US4601782A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reactive ion etching process
Assignee: International Business Machines Corp
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Filing: 1985-06-20
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Granted: 1986-07-22
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Expires: 2005-06-20
Abstract
Abstract In a process for etching by reactive ion etching, a ceramic partially masked by an organic photoresist, an etch gas containing SF6, a noble gas and a small percentage of a carbon-containing gas is used.
Inventors
- 👤 Jacqueline K. Bianchi
- 👤 Robert A. Gdula
- 👤 Dennis J. Lange
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 04:12
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/53; C04B41/5338; C04B41/5346; C04B41/80; C04B41/91; H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
37 words
In a reactive ion process for etching a ceramic partially masked by a photoresist, the improvement characterized by using an etch gas comprising SF 6 , a noble gas and a small percent of a carbon-containing gas.
Claim 2
Dependent Claim
37 words
In a reactive ion process for etching a ceramic partially masked by a photoresist, the improvement characterized by using an etch gas comprising SF 6 , a noble gas and a small percent of a carbon-containing gas.
Claim 3
Dependent Claim
16 words
A process as claimed in claim 1 wherein the carbon-containing gas is present at about 10%.
Claim 4
Dependent Claim
15 words
A process as claimed in claim 1 wherein the carbon-containing gas is CHF 3 .
Claim 5
Dependent Claim
23 words
A process as claimed in claim 1 wherein the etch gas is 45% SF 6 , 45% He, and 10% CHF 3 .
References Cited (Backward Citations)
US4330384A
Cited
US4447290A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-07-21 | 1990-01-20 | 1990-07-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-07-21 | 1994-01-20 | 1994-07-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-07-21 | 1998-01-20 | 1998-07-22 | $7700.00 | Window Closed / Lapsed |