Patent US4193236A successfully refreshed from Google Patents.
Patent US4843246A successfully refreshed from Google Patents.
US4843246A
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US
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Apparatus for detecting the position of incidence of a beam of charge carriers on a target
Assignee: Leybold Heraeus GmbH
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Filing: 1987-12-03
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Granted: 1989-06-27
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Expires: 2007-12-03
Abstract
Abstract The invention concerns apparatus for detecting the position of incidence (2) of a beam (1) of charge carriers on a target (3) wherein X-rays (4) starting from the position of incidence (2) are detected by detector (7) connected to an analyzing circuit (9) An imaging system (5, 50; 10, 11, 12) is provided which can cover all the positions (P 1 . . . P 8 ) that the positions of incidence (2) can take up and projects them on the sensing surface of a position-sensitive detector (7), wherein the projected coordinates (x', y') are directly proportional to the coordinates (x, y) of the position of incidence (2). In addition, a filter (6) highly transparent to the X-ray radiation range emitted from the position of incidence (2) is arranged between the target surface (3) and the position-sensitive sensor (7). The position-sensitive detector (7) emits electric signals which depend from the coordinates (x, y) of the position of incidence (FIG. 1).
Inventors
- 👤 Ewald Benes
- 👤 Franz Viehbock
- 👤 Herbert Stori
- 👤 Friedrich-Werner Thomas
- 👤 Gernot Thorn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 21:31
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J37/3005; B; B23; B23K; B23K15/00; B23K15/0013
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
201 words
Apparatus for detecting the absolute position of incidence of a beam of charged particles impinging on a target and producing x-ray radiation at the point of incidence, the apparatus including an imaging system comprising: a diaphragm arranged in proximity to the target and containing at least one aperture therethrough permitting the passage of x-ray radiation from the point on the target where it is produced to a stationary detector; the detector being positioned on the opposite side of the diaphragm from the target and having a planar surface of sufficient area to intercept any x-ray radiation from the diaphragm and at least one sensing device for sensing the x-ray radiation impinging on any location on the detector surface and for producing in response thereto two signals, one of which depends monotonically on a first coordinate of the location of incidence on the detector surface of the radiation and the other of which depends monotonically on a second coordinate of the location of incidence on the detector surface of the x-ray radiation; an analyzing circuit for receiving the signal from the sensing device; and a filter which is highly and selectively transparent to x-ray radiation, interposed between the diaphragm and the detector.
Claim 2
Dependent Claim
201 words
Apparatus for detecting the absolute position of incidence of a beam of charged particles impinging on a target and producing x-ray radiation at the point of incidence, the apparatus including an imaging system comprising: a diaphragm arranged in proximity to the target and containing at least one aperture therethrough permitting the passage of x-ray radiation from the point on the target where it is produced to a stationary detector; the detector being positioned on the opposite side of the diaphragm from the target and having a planar surface of sufficient area to intercept any x-ray radiation from the diaphragm and at least one sensing device for sensing the x-ray radiation impinging on any location on the detector surface and for producing in response thereto two signals, one of which depends monotonically on a first coordinate of the location of incidence on the detector surface of the radiation and the other of which depends monotonically on a second coordinate of the location of incidence on the detector surface of the x-ray radiation; an analyzing circuit for receiving the signal from the sensing device; and a filter which is highly and selectively transparent to x-ray radiation, interposed between the diaphragm and the detector.
Claim 3
Dependent Claim
17 words
The apparatus of claim 1 wherein the sensing device is a two-dimensional lateral diode with four electrodes.
Claim 4
Dependent Claim
13 words
The apparatus of claim 1 wherein the sensing device is a four-quadrant photodiode.
Claim 5
Dependent Claim
244 words
Apparatus for detecting the absolute position of incidence of a beam of charged particles impinging on a target and producing x-ray radiation at the point of incidence, the apparatus including an imaging system comprising; a diaphragm arranged in proximity to the target and containing two mutually perpendicularly arranged slits therethrough permitting the passage of x-ray radiation from the point on the target where it is produced to a stationary detector, one of which slits is provided for imaging the X-coordinate of the x-ray radiation and the other of which slits is for imaging the Y-coordinate of the x-ray radiation; the detector being positioned on the opposite side of the diaphragm from the target, and having a surface of sufficient area to intercept any x-ray radiation from the diaphragm and a sensing device comprising two one-dimensional position-sensitive detectors for respectively detecting the X and Y coordinates of the x-ray radiation incidence on the detector surface and for producing in response thereto a signal which depends monotonically on the location of incidence on the detector surface of the radiation; an analyzing circuit for receiving the signal from the sensing device; and a filter which is highly and selectively transparent to x-ray radiation interposed between the diaphragm and the detector; wherein the length of the slits in the diaphragm is predetermined so that the entire width of each one-dimensional position-sensitive detector in the sensing device is illuminated by x-ray radiation from any incidence point on the target.
Claim 6
Dependent Claim
244 words
Apparatus for detecting the absolute position of incidence of a beam of charged particles impinging on a target and producing x-ray radiation at the point of incidence, the apparatus including an imaging system comprising; a diaphragm arranged in proximity to the target and containing two mutually perpendicularly arranged slits therethrough permitting the passage of x-ray radiation from the point on the target where it is produced to a stationary detector, one of which slits is provided for imaging the X-coordinate of the x-ray radiation and the other of which slits is for imaging the Y-coordinate of the x-ray radiation; the detector being positioned on the opposite side of the diaphragm from the target, and having a surface of sufficient area to intercept any x-ray radiation from the diaphragm and a sensing device comprising two one-dimensional position-sensitive detectors for respectively detecting the X and Y coordinates of the x-ray radiation incidence on the detector surface and for producing in response thereto a signal which depends monotonically on the location of incidence on the detector surface of the radiation; an analyzing circuit for receiving the signal from the sensing device; and a filter which is highly and selectively transparent to x-ray radiation interposed between the diaphragm and the detector; wherein the length of the slits in the diaphragm is predetermined so that the entire width of each one-dimensional position-sensitive detector in the sensing device is illuminated by x-ray radiation from any incidence point on the target.
Claim 7
Dependent Claim
42 words
The apparatus of claim 1 wherein the filter and the target are located in a region of partial vacuum; the detector is in a region of atmospheric pressure; and the diaphragm and the filter compose the separating wall between the two regions.
Claim 8
Dependent Claim
18 words
The apparatus of claim 1 wherein the filter is a transducer which converts x-ray radiation into longer-wavelength radiation.
Claim 9
Dependent Claim
34 words
The apparatus of claim 6 wherein a fluorescent layer is arranged closely in front of the detector surface for transforming x-ray radiation into electromagnetic radiation having a wavelength for which the detector is sensitive.
Claim 10
Dependent Claim
19 words
The apparatus of claim 7 wherein a light-conducting plate is positioned between the detector surface and the flourescent layer.
Claim 11
Dependent Claim
26 words
The apparatus of claim 1 further including a protective foil positioned between the target and the diaphragm to prevent vaporization of the diaphragm and the filter.
Claim 12
Dependent Claim
15 words
The apparatus of claim 9 wherein the protective foil is movable relative to the diaphragm.
Claim 13
Dependent Claim
28 words
The apparatus of claim 10 wherein the movement of the foil is controlled by a signal dependent on the intensity of the x-ray radiation received by the detector.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-26 | 1992-12-26 | 1993-06-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-26 | 1996-12-26 | 1997-06-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-26 | 2000-12-26 | 2001-06-27 | $7700.00 | Window Closed / Lapsed |