Patent US4831271A successfully refreshed from Google Patents.
US4831271A
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US
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Ion beam dosimetry
Assignee: MILLSPIN Ltd A BRITISH Co
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Filing: 1987-08-03
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Granted: 1989-05-16
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Expires: 2007-08-03
Abstract
Abstract A work piece 13 is implanted with N + ions from a source 1 to improve its surface hardness. The dosage of implanted ions is monitored by a member 14 which changes its color in dependence upon the dose. The member 14 may comprise a tantalum plate 15 with an anodic oxide layer 16 of a thickness to produce interference colors. In accordance with the invention this layer 16 changes colors as a function of the ion dosage.
Inventors
- 👤 Geoffrey Dearnaley
- 👤 Antony E. Hughes
- 👤 Steven Rosenbaum
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 17:00
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/48; C23C14/54
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
72 words
A method of monitoring the ion dosage received at a selected location from an ion beam comprising the steps of: mounting at said location a member which member itself undergoes a predetermined visually perceptible change in appearance in response to receiving an ion dosage; causing said beam to impinge on said member; and determining the ion dosage from the beam at the location from the visual change in appearance of the member.
Claim 2
Independent Claim
72 words
A method of monitoring the ion dosage received at a selected location from an ion beam comprising the steps of: mounting at said location a member which member itself undergoes a predetermined visually perceptible change in appearance in response to receiving an ion dosage; causing said beam to impinge on said member; and determining the ion dosage from the beam at the location from the visual change in appearance of the member.
Claim 3
Dependent Claim
14 words
A method according to claim 1 wherein said visual change comprises a colour change.
Claim 4
Dependent Claim
22 words
A method according to claim 2 wherein said member includes an oxide which undergoes a colour change in dependence upon ion dosage.
Claim 5
Dependent Claim
15 words
A method according to claim 3 wherein said oxide comprises a metallic, anodic oxide layer.
Claim 6
Dependent Claim
18 words
A method according to claim 4 wherein said layer has a thickness in the range of 50-1000 nm.
Claim 7
Dependent Claim
19 words
A method according to claim 4, wherein the anodic layer is provided on a flexible carrier of plastics material.
Claim 8
Dependent Claim
16 words
A method according to claim 4, wherein said anodic layer is formed on a metallic substrate.
Claim 9
Dependent Claim
14 words
A method according to claim 7 wherein said metallic substrate comprises a metal plate.
Claim 10
Dependent Claim
21 words
A method according to claim 8 wherein said metal plate has transversely disposed surfaces for monitoring ion dosages in different directions.
Claim 11
Dependent Claim
14 words
A method according to claim 7 wherein said substrate comprises a flexible metal foil.
Claim 12
Dependent Claim
28 words
A method according to claim 7 wherein the substrate is of tantalum, the electrolyte comprises ammonium sulphate, and said potential difference is in the range of 95-105 volts.
Claim 13
Dependent Claim
20 words
A method according to claim 7, wherein said metallic substrate is selected from titanium, tantalaum, halfium, zirconium, mobium and thorium.
Claim 14
Dependent Claim
20 words
A method according to claim 2 wherein said determining step includes the step of quantitatively measuring said change in color.
Claim 15
Dependent Claim
27 words
A method according to claim 1 wherein said determining step includes the step of visually observing the appearance of the member after said beam has impinged thereon.
Claim 16
Dependent Claim
43 words
An ion beam dosimeter which undergoes a predetermined color change in response to receiving an ion beam dosage comprising: a substrate; and a metallic, anodic oxide layer formed on said substrate, said oxide layer undergoing a color change in dependence upon ion dosage.
Claim 17
Dependent Claim
43 words
An ion beam dosimeter which undergoes a predetermined color change in response to receiving an ion beam dosage comprising: a substrate; and a metallic, anodic oxide layer formed on said substrate, said oxide layer undergoing a color change in dependence upon ion dosage.
Claim 18
Dependent Claim
18 words
A dosimeter according to claim 15 wherein said layer has a thickness in the range of 50-1000 nm.
Claim 19
Dependent Claim
15 words
A dosimeter according to claim 15 wherein said substrate is flexible carrier of plastics material.
Claim 20
Dependent Claim
13 words
A dosimeter according to claim 15 wherein said substrate is a metallic substrate.
Claim 21
Dependent Claim
38 words
A method according to claim 1 wherein the ion beam is being utilized to apply an ion dose to an article; and wherein said causing step includes scanning ions from the beam over the article and the member.
Claim 22
Dependent Claim
21 words
A dosimeter according to claim 19 wherein said metal plate has transversely disposed surfaces for monitoring ion dosages in different directions.
Claim 23
Dependent Claim
20 words
A dosimeter according to claim 18 wherein said metallic substrate is selected from titanium, tantalum, halfium, zirconium, mobium and thorium.
Claim 24
Dependent Claim
53 words
A dosimeter according to claim 18 wherein said metallic substrate is of tantalum; and wherein said layer is formed with a thickness to provide a starting color of second order dark purple and which undergoes a transition through red purple with an ion dosage of 10 17 N + per cm 2 .
Claim 25
Dependent Claim
14 words
A dosimeter according to claim 15 wherein said substrate comprises a flexible metal foil.
References Cited (Backward Citations)
US2664511A
Cited
US4570070A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-15 | 1992-11-14 | 1993-05-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-15 | 1996-11-14 | 1997-05-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-15 | 2000-11-14 | 2001-05-16 | $7700.00 | Window Closed / Lapsed |