Laser surface treatment method and apparatus for practicing same

Claim 2

A surface treatment method for treating a surface of a substrate by applying gas particles thereto, comprising the steps of setting the substrate in gas atmosphere, irradiating the gas particles with a narrow line width light that can be absorbed only by such gas particles that have velocity vectors in a predetermined range so that the gas particles are excited or decomposed thereby, said narrow line light having a line width αλ≦2×10 -6 λ where λ is the center wave length of said light, and treating the substrate with the excited or decomposed gas particles.

Claim 3

A surface treatment method according to claim 1, wherein said narrow line width light is laser light.

Claim 4

A surface treatment method according to claim 2, wherein said narrow line width laser light is emitted from two positions so that the laser lights cross each other in a region in the vicinity of said substrate, and the wavelengths of the laser lights are set in advance so that the laser lights selectively excite the gas particles whose velocity projections in the respective directions of light propagation are in the vicinity of zero, to thereby subject gas particles that have same direction of velocity vectors to multi-step optical excitation of optical decomposition in said laser light-crossing region, the excited or decomposed particles being used to treat the surface of said substrate.

Claim 5

A surface treatment method according to claim 2, wherein said narrow line width laser light is applied to said substrate.

Claim 6

A surface treatment method according to claim 4, wherein second light is applied to said gas particles so that the second light crosses said narrow line width laser light without entering the surface of said substrate.

Claim 7

A surface treatment method for treating a surface of a substrate to be anisotropic while incident light to said surface is below a level at which damage to the surface occurs by applying gas particles thereto, comprising the steps of: placing the substrate in gas atmosphere; irradiating the gas particles with a narrow line width light that can be absorbed only by those gas particles that have velocity vectors in a predetermined range so that the gas particles are excited or decomposed thereby, said narrow line light having a line width Δλ≦2×10 -6 λ where λ is the center wave length of said light, said irradiation occurring at a position within a mean free path of the gas particles above the substrate surface being treated, and treating the substrate with the excited or decomposed gas particles to cause perpendicular etching of the substrate surface without contamination by high-energy particles.

Claim 8

A surface treatment method for treating a surface of a substrate to be anisotropic while incident light to said surface is below a level at which damage to the surface occurs by applying gas particles thereto, comprising the steps of: placing the substrate in gas atmosphere; irradiating the gas particles with a narrow line width light that can be absorbed only by those gas particles that have velocity vectors in a predetermined range so that the gas particles are excited or decomposed thereby, said narrow line light having a line width Δλ≦2×10 -6 λ where λ is the center wave length of said light, said irradiation occurring at a position within a mean free path of the gas particles above the substrate surface being treated, and treating the substrate with the excited or decomposed gas particles to cause perpendicular etching of the substrate surface without contamination by high-energy particles.

Claim 9

A surface treatment apparatus used to treat a solid surface of a substrate by applying gas particles thereto, comprising: a container holding gas particles therein and set at the interior thereof to a low pressure; a base disposed in said container and holding thereon a substrate to be treated; means for applying to said gas particles a narrow line width laser light capable of exciting or decomposing only such gas particles that have velocities in a predetermined range, said narrow line light having a line width Δλ≦2×10 -6 λ where λ is the center wave length of said light, said means including two laser oscillators adapted to emit said narrow line width laser light positioned so that the narrow line width laser light emitted come from in two directions and cross each other at a position in the vicinity of said substrate so as to be applied to said gas particles, said irradiation occurring at a position within a mean free path of the gas particles above the substrate surfaces being treated to cause perpendicular etching of the substrate without contamination by high-energy particles.

Claim 10

A surface treatment apparatus used to treat a solid surface of a substrate by applying gas particles thereto, comprising: a container holding gas particles therein and set at the interior thereof to a low pressure; a base disposed in said container and holding thereon a substrate to be treated; means for applying to said gas particles a narrow line width laser light capable of exciting or decomposing only such gas particles that have velocities in a predetermined range, said narrow line light having a line width Δλ≦2×10 -6 λ where λ is the center wave length of said light, said means including two laser oscillators adapted to emit said narrow line width laser light positioned so that the narrow line width laser light emitted come from in two directions and cross each other at a position in the vicinity of said substrate so as to be applied to said gas particles, said irradiation occurring at a position within a mean free path of the gas particles above the substrate surfaces being treated to cause perpendicular etching of the substrate without contamination by high-energy particles.

Claim 11

A surface treatment apparatus used to treat a solid surface of a substrate by applying gas particles thereto, comprising a container holding gas particles therein and set at the interior thereof to a low pressure, a base disposed in said container and holding thereon a substrate to be treated, and means for applying to said gas particles a narrow line width light capable of exciting or decomposing only such gas particles that have velocities in a predetermined range, said narrow line light having a line width Δλ≦2×10 -6 λ where λ is the center wave length of said light.

Claim 12

A surface treatment apparatus used to treat a solid surface of a substrate by applying gas particles thereto, comprising a container holding gas particles therein and set at the interior thereof to a low pressure, a base disposed in said container and holding thereon a substrate to be treated, and means for applying to said gas particles a narrow line width light capable of exciting or decomposing only such gas particles that have velocities in a predetermined range, said narrow line light having a line width Δλ≦2×10 -6 λ where λ is the center wave length of said light.

Claim 13

A surface treatment apparatus according according to claim 8, wherein said light consists of narrow line width laser light.

Claim 14

A surface treatment apparatus according to claim 9, wherein two laser oscillators adapted to emit said narrow line width laser light are provided, and the wavelength of the laser lights are set in advance so that the laser lights selectively excite the gas particles whose velocity projections in the respective directions of light propagation are in the vicinity of zero, so that the narrow line width laser light emitted therefrom in two directions cross each other in a position in the vicinity of said substrate so as to be applied to said gas particles.

Claim 15

A surface treatment apparatus according to claim 9, wherein said laser light-emitting means are disposed so that said narrow line width laser light is applied to said substrate.

Claim 16

A surface treatment apparatus according to claim 11, wherein said apparatus includes a means for applying second light to said gas particles, which second light is emitted so as not to enter the surface of said substrate and so as to cross said narrow line width laser light.