrical conductors lying on said major surface; elongated metal posts which have a first end connected to said conductors and which extend therefrom substantially perpendicular to said major surface; each of said metal posts having a second end which lies above said surface; a semiconductor device connected to said second end of said metal posts; said semiconductor device and said substrate being made of materials that expand and contract at different rates when they are subjected to temperature changes; and each of said metal posts having a length-to-width ratio which exceeds that which is possible for a metal bump of the same length; said posts being relatively flexible in comparison to said metal bumps and of the same length and operating to accommodate said different expansion rates without overstressing said semiconductor device.
Claim 3
Dependent Claim 19 words
The circuit assembly of claim 1 wherein each post has a length-to-width ratio of at least 10 to 1.
Claim 4
Dependent Claim 26 words
The circuit assembly of claim 1 wherein each post is tapered from a maximum circular cross section at only one end to a right circular cylinder.
Claim 5
Dependent Claim 18 words
The circuit assembly of claim 2 wherein each post has a width of no more than one mil.
Claim 6
Dependent Claim 21 words
The circuit assembly of claim 2 wherein each post has a graded metalization, with solder disposed as the final grade thereof.
Claim 7
Dependent Claim 12 words
The circuit assembly of claim 2 wherein each post consists of aluminum.
Claim 8
Dependent Claim 12 words
The circuit assembly of claim 2 wherein each post consists of nickel.
Claim 9
Dependent Claim 18 words
The circuit assembly of claim 3 wherein each post has a width of no more than one mil.
Claim 10
Dependent Claim 21 words
The circuit assembly of claim 3 wherein each post has a graded metalization, with solder disposed as the final grade thereof.
Claim 11
Dependent Claim 12 words
The circuit assembly of claim 3 wherein each post consists of aluminum.
Claim 12
Dependent Claim 12 words
The circuit assembly of claim 3 wherein each post consists of nickel.

References Cited (Backward Citations)

US4021838A Cited
US4074342A Cited
US4151543A Cited
US4545610A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-07-03 1993-01-02 1993-07-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-07-03 1997-01-02 1997-07-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-07-03 2001-01-02 2001-07-04 $7700.00 Window Closed / Lapsed

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