US4803110A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coated mask for photolithographic construction of electric circuits
Assignee: International Business Machines Corp
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Filing: 1986-09-15
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Granted: 1989-02-07
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Expires: 2006-09-15
Abstract
Abstract A mask for deposition of electrically-conductive paste material on a ceramic base, in the construction of electric circuits having multiple electronic chips is formed of molybdenum with a titanium nitride coating. The coating passes through apertures of a mesh on one side of the mask and continues through the apertures to appear in cutouts of stencils along the opposite side of the mask. Other elements of the fourth group of the periodic table, such as zirconium, may be employed in lieu of the titanium in the formation of the coating. The coating is uniformly applied by a sputtering procedure in which nitrogen is sprayed uniformly along the mask and away from a titanium target. In an argon plasma, the nitrogen and the titanium are sputtered onto the molybdenum where the titanium and nitrogen combine to form the coating.
Inventors
- 👤 Kie Y. Ahn
- 👤 Saryadevara Basavaiah
- 👤 Stephen B. Brodsky
- 👤 Charles A. Cortellino
- 👤 Joseph E. Levine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 01:48
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/12; H05K3/1216; H05K3/1225; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/098; H10W70/60; H10W70/62; H10W70/63; H10W90/00; H10W90/701; H10W90/721; H10W90/724; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24273; Y10T428/24298; Y10T428/24322; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
157 words
A mask for deposition of paste material in a predetermined format comprising: a metallic substrate in the form of a thin foil having a thickness in the range of 0.001-0.006 inch; a mesh formed in said metallic substrate and extending inwardly from a first exterior surface of the substrate; a stencil formed in said metallic substrate and extending inwardly from a second exterior surface of said substrate opposite said first exterior surface, there being perforations in said mesh and in said stencil, perforations in said stencil communicating with predetermined ones of the perforations in said mesh for passage of paste material therethrough; and a coating of a compound of nitrogen and an element of the fourth group of elements of the periodic table, said coating having a thickness of 2000-6000 angstroms; said coating being uniformly deposited on said substrate to provide lubricity and resistance to abrasion of said paste material within said mesh and within said stencil.
Claim 2
Dependent Claim
157 words
A mask for deposition of paste material in a predetermined format comprising: a metallic substrate in the form of a thin foil having a thickness in the range of 0.001-0.006 inch; a mesh formed in said metallic substrate and extending inwardly from a first exterior surface of the substrate; a stencil formed in said metallic substrate and extending inwardly from a second exterior surface of said substrate opposite said first exterior surface, there being perforations in said mesh and in said stencil, perforations in said stencil communicating with predetermined ones of the perforations in said mesh for passage of paste material therethrough; and a coating of a compound of nitrogen and an element of the fourth group of elements of the periodic table, said coating having a thickness of 2000-6000 angstroms; said coating being uniformly deposited on said substrate to provide lubricity and resistance to abrasion of said paste material within said mesh and within said stencil.
Claim 3
Dependent Claim
166 words
A mask for deposition of paste material in a predetermined format comprising: a metallic substrate in the form of a thin foil having a thickness in the range of 0.001-0.006 inch; a mesh formed in said metallic substrate and extending inwardly from a first exterior surface of the substrate; a stencil formed in said metallic substrate and extending inwardly from a second exterior surface of said substrate opposite said first exterior surface, there being perforations in said mesh and in said stencil, perforations in said stencil communicating with predetermined ones of the perforations in said mesh for passage of paste material therethrough; and a coating of a compound of nitrogen and an element of the fourth group of elements of the periodic table; said coating being uniformly deposited on said substrate to provide lubricity and resistance to abrasion of said paste material within said mesh and within said stencil; and wherein said substrate is formed of molybdenum, and said coating has a depth of 2000-6000 angstroms.
Claim 4
Dependent Claim
166 words
A mask for deposition of paste material in a predetermined format comprising: a metallic substrate in the form of a thin foil having a thickness in the range of 0.001-0.006 inch; a mesh formed in said metallic substrate and extending inwardly from a first exterior surface of the substrate; a stencil formed in said metallic substrate and extending inwardly from a second exterior surface of said substrate opposite said first exterior surface, there being perforations in said mesh and in said stencil, perforations in said stencil communicating with predetermined ones of the perforations in said mesh for passage of paste material therethrough; and a coating of a compound of nitrogen and an element of the fourth group of elements of the periodic table; said coating being uniformly deposited on said substrate to provide lubricity and resistance to abrasion of said paste material within said mesh and within said stencil; and wherein said substrate is formed of molybdenum, and said coating has a depth of 2000-6000 angstroms.
Claim 5
Dependent Claim
184 words
A mask for deposition of paste material in a predetermined format comprising: a metallic substrate in the form of a thin foil having a thickness in the range of 0.001-0.006 inch; a mesh formed in said metallic substrate and extending inwardly from a first exterior surface of the substrate; a stencil formed in said metallic substrate and extending inwardly from a second exterior surface of said substrate opposite said first exterior surface, there being perforations in said mesh and in said stencil, perforations in said stencil communicating with predetermined ones of the perforations in said mesh for passage of paste material therethrough; and a coating of a compound of nitrogen and an element of the fourth group of elements of the periodic table, said coating having a thickness of 2000-6000 angstroms, said coating being uniformly deposited on said substrate to provide lubricity and resistance to abrasion of said paste material within said mesh and within said stencil; and wherein said compound is formed of nitrogen and at least one element of the fourth group of the periodic table consisting of titanium, zirconium, and silicon.
Claim 6
Dependent Claim
184 words
A mask for deposition of paste material in a predetermined format comprising: a metallic substrate in the form of a thin foil having a thickness in the range of 0.001-0.006 inch; a mesh formed in said metallic substrate and extending inwardly from a first exterior surface of the substrate; a stencil formed in said metallic substrate and extending inwardly from a second exterior surface of said substrate opposite said first exterior surface, there being perforations in said mesh and in said stencil, perforations in said stencil communicating with predetermined ones of the perforations in said mesh for passage of paste material therethrough; and a coating of a compound of nitrogen and an element of the fourth group of elements of the periodic table, said coating having a thickness of 2000-6000 angstroms, said coating being uniformly deposited on said substrate to provide lubricity and resistance to abrasion of said paste material within said mesh and within said stencil; and wherein said compound is formed of nitrogen and at least one element of the fourth group of the periodic table consisting of titanium, zirconium, and silicon.
Claim 7
Dependent Claim
15 words
A mask according to claim 3 wherein said coating is formed of nitrogen and titanium.
Claim 8
Dependent Claim
15 words
A mask according to claim 3 wherein said coating is formed of nitrogen and zirconium.
Claim 9
Dependent Claim
15 words
A mask according to claim 3 wherein said coating is formed of nitrogen and silicon.
Claim 10
Dependent Claim
163 words
A mask for deposition of electrically-conductive paste material on a base in the construction of an electric circuit, the mask being in the form of a thin foil having a thickness in the range of 0.001-0.006 inch and having apertures extending therethrough from a first surface to a second surface of the mask to define the shapes of regions of the paste material to be deposited on the base, said apertures defining a mesh opening toward a first exterior surface of the mask and a stencil opening towards a second exterior surface of the mask opposite said first exterior surface, the mask further comprising: a coating of a compound of nitrogen and an element of the fourth group of elements in the periodic table, said coating having a thickness of 2000-6000 angstroms and being uniformly deposited within said apertures and on said first surface and on said second surface to provide lubricity and resistance to abrasion of said paste material upon said mask.
Claim 11
Dependent Claim
163 words
A mask for deposition of electrically-conductive paste material on a base in the construction of an electric circuit, the mask being in the form of a thin foil having a thickness in the range of 0.001-0.006 inch and having apertures extending therethrough from a first surface to a second surface of the mask to define the shapes of regions of the paste material to be deposited on the base, said apertures defining a mesh opening toward a first exterior surface of the mask and a stencil opening towards a second exterior surface of the mask opposite said first exterior surface, the mask further comprising: a coating of a compound of nitrogen and an element of the fourth group of elements in the periodic table, said coating having a thickness of 2000-6000 angstroms and being uniformly deposited within said apertures and on said first surface and on said second surface to provide lubricity and resistance to abrasion of said paste material upon said mask.
Claim 12
Dependent Claim
159 words
A mask for deposition of electrically-conductive paste material on a base in the construction of an electric circuit, the mask being in the form of a thin foil having a thickness in the range of 0.001-0.006 inch and having apertures extending therethrough from a first surface to a second surface of the mask to define the shapes of regions of the paste material to be deposited on the base, the mask further comprising: a coating of a compound of nitrogen and an element of the fourth group of elements in the periodic table, said coating having a thickness of 2000-6000 angstroms and being uniformly deposited within said apertures and on said first surface and on said second surface to provide lubricity and resistance to abrasion of said paste material upon said mask; and wherein said compound is formed of nitrogen and one of the elements of the fourth group of the periodic table consisting of titanium, zirconium and silicon.
Claim 13
Dependent Claim
159 words
A mask for deposition of electrically-conductive paste material on a base in the construction of an electric circuit, the mask being in the form of a thin foil having a thickness in the range of 0.001-0.006 inch and having apertures extending therethrough from a first surface to a second surface of the mask to define the shapes of regions of the paste material to be deposited on the base, the mask further comprising: a coating of a compound of nitrogen and an element of the fourth group of elements in the periodic table, said coating having a thickness of 2000-6000 angstroms and being uniformly deposited within said apertures and on said first surface and on said second surface to provide lubricity and resistance to abrasion of said paste material upon said mask; and wherein said compound is formed of nitrogen and one of the elements of the fourth group of the periodic table consisting of titanium, zirconium and silicon.
Claim 14
Dependent Claim
18 words
A mask according to claim 8 wherein said coating is formed of a compound of nitrogen and titanium.
Claim 15
Independent Claim
208 words
A method of coating a mask used in the construction of modular electric circuits by imprinting conductive paths on a base material, the method comprising the steps of: constructing a mask substrate of a dimensionally stable material, the mask substrate being in the form of a thin foil having a thickness in the range of 0.001-0.006 inch and having apertures extending inwardly from a first surface to define a screen pattern and extending inwardly from a second surface to define a stencil pattern; placing said mask substrate in front of and away from a source of a group IV element of the periodic table; sputtering the group IV element of the periodic table onto the mask substrate; simultaneously discharging nitrogen into a region of space permeated by the said sputtered element to provide a coating of nitrogen and said sputtered element upon the dimensionally stable material of said substrate; directing the nitrogen away from said source, thereby to prevent contamination of the source and to preserve a uniform distribution of sputtering of the group IV element upon said mask substrate; and terminating said sputtering upon attainment of a depth of said coating in the range of 2000-6000 angstroms, thereby providing a mask surface which is resistant to abrasion.
Claim 16
Independent Claim
208 words
A method of coating a mask used in the construction of modular electric circuits by imprinting conductive paths on a base material, the method comprising the steps of: constructing a mask substrate of a dimensionally stable material, the mask substrate being in the form of a thin foil having a thickness in the range of 0.001-0.006 inch and having apertures extending inwardly from a first surface to define a screen pattern and extending inwardly from a second surface to define a stencil pattern; placing said mask substrate in front of and away from a source of a group IV element of the periodic table; sputtering the group IV element of the periodic table onto the mask substrate; simultaneously discharging nitrogen into a region of space permeated by the said sputtered element to provide a coating of nitrogen and said sputtered element upon the dimensionally stable material of said substrate; directing the nitrogen away from said source, thereby to prevent contamination of the source and to preserve a uniform distribution of sputtering of the group IV element upon said mask substrate; and terminating said sputtering upon attainment of a depth of said coating in the range of 2000-6000 angstroms, thereby providing a mask surface which is resistant to abrasion.
Claim 17
Independent Claim
239 words
A method of coating a mask used in the construction of modular electric circuits by imprinting conductive paths on a base material, the method comprising the steps of: constructing a mask substrate of a dimensionally stable material, the mask substrate being in the form of a thin foil having a thickness in the range of 0.001-0.006 inch and having apertures extending inwardly from a first surface to define a screen pattern and extending inwardly from a second surface to define a stencil pattern; placing said mask substrate in front of and away from a source of a group IV element of the periodic table; sputtering the group IV element of the periodic table onto the mask substrate; simultaneously discharging nitrogen into a region of space permeated by the said sputtered element to provide a coating of nitrogen and said sputtered element upon the dimensionally stable material of said substrate; directing the nitrogen away from said source, thereby to prevent contamination of the source and to preserve a uniform distribution of sputtering of the group IV element upon said mask substrate; and terminating said sputtering upon attainment of a depth of said coating in the range of 2000-6000 angstroms, thereby providing a mask surface which is resistant to abrasion, and wherein the substrate of said mask is fabricated of molybdenum, and said sputtered element is an element of the fourth group of the periodic table consisting of titanium and zirconium.
Claim 18
Independent Claim
239 words
A method of coating a mask used in the construction of modular electric circuits by imprinting conductive paths on a base material, the method comprising the steps of: constructing a mask substrate of a dimensionally stable material, the mask substrate being in the form of a thin foil having a thickness in the range of 0.001-0.006 inch and having apertures extending inwardly from a first surface to define a screen pattern and extending inwardly from a second surface to define a stencil pattern; placing said mask substrate in front of and away from a source of a group IV element of the periodic table; sputtering the group IV element of the periodic table onto the mask substrate; simultaneously discharging nitrogen into a region of space permeated by the said sputtered element to provide a coating of nitrogen and said sputtered element upon the dimensionally stable material of said substrate; directing the nitrogen away from said source, thereby to prevent contamination of the source and to preserve a uniform distribution of sputtering of the group IV element upon said mask substrate; and terminating said sputtering upon attainment of a depth of said coating in the range of 2000-6000 angstroms, thereby providing a mask surface which is resistant to abrasion, and wherein the substrate of said mask is fabricated of molybdenum, and said sputtered element is an element of the fourth group of the periodic table consisting of titanium and zirconium.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-02-07 | 1992-08-08 | 1993-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-02-07 | 1996-08-08 | 1997-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-02-07 | 2000-08-08 | 2001-02-07 | $7700.00 | Window Closed / Lapsed |