Copolymers having O-nitrocarbinol ester groups and production of semiconductor components

Claim 1

A copolymer which contains as copolymerized units (a) from 5 to 50 mol % of one or more compounds of the general formula (I) ##STR6## where A is an aromatic or heteroaromatic, substituted or unsubstituted ring system of 5 to 14 ring members, X is hydrogen, alkyl of 1 to 8 carbon atoms, or substituted or unsubstituted aryl or aralkyl, and Y is an ethylenically unsaturated radical of 2 to 6 carbon atoms, (b) from 94 to 30 mol % of methacrylonitrile, (c) from 1 to 20 mol % of one or more olefinically unsaturated copolymerizable carboxylic acids of 3 to 6 carbon atoms, (d) from 0 to 30 mol % of one or more further olefinically unsaturated, copolymerizable organic compounds other than (a), (b) and (c), whose homopolymers are transparent within the wavelength region from 250 to 400 nm, with the proviso that the percentages mentioned under (a) to (d) add up to 100.