US4807006A
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US
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Heterojunction interdigitated schottky barrier photodetector
Assignee: International Business Machines Corp
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Filing: 1987-06-19
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Granted: 1989-02-21
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Expires: 2007-06-19
Abstract
Abstract A semiconductor photodetector is formed of interdigitated, metal-semiconductor-metal electrodes disposed on a surface of semi-insulating semiconductor material, gallium arsenide. Radiation such as infra-red or visible light is converted to an electric current flowing between the electrodes upon application of a bias voltage between the electrodes. A Schottky barrier at the junction of each electrode surface and the semiconductor surface limits current flow to that produced by photons. Tunneling of charge carriers of the current under the Schottky barrier, which tunneling results from the entrapment of charge carriers on the semiconductor surface, is inhibited by the production of a heterojunction surface layer upon the foregoing surface between the electrodes to repulse the charge carriers and prevent their entrapment at the surface. The heterojunction layer may be doped to enhance the repulsion of charge carriers. The heterojunction surface layer is of sufficient thickness to prevent tunneling of photogenerated carriers to a noncontacted region of the surface of the heterojunction layer and to also permit efficient repulsion of charge carriers from the surface. Longer wavelength photodetectors may also be formed in this way by providing misfit dislocation regions between the interaction region, which may be GaInAs, and a GaAs substrate, thereby providing a pseudo-morphic interaction region which is graded back to a heterojunction layer at the surface.
Inventors
- 👤 Dennis L. Rogers
- 👤 Jerry M. Woodall
- 👤 George D. Pettit
- 👤 David T. McInturff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 17:06
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/10; H10F77/12; H10F77/124; H10F77/1248; H10F30/00; H10F30/20; H10F30/21; H10F30/22; H10F30/222; H10F30/227; H10F30/2275; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/544; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
229 words
A semiconductor photoconductive device comprising: means including a substantially undoped first layer of semiconducting material for converting radiation incident upon the photoconductive device into electric charge carriers within said layer, said semiconducting material having a characteristic lattice constant and a characteristic energy band gap; a first electrode having an electrically conductive element extending upon a surface of said photoconductive device; a second electrode having an electrically conductive element extending upon said surface of said photoconductive device alongside of said element of said first electrode and spaced apart therefrom; each of said elements forming a Schottky barrier with said first semiconductor layer for development of an electric current in the presence of incident radiation and upon connection of a source of bias voltage between said first and said second electrodes, said photoconductive device further comprising: means including a second layer of semiconducting material having a characteristic lattice constant which is lattice mismatched to the lattice constant characteristic of the first layer and a characteristic energy band gap which is wider than the characteristic energy band gap of the first layer, said second layer being interposed between the surface of said photoconductive device and said first layer for deflecting both electrons and holes away from said surface, thereby to reduce entrapment of both electrons and holes along said surface and inhibit tunneling of both electrons and holes under a Schottky barrier.
Claim 2
Dependent Claim
229 words
A semiconductor photoconductive device comprising: means including a substantially undoped first layer of semiconducting material for converting radiation incident upon the photoconductive device into electric charge carriers within said layer, said semiconducting material having a characteristic lattice constant and a characteristic energy band gap; a first electrode having an electrically conductive element extending upon a surface of said photoconductive device; a second electrode having an electrically conductive element extending upon said surface of said photoconductive device alongside of said element of said first electrode and spaced apart therefrom; each of said elements forming a Schottky barrier with said first semiconductor layer for development of an electric current in the presence of incident radiation and upon connection of a source of bias voltage between said first and said second electrodes, said photoconductive device further comprising: means including a second layer of semiconducting material having a characteristic lattice constant which is lattice mismatched to the lattice constant characteristic of the first layer and a characteristic energy band gap which is wider than the characteristic energy band gap of the first layer, said second layer being interposed between the surface of said photoconductive device and said first layer for deflecting both electrons and holes away from said surface, thereby to reduce entrapment of both electrons and holes along said surface and inhibit tunneling of both electrons and holes under a Schottky barrier.
Claim 3
Dependent Claim
82 words
A photoconductive device according to claim 1 wherein said first electrode comprises further electrically conductive elements, said element and said further elements of said first electrode constituting a first plurality of elements; and wherein said second electrode comprises further electrically conductive elements, said element and said further elements of said second electrode constituting a second plurality of elements, said first plurality of elements being interleaved among said second plurality of elements and being spaced apart therefrom to form an interdigitated electrode structure.
Claim 4
Dependent Claim
30 words
A photoconductive device according to claim 1 wherein the wider band gap of said second layer generates an electrical field which deflects both electrons and holes away from said surface.
Claim 5
Dependent Claim
21 words
A photoconductive device according to claim 3 wherein said second layer is doped to further deflect holes away from said surface.
Claim 6
Dependent Claim
56 words
A photoconductive device according to claim 4 wherein, in said first layer, said radiation penetrates to a predetermined penetration depth from said surface for defining an active region for said converting; and wherein the depth of said second layer is smaller by at least approximately an order of magnitude than the depth of said active region.
Claim 7
Dependent Claim
94 words
A photoconductive device according to claim 5 wherein the material of said first layer is semi-insulating semiconductor material having a characteristic resistivity, the resistance of the active region depending on the depth and resistivity of said active region; the doping of said second layer reducing the resistivity thereof to a value less than the resistivity of said first layer, the resistance of said second layer depending on the depth and resistivity of said second layer, the resistance of said second layer being greater than approximately one percent of the resistance of said active region.
Claim 8
Dependent Claim
82 words
A photoconductive device according to claim 6 wherein said first electrode comprises further electrically conductive elements, said element and said further elements of said first electrode constituting a first plurality of elements; and wherein said second electrode comprises further electrically conductive elements, said element and said further elements of said second electrode constituting a second plurality of elements, said first plurality of elements being interleaved among said second plurality of elements and being spaced apart therefrom to form an interdigitated electrode structure.
Claim 9
Dependent Claim
27 words
A photoconductive device according to claim 6 wherein the resistance of said second layer is greater than approximately one tenth of the resistance of said active region.
Claim 10
Dependent Claim
48 words
A photoconductive device according to claim 3 wherein each of said electrodes is formed of electrically conductive material, wherein the semiconductor material of said first layer is comprised of semi-insulating gallium-arsenide, and wherein the second layer is comprised of indium-aluminum-arsenide of greater band gap than said first layer.
Claim 11
Dependent Claim
22 words
A photoconductive device according to claim 3 and further comprising an underlying supporting substrate of semiconductor material having a characteristic lattice constant.
Claim 12
Dependent Claim
42 words
A photoconductive device according to claim 10 wherein said first layer is latticed mismatched to said substrate and wherein said photoconductive device further comprises: means for substantially accommodating the lattice constant of said first layer to the lattice constant of said substrate.
Claim 13
Dependent Claim
63 words
A photoconductive device according to claim 11 wherein said accommodating means includes at least a third layer of semiconductor material having a lattice constant which is greater than the lattice constant of said substrate and which is less than the lattice constant of said first layer such that said third layer is lattice mismatched to said substrate and also to said first layer.
Claim 14
Dependent Claim
23 words
A photoconductive device according to claim 12 wherein said first layer is comprised of GaInAs and wherein said substrate is comprised of GaAs.
Claim 15
Dependent Claim
23 words
A photoconductive device according to claim 12 wherein said first layer is comprised of GaInAs and wherein said substrate is comprised of Si.
Claim 16
Dependent Claim
24 words
A photoconductive device according to claim 12 wherein said first layer is comprised of GaInAs and wherein said second layer is comprised of GaAs.
Claim 17
Dependent Claim
53 words
A photoconductive device according to claim 13 wherein said first layer is comprised of GaInAs having a predetermined mole percentage of InAs and wherein said third layer of semiconductor material is comprised of GaInAs having a mole percentage of InAs which is less than the mole percentage of InAs of said first layer.
Claim 18
Dependent Claim
108 words
In a radiation responsive photoconductive device comprising a Schottky barrier rectifying metal contact on a semiconductor surface, the improvement comprising a heterojunction region in said surface adjacent to said metal contact, said region being of sufficient thickness to prevent tunneling of photogenerated carriers to a noncontacted region of the surface of the heterojunction region and to also permit efficient repulsion of both electrons and holes from the surface, said heterojunction region having a wider band gap than an underlying substantially undoped radiation absorbing semiconductor region to deflect substantially all electrons and holes away from said surface, said heterojunction region being lattice mismatched to said underlying radiation absorbing region.
Claim 19
Dependent Claim
108 words
In a radiation responsive photoconductive device comprising a Schottky barrier rectifying metal contact on a semiconductor surface, the improvement comprising a heterojunction region in said surface adjacent to said metal contact, said region being of sufficient thickness to prevent tunneling of photogenerated carriers to a noncontacted region of the surface of the heterojunction region and to also permit efficient repulsion of both electrons and holes from the surface, said heterojunction region having a wider band gap than an underlying substantially undoped radiation absorbing semiconductor region to deflect substantially all electrons and holes away from said surface, said heterojunction region being lattice mismatched to said underlying radiation absorbing region.
Claim 20
Dependent Claim
225 words
A semiconductor photoconductive device comprising: means including a substantially undoped first layer of semiconducting material for converting radiation incident upon the photodetector into electric charge carriers within said layer, said semiconducting material having a characteristic lattice constant and a characteristic energy band gap; a first electrode having an electrically conductive element extending upon a surface of said photodetector; a second electrode having an electrically conductive element extending upon said surface of said photodetector alongside of said element of said first electrode and spaced apart therefrom; each of said elements forming a Schottky barrier with said first semiconductor layer for development of an electric current in the presence of incident radiation and upon connection of a source of bias voltage between said first and said second electrodes, said photodetector further comprising: means including a second layer of semiconducting material having a characteristic lattice constant which is substantially lattice matched to the lattice constant characteristic of the first layer and a characteristic energy band gap which is wider than the characteristic energy band gap of the first layer, said second layer being interposed between the surface of said photodetector and said first layer for deflecting both electrons and holes away from said surface, thereby to reduce entrapment of both electrons and holes along said surface and inhibit tunneling of both electrons and holes under a Schottky barrier.
Claim 21
Dependent Claim
225 words
A semiconductor photoconductive device comprising: means including a substantially undoped first layer of semiconducting material for converting radiation incident upon the photodetector into electric charge carriers within said layer, said semiconducting material having a characteristic lattice constant and a characteristic energy band gap; a first electrode having an electrically conductive element extending upon a surface of said photodetector; a second electrode having an electrically conductive element extending upon said surface of said photodetector alongside of said element of said first electrode and spaced apart therefrom; each of said elements forming a Schottky barrier with said first semiconductor layer for development of an electric current in the presence of incident radiation and upon connection of a source of bias voltage between said first and said second electrodes, said photodetector further comprising: means including a second layer of semiconducting material having a characteristic lattice constant which is substantially lattice matched to the lattice constant characteristic of the first layer and a characteristic energy band gap which is wider than the characteristic energy band gap of the first layer, said second layer being interposed between the surface of said photodetector and said first layer for deflecting both electrons and holes away from said surface, thereby to reduce entrapment of both electrons and holes along said surface and inhibit tunneling of both electrons and holes under a Schottky barrier.
Claim 22
Dependent Claim
82 words
A photoconductive device according to claim 18 wherein said first electrode comprises further electrically conductive elements, said element and said further elements of said first electrode constituting a first plurality of elements; and wherein said second electrode comprises further electrically conductive elements, said element and said further elements of said second electrode constituting a second plurality of elements, said first plurality of elements being interleaved among said second plurality of elements and being spaced apart therefrom to form an interdigitated electrode structure.
Claim 23
Dependent Claim
30 words
A photoconductive device according to claim 18 wherein the wider band gap of said second layer generates an electrical field which deflects both electrons and holes away from said surface.
Claim 24
Dependent Claim
21 words
A photoconductive device according to claim 20 wherein said second layer is doped to further deflect holes away from said surface.
Claim 25
Dependent Claim
56 words
A photoconductive device according to claim 21 wherein, in said first layer, said radiation penetrates to a predetermined penetration depth from said surface for defining an active region for said converting; and wherein the depth of said second layer is smaller by at least approximately an order of magnitude than the depth of said active region.
Claim 26
Dependent Claim
94 words
A photoconductive device according to claim 22 wherein the material of said first layer is semi-insulating semiconductor material having a characteristic resistivity, the resistance of the active region depending on the depth and resistivity of said active region; the doping of said second layer reducing the resistivity thereof to a value less than the resistivity of said first layer, the resistance of said second layer depending on the depth and resistivity of said second layer, the resistance of said second layer being greater than approximately one percent of the resistance of said active region.
Claim 27
Dependent Claim
82 words
A photoconductive device according to claim 23 wherein said first electrode comprises further electrically conductive elements, said element and said further elements of said first electrode constituting a first plurality of elements; and wherein said second electrode comprises further electrically conductive elements, said element and said further elements of said second electrode constituting a second plurality of elements, said first plurality of elements being interleaved among said second plurality of elements and being spaced apart therefrom to form an interdigitated electrode structure.
Claim 28
Dependent Claim
27 words
A photoconductive device according to claim 23 wherein the resistance of said second layer is greater than approximately one tenth of the resistance of said active region.
Claim 29
Dependent Claim
40 words
A photoconductive device according to claim 20 wherein each of said electrodes is formed of electrically conductive material, wherein the semiconductor material of said first layer is comprised of semi-insulating gallium-arsenide, and wherein the second layer is comprised of gallium-aluminum-arsenide.
Claim 30
Dependent Claim
22 words
A photoconductive device according to claim 20 and further comprising an underlying supporting substrate of semiconductor material having a characteristic lattice constant.
Claim 31
Dependent Claim
42 words
A photoconductive device according to claim 27 wherein said first layer is lattice mismatched to said substrate and wherein said photoconductive device further comprises: means for substantially accommodating the lattice constant of said first layer to the lattice constant of said substrate.
Claim 32
Dependent Claim
63 words
A photoconductive device according to claim 28 wherein said accommodating means includes at least a third layer of semiconductor material having a lattice constant which is greater than the lattice constant of said substrate and which is less than the lattice constant of said first layer such that said third layer is lattice mismatched to said substrate and also to said first layer.
Claim 33
Dependent Claim
23 words
A photoconductive device according to claim 29 wherein said first layer is comprised of GaInAs and wherein said substrate is comprised of GaAs.
Claim 34
Dependent Claim
23 words
A photoconductive device according to claim 29 wherein said first layer is comprised of GaInAs and wherein said substrate is comprised of Si.
Claim 35
Dependent Claim
29 words
A photoconductive device according to claim 29 wherein said first layer is comprised of GaInAs and wherein said second layer is comprised of InAlAs having a lattice matched composition.
Claim 36
Dependent Claim
53 words
A photoconductive device according to claim 30 wherein said first layer is comprised of GaInAs having a predetermined mole percentage of InAs and wherein said third layer of semiconductor material is comprised of GaInAs having a mole percentage of InAs which is less than the mole percentage of InAs of said first layer.
Claim 37
Dependent Claim
109 words
In a radiation responsive photoconductive device comprising a Schottky barrier rectifying metal contact on a semiconductor surface, the improvement comprising a heterojunction region in said surface adjacent to said metal contact, said region being of sufficient thickness to prevent tunneling of photogenerated carriers to a noncontacted region of the surface of the heterojunction region and to also permit efficient repulsion of both electrons and holes from the surface, said heterojunction region having a wider band gap than an underlying substantially undoped radiation absorbing semiconductor region to deflect substantially all electrons and holes away from said surface, said heterojunction region being substantially lattice matched to said underlying radiation absorbing region.
Claim 38
Dependent Claim
109 words
In a radiation responsive photoconductive device comprising a Schottky barrier rectifying metal contact on a semiconductor surface, the improvement comprising a heterojunction region in said surface adjacent to said metal contact, said region being of sufficient thickness to prevent tunneling of photogenerated carriers to a noncontacted region of the surface of the heterojunction region and to also permit efficient repulsion of both electrons and holes from the surface, said heterojunction region having a wider band gap than an underlying substantially undoped radiation absorbing semiconductor region to deflect substantially all electrons and holes away from said surface, said heterojunction region being substantially lattice matched to said underlying radiation absorbing region.
Claim 39
Dependent Claim
24 words
A photoconductive device according to claim 12 wherein said first layer is comprised of GaInAs and wherein said second layer is comprised of GaAlAs.
Claim 40
Dependent Claim
125 words
A photoconductive device comprising a pair of interdigitated electrically conductive electrodes which are disposed upon a surface of the device, the electrodes forming a Schottky contact with an underlying radiation absorbing region, the radiation absorbing region being comprised of material having a composition of Ga x In.sub.(1-x) As and having a band gap responsive to radiation of a predetermined wavelength for generating electron-hole pairs therefrom, the radiation absorbing region including a heterojunction region interposed between said radiation absorbing region and the surface, said heterojunction region having a wider band gap than said radiation absorbing region for repelling both electrons and holes from the surface, said heterojunction region having a composition at the surface which differs from that of the composition of the radiation absorbing region.
Claim 41
Dependent Claim
125 words
A photoconductive device comprising a pair of interdigitated electrically conductive electrodes which are disposed upon a surface of the device, the electrodes forming a Schottky contact with an underlying radiation absorbing region, the radiation absorbing region being comprised of material having a composition of Ga x In.sub.(1-x) As and having a band gap responsive to radiation of a predetermined wavelength for generating electron-hole pairs therefrom, the radiation absorbing region including a heterojunction region interposed between said radiation absorbing region and the surface, said heterojunction region having a wider band gap than said radiation absorbing region for repelling both electrons and holes from the surface, said heterojunction region having a composition at the surface which differs from that of the composition of the radiation absorbing region.
Claim 42
Dependent Claim
32 words
A photoconductive device as defined in claim 36 wherein x is approximately 0.4 to approximately 0.6 and wherein the heterojunction region is comprised at the surface of material having the composition GaAs.
Claim 43
Dependent Claim
38 words
A photoconductive device as defined in claim 36 wherein x is approximately 0.4 to approximately 0.6 and wherein the heterojunction region is comprised at the surface of material having the composition Ga 0 .8 Al 0 .2 As.
Claim 44
Dependent Claim
47 words
A photoconductive device as defined in claim 36 wherein x is approximately 0.4 to approximately 0.6 and wherein the heterojunction region is comprised at the surface of material having the composition Al y In( 1-y ) As wherein y is substantially equal to the value of x.
Claim 45
Dependent Claim
19 words
A photoconductive device as defined in claim 36 wherein the heterojunction region has a thickness of approximately 500 angstoms.
Claim 46
Dependent Claim
18 words
A photoconductive device as defined in claim 36 and further comprising a substrate which is comprised of GaAs.
Claim 47
Dependent Claim
52 words
A photoconductive device as defined in claim 41 and further comprising at least one lattice accommodation layer interposed between said substrate and said radiation absorbing region, said at least one lattice accommodation layer comprising GaInAs hving a composition which is lattice mismatched to both said substrate and to said radiation absorbing region.
Claim 48
Dependent Claim
30 words
A photoconductive devices as defined in claim 36 wherein said heterojunction region is compositionally graded from the composition of the radiation absorbing region to a different composition at the surface.
Claim 49
Dependent Claim
16 words
A photoconductive device as defined in claim 36 wherein said predetermined wavelength is approximately 1.3 microns.
Claim 50
Dependent Claim
16 words
A photoconductive device as defined in claim 36 wherein said predetermined wavelength is approximately 1.5 microns.
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