Patent US4836140A successfully refreshed from Google Patents.
US4836140A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photo-CVD apparatus
Assignee: Hoshin Kagaku Sangyosho Co Ltd
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Filing: 1988-09-16
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Granted: 1989-06-06
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Expires: 2008-09-16
Abstract
Abstract A photo-CVD (chemical vapor deposition) apparatus is disclosed, in which at least two light transmission plates are used and the light from a light source is introduced into a gas reaction chamber through one of light transmission plates inserted into the chamber to cause the reactions in a reaction gas to thereby deposit a thin film or layer on a substrate located in the gas reaction chamber. In this case, a light transmission plate polluted by the reaction gas is moved to the outside of the chamber, then washed or exchanged with a new one manually or automaticaly while a clean one is inserted into the chamber, so that the photo-CVD process can be carried out continuously without interrupting the irradiation of the light from the light source.
Inventors
- 👤 Masashi Koji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:52
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; C23C16/488; C23C16/54
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
211 words
A photo-CVD (chemical vapor deposition) apparatus comprising: (a) a gas reaction chamber accommodating therein a substrate and through which a reaction gas flows, said gas reaction chamber having a gate opening in one wall thereof; (b) a light source communicating with said reaction chamber through said gate opening and for emitting a light to said substrate to cause a reaction in said reaction gas in said gas reaction chamber, (c) at least two light transmission plates; (d) means for carrying said light transmission plates; (e) means for indexing said carrying means between a first position with said gas chamber such that one of said light transmission plates is inserted into said gas reaction chamber to close in air-tight manner said gate opening while permitting said light source to pass into said gas reaction chamber to irradiate said substrate and a second position such that at least one of the other of said light transmission plates is exterior of said gas reaction diameter; and (f) means located exterior of said gas reaction chamber including vacuum means for automatically removing said other polluted plate from said carrying means at said second position and for supplying to said carrying means a non-pollution plate to replace it with a new and clean light transmission plate.
Claim 2
Dependent Claim
211 words
A photo-CVD (chemical vapor deposition) apparatus comprising: (a) a gas reaction chamber accommodating therein a substrate and through which a reaction gas flows, said gas reaction chamber having a gate opening in one wall thereof; (b) a light source communicating with said reaction chamber through said gate opening and for emitting a light to said substrate to cause a reaction in said reaction gas in said gas reaction chamber, (c) at least two light transmission plates; (d) means for carrying said light transmission plates; (e) means for indexing said carrying means between a first position with said gas chamber such that one of said light transmission plates is inserted into said gas reaction chamber to close in air-tight manner said gate opening while permitting said light source to pass into said gas reaction chamber to irradiate said substrate and a second position such that at least one of the other of said light transmission plates is exterior of said gas reaction diameter; and (f) means located exterior of said gas reaction chamber including vacuum means for automatically removing said other polluted plate from said carrying means at said second position and for supplying to said carrying means a non-pollution plate to replace it with a new and clean light transmission plate.
Claim 3
Dependent Claim
22 words
A photo-CVD apparatus as claimed in claim 1, in which each of said light transmission plates is formed as a disc-shaped member.
Claim 4
Dependent Claim
58 words
A photo-CVD apparatus as claimed in claim 2 in which said light source is located in a compartment arranged about said gate opening and said disc shaped members forming said transmission plates are mounted on a rotary carrying plate, said rotary carrying plate and said light source compartment are sealed in air-tight fashion through an O-type ring seal.
Claim 5
Dependent Claim
29 words
A photo-CVD apparatus as claimed in claim 3, in which said rotary carrying plate and said gas reaction chamber are sealed in air-tight fashion through an O-type ring seal.
Claim 6
Dependent Claim
28 words
A photo-CVD apparatus as claimed in claim 1, in which said light transmission plate is mounted within said rotary carrying plate in air-tight condition by a packing ring.
Claim 7
Dependent Claim
21 words
A photo-CVD apparatus as claimed in claim 1, in which the number of said light transmission plates is four or eight.
Claim 8
Dependent Claim
21 words
A photo-CVD apparatus as claimed in claim 6, in which said light transmission plates are located with an equal angular distance.
Claim 9
Dependent Claim
20 words
A photo-CVD apparatus as claimed in claim 1, in which said light transmission plate is made of a quartz glass.
Claim 10
Dependent Claim
13 words
A photo-CVD apparatus according to claim 1 wherein said exchange means is automatic.
Claim 11
Dependent Claim
66 words
A photo-CVD apparatus as claimed in claim 9, in which said automatic exchange means is formed of a pair of vacuum chuck means for lifting up said light transmission plates, a rotary shaft to which said vacumn chucks are attached, a pair of arm members for connecting said pair of vacuum chuck means to said rotary shaft and a drive motor for rotating said rotary shaft.
Claim 12
Dependent Claim
23 words
A photo-CVD apparatus as claimed in claim 9, in which a spacing between said pair of vacuum chuck means is selected as 180°.
Claim 13
Dependent Claim
23 words
A photo-CVD apparatus as claimed in claim 11, in which said spacing between said pair of vacuum chuck means is selected as 90°.
Claim 14
Dependent Claim
25 words
A photo-CVD apparatus according to claim 9 further comprising means for driving said light transmission plate carrying means and said exchange means in corresponding relation.
References Cited (Backward Citations)
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US4500565A
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JPS60128265A
Cited
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-05 | 1992-12-05 | 1993-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-05 | 1996-12-05 | 1997-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-05 | 2000-12-05 | 2001-06-06 | $7700.00 | Window Closed / Lapsed |