EP0104559A1
Expired / Lapsed
EP
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Pulling method of single crystals
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1983-09-16
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Granted: —
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Expires: 2003-09-16
Abstract
Abstract Pulling method of single crystals (6) by the Czochralski technique using a single-crystal pulling apparatus having a furnace (2) consisting of separately controlled heaters (7, 8), wherein the temperature at the seed holder (11) is measured and power is supplied to the heaters (7, 8) so that the temperature difference (ΔT) between the crucible (1) and the seed holder (11) follows a predetermined pattern as a function of the pulled-up length (Δx).
Inventors
- 👤 Toshihiro Kotani
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 16:05
CPC Classifications
C; C30; C30B; C30B27/00; C30B27/02; C30B15/00; C30B15/14; C30B15/20; C30B15/22; C30B15/36
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
74 words
Pulling method of single crystals (6) by the Czochralski technique using a single-crystal pulling apparatus having a furnace (2) consisting of separately controlled heaters (7, 8), wherein the temperature at the seed holder (11) is measured and power is supplied to the heaters (7, 8) so that the temperature difference (ΔT) between the crucibel (1) and the seed holder (11) follows a predetermined pattern as a function of the pulled-up length ( A x)
Claim 2
Dependent Claim
74 words
Pulling method of single crystals (6) by the Czochralski technique using a single-crystal pulling apparatus having a furnace (2) consisting of separately controlled heaters (7, 8), wherein the temperature at the seed holder (11) is measured and power is supplied to the heaters (7, 8) so that the temperature difference (ΔT) between the crucibel (1) and the seed holder (11) follows a predetermined pattern as a function of the pulled-up length ( A x)
Claim 3
Dependent Claim
18 words
Pulling method of single crystals as set forth in claim, 1, wherein (AT) is in proportion to (Ax)
Claim 4
Dependent Claim
23 words
Pulling method of single crystals (6) as set forth in claim 2, wherein (ΔT/Δx) is within the range of 30 to 60°C/cm -
Claim 5
Dependent Claim
28 words
Pulling method of single crystals (6) as set forth in claim 3, wherein the (ΔT/Δx) at the first stage is larger than the (ΔT/Δx) at the successive stage
Claim 6
Dependent Claim
34 words
Pulling method of single crystals (6) as set forth in claim 4, wherein the (AT/Ax) at the first stage is about 50 0 C/cm, and the (ΔT/Δx) at the successive stage is about 40°C/cm
References Cited (Backward Citations)
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