US4797178A
Expired / Lapsed
US
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Plasma etch enhancement with large mass inert gas
Assignee: International Business Machines Corp
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Filing: 1987-05-13
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Granted: 1989-01-10
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Expires: 2007-05-13
Abstract
Abstract The present invention provides a process for plasma cleaning and an improved gas mixture for use in a plasma cleaning process. The gas mixture of the present invention includes the normal process gases such as oxygen and carbon tetrafluoride. However, the mixture also includes a small percentage of a large mass inert gas such as Argon or Krypton. This large mass gas molecule mechanically removes any polymerized fluorocarbon that forms on the surface being cleaned thereby significantly enhancing the rate of etch or cleaning. It has been found that five to twenty percent of the inert gas is the preferred range and that ten percent produces optimum results.
Inventors
- 👤 Vu Q. Bui
- 👤 Kevin K. Chan
- 👤 Joseph G. Hoffarth
- 👤 Vicki J. Malueg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:33
CPC Classifications
C; C23; C23G; C23G5/00; B; B08; B08B; B08B7/00; B08B7/0035; H; H05; H05K; H05K3/00; H05K3/0011; H05K3/0055; H05K2203/00; H05K2203/09; H05K2203/095
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
56 words
A gas mixture for plasma cleaning comprising a process gas including carbon tetrafluoride and oxygen in the ratio of about 60/40, a large mass inert gas in the amount of about five to twenty percent by volume, whereby the action of said process gas is not inhibited by any polymerized fluorocarbons that form on said surface.
Claim 2
Dependent Claim
56 words
A gas mixture for plasma cleaning comprising a process gas including carbon tetrafluoride and oxygen in the ratio of about 60/40, a large mass inert gas in the amount of about five to twenty percent by volume, whereby the action of said process gas is not inhibited by any polymerized fluorocarbons that form on said surface.
Claim 3
Dependent Claim
20 words
The gas recited in claim 1 wherein said large mass inert gas comprises the class that includes Argon and Krypton.
Claim 4
Independent Claim
60 words
A method of plasma cleaning a surface comprising, subjecting said surface to a plasma process gas which includes carbon tetrafluoride and oxygen, whereby non-polymerized organics are removed and polymerized fluorocarbons are formed on said surface, simultaneously subjecting said surface to bombardment by a large mass inert gas, whereby said polymerized fluorocarbons are removed, thereby enhancing the action of process gas.
Claim 5
Independent Claim
60 words
A method of plasma cleaning a surface comprising, subjecting said surface to a plasma process gas which includes carbon tetrafluoride and oxygen, whereby non-polymerized organics are removed and polymerized fluorocarbons are formed on said surface, simultaneously subjecting said surface to bombardment by a large mass inert gas, whereby said polymerized fluorocarbons are removed, thereby enhancing the action of process gas.
Claim 6
Dependent Claim
20 words
The method recited in claim 3 wherein said large mass inert gas comprises the class that includes Argon and Krypton.
Claim 7
Independent Claim
65 words
The method of plasma cleaning a surface comprising, subjecting said surface to a plasma process gas which removes non polymerized organics from said surface, simultaneously subjecting said surface to bombardment by a large mass inert gas, in sufficient amount to remove polymerized fluorocarbons without carbonizing said surface, whereby the action of said process gas is enhanced by the action of said large mass inert gas.
Claim 8
Independent Claim
65 words
The method of plasma cleaning a surface comprising, subjecting said surface to a plasma process gas which removes non polymerized organics from said surface, simultaneously subjecting said surface to bombardment by a large mass inert gas, in sufficient amount to remove polymerized fluorocarbons without carbonizing said surface, whereby the action of said process gas is enhanced by the action of said large mass inert gas.
Claim 9
Dependent Claim
20 words
The method recited in claim 5 wherein said large mass inert gas comprises the class that includes Argon and Krypton.
Claim 10
Dependent Claim
15 words
The method recited in claim 5 wherein said process gas includes oxygen and carbon tetrafluoride.
Claim 11
Dependent Claim
14 words
The method recited in claim 5 wherein said surface includes a printed circuit board.
Claim 12
Dependent Claim
48 words
A gas mixture for plasma cleaning comprising a process gas including carbon tetrafluoride and oxygen, a large mass inert gas in the amount of about ten percent by volume, whereby the action of said process gas is not inhibited by any polymerized fluorocarbons that form on said surface.
Claim 13
Dependent Claim
48 words
A gas mixture for plasma cleaning comprising a process gas including carbon tetrafluoride and oxygen, a large mass inert gas in the amount of about ten percent by volume, whereby the action of said process gas is not inhibited by any polymerized fluorocarbons that form on said surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-10 | 1992-07-11 | 1993-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-10 | 1996-07-11 | 1997-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-10 | 2000-07-11 | 2001-01-10 | $7700.00 | Window Closed / Lapsed |