Patent US4826321A successfully refreshed from Google Patents.
US4826321A
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US
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Thin dielectric film measuring system
Assignee: Nanometrics Inc
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Filing: 1988-03-14
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Granted: 1989-05-02
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Expires: 2008-03-14
Abstract
Abstract A system for the precise measurement of thin dielectric films on a substrate by directing a plane polarized laser light beam to the film at the Brewster angle of the substrate and by measuring the intensity changes between a measurement from the substrate alone and from the film coated substrate. Accurate thin film measurements in the range of from about 10 to 1,500 Angstroms are possible.
Inventors
- 👤 Vincent J. Coates
- 👤 Warren W. Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:01
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0641; G01B11/065
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
154 words
An apparatus for determining the thickness of a thin dielectric film on the surface of a base, the material of said base having a predetermined Brewster angle at a known wavelength of incident light, said apparatus comprising: first means for delivering a collimated beam of plane polarized monochromatic light at the known wavelength at the Brewster angle of the base material to: the surface of a base material having the predetermined Brewster angle, said beam being reflected from said surface with a first detected intensity amplitude representing an offset value of the apparatus; and a sandwich formed of the thin film on the surface of a base material having an identical predetermined Brewster angle, said beam being reflected from the sandwich at a second detected intensity amplitude; and second means responsive to the difference between said first detected intensity amplitude and said second detected intensity amplitude for determining the thickness of said thin film.
Claim 2
Independent Claim
154 words
An apparatus for determining the thickness of a thin dielectric film on the surface of a base, the material of said base having a predetermined Brewster angle at a known wavelength of incident light, said apparatus comprising: first means for delivering a collimated beam of plane polarized monochromatic light at the known wavelength at the Brewster angle of the base material to: the surface of a base material having the predetermined Brewster angle, said beam being reflected from said surface with a first detected intensity amplitude representing an offset value of the apparatus; and a sandwich formed of the thin film on the surface of a base material having an identical predetermined Brewster angle, said beam being reflected from the sandwich at a second detected intensity amplitude; and second means responsive to the difference between said first detected intensity amplitude and said second detected intensity amplitude for determining the thickness of said thin film.
Claim 3
Dependent Claim
17 words
The apparatus claimed in claim 1 wherein said plane polarized monochromatic light is generated by a laser.
Claim 4
Dependent Claim
60 words
The apparatus claimed in claim 1 wherein said second means includes a detector and computer, said computer being responsive to the output signal from said detector for comparing the second detected intensity amplitude measurement of a thin film of known thickness with the second detected intensity amplitude measurement of a thin film of unknown thickness for determining said unknown thickness.
Claim 5
Dependent Claim
26 words
The apparatus claimed in claim 1 further including third means for stabilizing at least one variation in the sensitivity of a detector in said second means.
Claim 6
Dependent Claim
41 words
The apparatus claimed in claim 4 wherein said third means includes a lens in the optical path of the reflected beam to said detector, said lens positioned to intercept displaced reflected beams and to focus said displaced beams into said detector.
Claim 7
Dependent Claim
22 words
The apparatus claimed in claim 1 further including fourth means for compensating for fluctuations in the output power of said monochromatic light.
Claim 8
Dependent Claim
144 words
The apparatus claimed in claim 6 wherein said fourth means includes: a beam splitter formed to pass a large power portion of said output power toward a surface to be reflected therefrom and detected, and a small power portion of said output power in a second direction; a reference detector positioned to receive said small power portion and to develop a first signal representative of said small power portion; and a signal detector positioned for receiving said first signal and for receiving from said second means a second signal representative of said large power portion, said signal detector functioning to compare said first and said second signal and, in response thereto, to generate a stabilized output signal representing the total power which is delivered to said computer, whereby said beam splitter, said reference detector and said signal detector in combination for a servo loop.
Claim 9
Independent Claim
217 words
A method for determining an unknown thickness of a thin dielectric film on a substrate surface, said method comprising the steps of: delivering a collimated beam of a plane polarized laser light to the surface of an uncoated substrate material at an angle of incidence at the Brewster angle of the substrate material and measuring the intensity of the light beam reflected from said surface to obtain a first calibration value of a film of "zero" thickness representing an offset value of the measuring system; delivering said beam of light at the same Brewster angle to the surface of an identical substrate material coated with a thin film of known thickness and measuring the reflected light beam intensity to obtain a second calibration value representing a film of known thickness and a normalizing calibration of said system; and delivering said beam of light at said same angle to the surface of an identical substrate material coated with a thin film of unknown thickness and measuring the reflected light beam intensity to obtain a value representing the known thickness, said unknown thickness being determinable from known values of wavelength of incident light, refractive indices of the substrate and thin film materials, Brewster angle, and measured values of reflected light intensity corrected by said first and second calibration values.
Claim 10
Independent Claim
217 words
A method for determining an unknown thickness of a thin dielectric film on a substrate surface, said method comprising the steps of: delivering a collimated beam of a plane polarized laser light to the surface of an uncoated substrate material at an angle of incidence at the Brewster angle of the substrate material and measuring the intensity of the light beam reflected from said surface to obtain a first calibration value of a film of "zero" thickness representing an offset value of the measuring system; delivering said beam of light at the same Brewster angle to the surface of an identical substrate material coated with a thin film of known thickness and measuring the reflected light beam intensity to obtain a second calibration value representing a film of known thickness and a normalizing calibration of said system; and delivering said beam of light at said same angle to the surface of an identical substrate material coated with a thin film of unknown thickness and measuring the reflected light beam intensity to obtain a value representing the known thickness, said unknown thickness being determinable from known values of wavelength of incident light, refractive indices of the substrate and thin film materials, Brewster angle, and measured values of reflected light intensity corrected by said first and second calibration values.
Claim 11
Dependent Claim
98 words
The method claimed in claim 8 further including the step of stabilizing the detected reflected light beam intensity by the steps of: sampling a portion of the laser light beam by passing said beam from said laser through a beam splitter; detecting said sampled portion and generating a corresponding first signal proportional to its intensity; detecting the light beam reflected from the surface of a specimen and generating a second signal proportional to its intensity; and stabilizing the amplitude of said second signal by dividing it by a control signal proportional to variations contained in said first signal.
Claim 12
Dependent Claim
157 words
A thin film measuring system for determining the thickness of a thin dielectric film on the surface of a base material having a known refractive index and known Brewster angle at a known wavelength of incident light, said measuring system comprising: means for delivering an incident collimated beam of plane polarized monochromatic light at the known wavelength to the surface of the thin film at the known Brewster angle of the uncoated base material; detecting means for measuring the intensity of said beam after its reflection from said surface; and computing means coupled to said detecting means for computing from said intensity measurement the thickness of said thin film, said computing means having stored therein values representing said known wavelength of incident light, said known refractive index, said known Brewster angle, and predetermined offset and normalizing correction values obtained from prior measurements of known film thickness values on identical base material and made with identical incident light.
Claim 13
Dependent Claim
157 words
A thin film measuring system for determining the thickness of a thin dielectric film on the surface of a base material having a known refractive index and known Brewster angle at a known wavelength of incident light, said measuring system comprising: means for delivering an incident collimated beam of plane polarized monochromatic light at the known wavelength to the surface of the thin film at the known Brewster angle of the uncoated base material; detecting means for measuring the intensity of said beam after its reflection from said surface; and computing means coupled to said detecting means for computing from said intensity measurement the thickness of said thin film, said computing means having stored therein values representing said known wavelength of incident light, said known refractive index, said known Brewster angle, and predetermined offset and normalizing correction values obtained from prior measurements of known film thickness values on identical base material and made with identical incident light.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-01 | 1992-10-31 | 1993-05-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-01 | 1996-10-31 | 1997-05-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-01 | 2000-10-31 | 2001-05-02 | $7700.00 | Window Closed / Lapsed |