US4570070A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion-beam monitor
Assignee: Fujifilm Holdings Corp
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Filing: 1984-06-12
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Granted: 1986-02-11
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Expires: 2004-06-12
Abstract
Abstract The ion-beam monitor determines the distribution of the ion beam intensity by scanning a flat pellet of Al2O3 with the ion beam and detecting the ultra violet radiation emitted from the Al2O3 pellet and recording the same at each step of the scanning operation.
Inventors
- 👤 Masatoshi Tabei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:55
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J37/3005
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
86 words
An ion-beam monitor for determining the distribution of the ion beam intensity comprising ion beam source means, a flat pellet of a material which emits ultraviolet light when radiated by an ion beam and having a diameter substantially less than the diameter of said ion beam source means, scanning means for moving said ion beam source means and said pellet relative to each other and detection means for detecting the ultraviolet light during the scanning operation for producing a signal indicative of the ion beam intensity.
Claim 2
Dependent Claim
86 words
An ion-beam monitor for determining the distribution of the ion beam intensity comprising ion beam source means, a flat pellet of a material which emits ultraviolet light when radiated by an ion beam and having a diameter substantially less than the diameter of said ion beam source means, scanning means for moving said ion beam source means and said pellet relative to each other and detection means for detecting the ultraviolet light during the scanning operation for producing a signal indicative of the ion beam intensity.
Claim 3
Dependent Claim
20 words
An ion-beam monitor as set forth in claim 1 wherein said pellet is comprised of Al 2 O 3 .
Claim 4
Dependent Claim
48 words
An ion-beam monitor as set forth in claim 1 wherein said scanning means is comprised of a platform supporting said pellet for reception of radiation from said ion beam source means and means for moving said platform in an X-Y scan relative to said ion beam source means.
References Cited (Backward Citations)
US3601575A
Cited
US4494005A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-10 | 1989-08-12 | 1990-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-10 | 1993-08-12 | 1994-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-10 | 1997-08-12 | 1998-02-11 | $7700.00 | Window Closed / Lapsed |