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US4821999A Expired / Lapsed US ⏱️ 0.0 years remaining

Valve element and process of producing the same

Assignee: Toshiba TEC Corp
•
Filing: 1988-01-21
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Granted: 1989-04-18
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Expires: 2008-01-21
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Abstract

Abstract A nozzle plate in which a nozzle through which fluid can pass is formed is prepared, and an insulator layer is located in a layer on the nozzle plate except a location of the nozzle. An electrode plate is provided so as to cover the insulator layer, and a valve beam made of a conductive substance is located in an opposing relationship to the nozzle plate. A valve for opening and closing said nozzle is formed at a yieldable portion of the valve beam opposing to the nozzle. Upon energization of the electrode plate and the valve beam of a valve element thus produced, the valve is attracted toward the electrode plate to open or close the valve. Binary control of the valve to fully open or fully close the nozzle and infinite control of the valve to infinitely open or close the nozzle can be readily attained in the valve element.

Inventors

  • 👤 Yoshimitsu Ohtaka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 20:59
CPC Classifications
F; F16; F16K; F16K99/00; F16K99/0001; B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/162; B41J2/1621; B41J2/1626; B41J2/1629; B41J2/1631; B41J2/1632; B41J2/164; B41J2/1642; B41J2/1643; B41J2/1646; F15; F15C; F15C5/00; F16K31/00; F16K31/02; F16K99/0003; F16K99/0005; F16K99/0007; F16K99/0034; F16K99/0042; F16K99/0051; F16K2099/0073; F16K2099/0074; F16K2099/008; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49405; Y10T29/49412; Y10T29/49416; Y10T29/49826; Y10T29/49885

Claims Analysis

Total Claims: 32
Claim 1
Independent Claim 82 words
A valve element, comprising: a nozzle plate having formed therein a nozzle through which fluid can pass; an insulator layer covering said nozzle plate except at a location corresponding to said nozzle; an electrode plate covered by said insulator layer; and a valve beam made of a conductive substance and spaced by a predetermined distance from said nozzle plate, said valve beam defining at an integral portion thereof facing said nozzle a yieldable portion forming valve means opening and closing said nozzle.
Claim 2
Dependent Claim 82 words
A valve element, comprising: a nozzle plate having formed therein a nozzle through which fluid can pass; an insulator layer covering said nozzle plate except at a location corresponding to said nozzle; an electrode plate covered by said insulator layer; and a valve beam made of a conductive substance and spaced by a predetermined distance from said nozzle plate, said valve beam defining at an integral portion thereof facing said nozzle a yieldable portion forming valve means opening and closing said nozzle.
Claim 3
Dependent Claim 28 words
A valve element according to claim 1, further comprising a driving means for causing a difference in potential to appear between said electrode plate and said valve beam.
Claim 4
Dependent Claim 27 words
A valve element according to claim 2, including means for controlling the difference in potential between said electrode plate and said valve beam on a binary basis.
Claim 5
Dependent Claim 26 words
A valve element according to claim 2, including means for controlling the difference in potential between said electrode plate and said valve beam by infinitesimal amounts.
Claim 6
Dependent Claim 15 words
A valve element according to claim 1, wherein said nozzle plate is made of nickel.
Claim 7
Dependent Claim 22 words
A valve element according to claim 5, wherein said nozzle plate is formed from a metal film which is plated with nickel.
Claim 8
Dependent Claim 18 words
Avalve element according to claim 6, wherein the nickel is plated using a non-glazing sulfamic acid nickel bath.
Claim 9
Dependent Claim 31 words
A valve element according to claim 1, wherein said nozzle plate is formed from one from the group consisting of a glass plate and a resin film having a photosensitive property.
Claim 10
Dependent Claim 24 words
A valve element according to claim 1, wherein said nozzle is formed into a configuration in which said nozzle tapers toward an end thereof.
Claim 11
Dependent Claim 22 words
A valve element according to claim 9, wherein said valve is formed into a profile wherein said valve extends along said nozzle.
Claim 12
Dependent Claim 40 words
A valve element according to claim 9, wherein said valve is formed into an actuate profile wherein the slope of a tangential line to said valve comes close to the axis of said nozzle toward the end of said nozzle.
Claim 13
Dependent Claim 27 words
A valve element according to claim 11, wherein said insulator layer has a configuration such that said insulator is contiguous to the arcuate profile of said nozzle.
Claim 14
Dependent Claim 26 words
A valve element according to claim 12, wherein there is a step between said nozzle and a portion of said insulator layer contiguous to said nozzle.
Claim 15
Dependent Claim 17 words
A valve element according to claim 1, further comprising a ceramic film formed on said insulator layer.
Claim 16
Dependent Claim 42 words
A valve element according to claim 14, wherein said ceramic film is made consisting of a material selected from a group of SiO 2 , Al 2 O 3 , Si 3 N 4 and any of compositions of the listed substances.
Claim 17
Dependent Claim 47 words
A valve element according to claim 1, wherein said valve beam is spaced from said nozzle plate by a distance H while said electrode is spaced from said nozzle plate by a distance h smaller than the distance H on the valve beam side around said nozzle.
Claim 18
Dependent Claim 15 words
A valve element according to claim 1, wherein said electrode plate is made of nickel.
Claim 19
Dependent Claim 28 words
A valve element according to claim 17, wherein said electrode late is formed by plating nickel on a metal film on which nickel is plated by non-electrolytic plating.
Claim 20
Dependent Claim 20 words
A valve element according to claim 18, wherein the nickel plating is effected using a non-glazing sulfamic acid nickel bath.
Claim 21
Dependent Claim 15 words
A valve element according to claim 1, wherein said valve beam is made of nickel.
Claim 22
Dependent Claim 22 words
A valve element according to claim 20, wherein said valve beam is formed from a metal film on which nickel is plated.
Claim 23
Dependent Claim 20 words
A valve element according to claim 21, wherein the nickel plating is effected using a non-glazing sulfamic acid nickel bath.
Claim 24
Dependent Claim 21 words
A valve element according to claim 1, wherein said yieldable portion of said valve beam is formed into a crank shape.
Claim 25
Dependent Claim 23 words
A valve element according to claim 1, wherein said valve beam is formed so as to be electrically connected to said nozzle plate.
Claim 26
Dependent Claim 28 words
A valve element according to claim 24, further comprising a driving means for causing a difference in potential to appear between said electrode plate and said valve beam.
Claim 27
Dependent Claim 20 words
A valve element according to clam 1, wherein said valve beam is secured to said insulator layer via a spacer.
Claim 28
Dependent Claim 20 words
A valve element according to clam 1, wherein said valve beam is secured to said insulator layer via a spacer.
Claim 29
Dependent Claim 18 words
A valve element according to claim 1, wherein said valve beam is secured directly to said insulator layer.
Claim 30
Dependent Claim 40 words
A valve element according to claim 1, wherein said nozzle plate has an additional nozzle or nozzles formed in a row therein, and an additional valve or valves are provided in a corresponding relationship to said additional nozzle or nozzles.
Claim 31
Dependent Claim 37 words
A valve element according to claim 28, wherein said yieldable portion of each of valve beams is supported at both ends thereof by a pair of supporting portions which have a smaller width than said yieldable portion.
Claim 32
Dependent Claim 30 words
A valve element according to claim 29, wherein each of said valve beams is inclined relative to a direction perpendicular to the direction of the row of said yieldable portions.

References Cited (Backward Citations)

US3500380A Cited
US3523677A Cited
JPS54110967A Cited
US4628330A Cited
US4545561A Cited
US4585209A Cited
US4581624A Cited
JPS61144361A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-04-17 1992-10-17 1993-04-18 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-04-17 1996-10-17 1997-04-18 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-04-17 2000-10-17 2001-04-18 $7700.00 Window Closed / Lapsed

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