US4828965A
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US
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Aqueous developing solution and its use in developing positive-working photoresist composition
Assignee: OCG Microelectronic Materials Inc
•
Filing: 1988-01-06
•
Granted: 1989-05-09
•
Expires: 2008-01-06
Abstract
Abstract An aqueous developing solution useful in developing positive-working photoresists comprising: -A. Soluble Alkali Metal Phosphate 1.50-3.00% by weight -B. Soluble Alkali Metal Silicate 1.00-2.00% by weight -C. Mono (lower alkanol) amine 0.40-5.00% by weight -D. Soluble Alkylene Glycol 0.25-3.00% by weight -E. Lower Alkanol 0.05-1.00% by weight -F. Water Balance to 100% by - weight -
Inventors
- 👤 Richard J. West
- 👤 Stephen F. Marcotte, Jr.
- 👤 Faris A. Modawar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 03:38
CPC Classifications
G; G03; G03C; G03C5/00; G03C5/18; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/322
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
51 words
An aqueous developing solution comprising: ______________________________________
A. Soluble Alkali Metal Phosphate
1.50-3.00% by weight
B. Soluble Alkali Metal Silicate
1.00-2.00% by weight
C. Mono (lower alkanol) amine
0.40-5.00% by weight
D. Soluble Alkylene Glycol
0.25-3.00% by weight
E. Lower Alkanol 0.05-1.00% by weight
F. Water Balance to 100% by
weight
______________________________________
Claim 2
Dependent Claim
51 words
An aqueous developing solution comprising: ______________________________________
A. Soluble Alkali Metal Phosphate
1.50-3.00% by weight
B. Soluble Alkali Metal Silicate
1.00-2.00% by weight
C. Mono (lower alkanol) amine
0.40-5.00% by weight
D. Soluble Alkylene Glycol
0.25-3.00% by weight
E. Lower Alkanol 0.05-1.00% by weight
F. Water Balance to 100% by
weight
______________________________________
Claim 3
Dependent Claim
15 words
The developing solution of claim 1 additionally comprising 0%-0.2% by weight disodium ethylenediamine tetraacetic acid.
Claim 4
Dependent Claim
12 words
The developing solution of claim 1 additionally comprising 0%-0.1% by weight phloroglucinol.
Claim 5
Dependent Claim
32 words
The developing solution of claim 1 wherein said soluble alkali metal phosphate is a soluble sodium or potassium phosphate and said soluble alkali metal silicate is a soluble sodium or potassium silicate.
Claim 6
Dependent Claim
16 words
The developing solution of claim 1 wherein said soluble alkali metal phosphate is sodium trisodium phosphate.
Claim 7
Dependent Claim
15 words
The developing solution of claim 1 wherein said soluble alkali metal silicate is sodium metasilicate.
Claim 8
Dependent Claim
13 words
The developing solution of claim 1 wherein said mono (lower alkanol)-amine is monoethanolamine.
Claim 9
Dependent Claim
14 words
The developing solution of claim 1 wherein said soluble alkylene glycol is ethylene glycol.
Claim 10
Dependent Claim
13 words
The developing solution of claim 1 wherein said lower alkanol is isopropyl alcohol.
Claim 11
Dependent Claim
43 words
An aqueous developing solution comprising: ______________________________________
A. Trisodium phosphate
1.80-2.50% by weight
B. Sodium Metasilicate
1.2-1.8% by weight
C. Monoethanolamine
1.50-3.50% by weight
D. Ethylene Glycol 1.00-2.25% by weight
E. Isopropyl Alcohol
0.20-0.70% by weight
F. Water Balance to 100% by weight
______________________________________
Claim 12
Dependent Claim
43 words
An aqueous developing solution comprising: ______________________________________
A. Trisodium phosphate
1.80-2.50% by weight
B. Sodium Metasilicate
1.2-1.8% by weight
C. Monoethanolamine
1.50-3.50% by weight
D. Ethylene Glycol 1.00-2.25% by weight
E. Isopropyl Alcohol
0.20-0.70% by weight
F. Water Balance to 100% by weight
______________________________________
Claim 13
Dependent Claim
15 words
The developing solution of claim 10 additionally comprising 0%-0.2% by weight disodium ethylenediamine tetraacetic acid.
Claim 14
Dependent Claim
12 words
The developing solution of claim 10 additionally comprising 0%-1% by weight phloroglucinol.
Claim 15
Independent Claim
68 words
A method of developing an imagewise-exposed layer of positive-working photoresist composition which comprises: contacting said layer with an aqueous developing solution comprising: ______________________________________
A. Soluble Alkali Metal Phosphate
1.50-3.00% by weight
B. Soluble Alkali Metal Silicate
1.00-2.00% by weight
C. Mono (lower alkanol) amine
0.40-5.00% by weight
D. Soluble Alkylene Glycol
0.25-3.00% by weight
E. Lower Alkanol 0.05-1.00% by weight
F. Water Balance to 100% by
weight
______________________________________
Claim 16
Independent Claim
68 words
A method of developing an imagewise-exposed layer of positive-working photoresist composition which comprises: contacting said layer with an aqueous developing solution comprising: ______________________________________
A. Soluble Alkali Metal Phosphate
1.50-3.00% by weight
B. Soluble Alkali Metal Silicate
1.00-2.00% by weight
C. Mono (lower alkanol) amine
0.40-5.00% by weight
D. Soluble Alkylene Glycol
0.25-3.00% by weight
E. Lower Alkanol 0.05-1.00% by weight
F. Water Balance to 100% by
weight
______________________________________
Claim 17
Dependent Claim
21 words
The method of developing of claim 13 wherein said aqueous developing solution additionally comprises 0%-0.2% by weight disodium ethylenediamine tetraacetic acid.
Claim 18
Dependent Claim
18 words
The method of developing of claim 13 wherein said aqueous developing solution additionally comprises 0%-0.1% by weight phloroglucinol.
Claim 19
Dependent Claim
25 words
The method of developing of claim 13 wherein said contacting step is carried out by immersing said layer in a bath of said developing solution.
Claim 20
Dependent Claim
52 words
The method of developing of claim 13 wherein said aqueous developing solution comprises: ______________________________________
A. Trisodium phosphate
1.80-2.50% by weight
B. Sodium Metasilicate
1.2-1.8% by weight
C. Monoethanolamine
1.50-3.50% by weight
D. Ethylene Glycol 1.00-2.25% by weight
E. Isopropyl Alcohol
0.20-0.70% by weight
F. Water Balance to 100% by weight
______________________________________
.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-08 | 1992-11-07 | 1993-05-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-08 | 1996-11-07 | 1997-05-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-08 | 2000-11-07 | 2001-05-09 | $7700.00 | Window Closed / Lapsed |