US3601575A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for viewing the impact spot of a charge carrier beam
Assignee: Messer Griesheim GmbH
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Filing: 1969-01-24
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Granted: 1971-08-24
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Expires: 1989-01-24
Abstract
Abstract A viewing system for monitoring the focus of a beam of charged particles at the impact spot in apparatus using such beam for the machining of a workpiece is described. The viewing system utilizes the charged-particle radiation moving reversely with respect to the beam from the impact spot and focuses this in an image plane. A fluorescent screen is provided in the image plane and behind the screen is a photoelectric detector having a photosensitive area smaller than the image of the particles on the screen whereby the intensity of the radiation incident upon the photoelectric device can be used an an indication of the focus of the beam on the impact spot. Various devices are illustrated and described.
Inventors
- 👤 Edgar Meyer
- 👤 Joachim Geissler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 14:04
CPC Classifications
B; B23; B23K; B23K15/00; B23K15/0013; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/147; H01J37/30; H01J37/3002; H01J37/3005; H01J37/304
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
138 words
A system for sensing the focusing condition of a beam of charged particles at a desired impact spot in an apparatus using said beam for the machining of a workpiece and having means for focusing said beam at said impact spot, comprising means responsive to charged particle radiation emanated from said impact spot in response to irradiation by said beam for forming an image of said impact spot at an image location, said imageforming means including at least one image-forming chargedparticle lens, radiation detection means generally positioned in the vicinity of the image in said location and providing an output signal indicative of the radiation intensity incident upon its sensitive surface area, said sensitive surface area of said radiation-detection means being smaller than the image formed by said image-forming means with said beam being at optimum focused condition.
Claim 2
Independent Claim
138 words
A system for sensing the focusing condition of a beam of charged particles at a desired impact spot in an apparatus using said beam for the machining of a workpiece and having means for focusing said beam at said impact spot, comprising means responsive to charged particle radiation emanated from said impact spot in response to irradiation by said beam for forming an image of said impact spot at an image location, said imageforming means including at least one image-forming chargedparticle lens, radiation detection means generally positioned in the vicinity of the image in said location and providing an output signal indicative of the radiation intensity incident upon its sensitive surface area, said sensitive surface area of said radiation-detection means being smaller than the image formed by said image-forming means with said beam being at optimum focused condition.
Claim 3
Dependent Claim
50 words
The device as recited in claim 1 and further including means for deflecting said image over the radiation-sensitive surface area of the radiation-detection means for varying the output signal, and an oscilloscope having an oscillograph ray deflected in synchronization with said image and controlled in intensity by said output signal.
Claim 4
Dependent Claim
54 words
The device as recited in claim 1 wherein said radiation-detection means further comprises a fluorescent screen positioned substantially coincident with the image plane, and a photoelectric detector having a photon-sensitive surface area smaller than said image, said photon surface area facing said screen at a side thereof opposite the side of said image-forming means.
Claim 5
Dependent Claim
58 words
The device as recited in claim 1 and further comprising deflection means interposed between said impact spot and the radiation-detection means for bending said radiation and providing said image at a plane forming an angle with direct line-of-sight paths With the impact spot to protect said radiation detector means from evaporated material travelling along said direct line-of-sight paths.
Claim 6
Dependent Claim
131 words
A viewing system for sensing the focusing condition of a beam of charged particles at the impact spot in apparatus using said beam for the machining of a workpiece, comprising means for focusing a beam of charged particles at a desired impact spot of the workpiece, means responsive to charged-particle radiation travelling generally reversely with respect to the beam from the impact spot for forming a focused image of the charged-particle radiation in an image plane, radiation-detection means generally positioned in the vicinity of the image in said plane and having a radiation-sensitive surface area smaller than the image formed by said image-forming means for an optimum focused beam of charged particles, said radiation detector means providing an output signal indicative of the radiation intensity incident upon its sensitive surface area.
Claim 7
Dependent Claim
131 words
A viewing system for sensing the focusing condition of a beam of charged particles at the impact spot in apparatus using said beam for the machining of a workpiece, comprising means for focusing a beam of charged particles at a desired impact spot of the workpiece, means responsive to charged-particle radiation travelling generally reversely with respect to the beam from the impact spot for forming a focused image of the charged-particle radiation in an image plane, radiation-detection means generally positioned in the vicinity of the image in said plane and having a radiation-sensitive surface area smaller than the image formed by said image-forming means for an optimum focused beam of charged particles, said radiation detector means providing an output signal indicative of the radiation intensity incident upon its sensitive surface area.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-08-23 | 1975-02-22 | 1975-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-08-23 | 1979-02-22 | 1979-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-08-23 | 1983-02-22 | 1983-08-24 | $7700.00 | Window Closed / Lapsed |