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Patent US4805296A successfully refreshed from Google Patents.
US4805296A
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Method of manufacturing platinum resistance thermometer
Assignee: Sharp Corp
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Filing: 1986-09-10
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Granted: 1989-02-21
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Expires: 2006-09-10
Abstract
Abstract A method of manufacturing a resistance thermometer which includes the steps of preparing a support substrate and forming a platinum film, which serves as a temperature measuring element, on the support substrate by a sputtering process employing a sputtering gas which contains a predetermined amount of oxygen gas, and a resistance thermometer produced by the method. The method which optionally includes forming an aluminum oxide film, the substrate and the platinum film.
Inventors
- 👤 Akihito Jinda
- 👤 Hisatoshi Furubayashi
- 👤 Masaya Hijikigawa
- 👤 Hiroki Tabuchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:56
CPC Classifications
G; G01; G01K; G01K7/00; G01K7/16; G01K7/18; G01K7/183; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/688; G01F1/69; G01F1/692; G01F1/696; G01F1/6965; H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12; H01C17/22; H01C17/23; H01C7/00; H01C7/02; H01C7/021; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49082; Y10T29/49099
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
57 words
A method of manufacturing a resistance thermometer which comprises the steps of forming an aluminum oxide film on a silicone substrate, subjecting the formed aluminum oxide film to heat-treatment at a temperature in the range of from 500° to 1,700° C., and thereafter, forming a platinum film on the surface of the formed heat-treated aluminum oxide film.
Claim 2
Independent Claim
57 words
A method of manufacturing a resistance thermometer which comprises the steps of forming an aluminum oxide film on a silicone substrate, subjecting the formed aluminum oxide film to heat-treatment at a temperature in the range of from 500° to 1,700° C., and thereafter, forming a platinum film on the surface of the formed heat-treated aluminum oxide film.
Claim 3
Dependent Claim
27 words
The method of claim 1, wherein the formed platinum film is thereafter subjected to heat-treatment at a temperature in the range of from 500° to 1,500° C.
Claim 4
Dependent Claim
29 words
The method of claim 2, wherein the heat-treatment temperature of the formed aluminum oxide film is equal to or higher than the heat-treatment temperature of the formed platinum film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-02-21 | 1992-08-22 | 1993-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-02-21 | 1996-08-22 | 1997-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-02-21 | 2000-08-22 | 2001-02-21 | $7700.00 | Window Closed / Lapsed |