Abstract Heat transfer from the surface of a crystal during crystal growth is controlled by surrounding the crystal with plural coaxial heat transfer modules. The heat transfer modules are stacked along the crystal axis. Each module includes apparatus for monitoring a temperature drop across a radially extending gradient region of the module. A heating element in the module responsive to the temperature drop controls heat transfer through the module which is equal to the heat transfer from the crystal surface at the axial location of the module. The control system also controls heat transfer from the top of the crystal by controlling the temperature to which the crystal top radiates. Control of heat transfer from the crystal surface prevents excessive thermal stress experienced by the crystal solid during growth reducing the presence of massive dislocation networks.
Method for growing a crystal from a melt comprising controlling the heat flux from the crystal surface so that the thermal stress levels are maintained below the critical resolved shear stress value of the crystal matrix by monitoring radial heat flux from the crystal and, responsive to the monitored heat flux, by controlling the as-monitored radial heat flux in the growioog crystal, and by simultaneously monitoring and controlling the temperature to which the top of the growing crystal radiates.
Claim 2
Dependent Claim
79 words
Method for growing a crystal from a melt comprising controlling the heat flux from the crystal surface so that the thermal stress levels are maintained below the critical resolved shear stress value of the crystal matrix by monitoring radial heat flux from the crystal and, responsive to the monitored heat flux, by controlling the as-monitored radial heat flux in the growioog crystal, and by simultaneously monitoring and controlling the temperature to which the top of the growing crystal radiates.
Claim 3
Dependent Claim
56 words
The method of claim 1 wherein controlling the heat transfer from the crystal comprises surrounding the crystal with plural coaxial heat transfer modules stacked along the crystal axis, monitoring a temperature drop across a radially extending gradient region of the module, and energizing a heating element within the module to control heat transfer through the module.
Claim 4
Dependent Claim
10 words
The method of claim 1 wherein the crystal is GaAs.
Claim 5
Dependent Claim
12 words
The method of claim 1 wherein the crystal is a III-V crystal.
Claim 6
Dependent Claim
14 words
The method of claim 1 wherein the crystal is grown by the Czochralski technique.