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Method of metallizing ceramic material

Assignee: Murata Manufacturing Co Ltd
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Filing: 1987-02-25
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Granted: 1989-01-03
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Expires: 2007-02-25
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Abstract

Abstract A method of metallizing a ceramic material by forming a metal thin film through electroless plating, chemically etching the metal thin film after heat treatment and metallizing the surface of the ceramic material through electroless plating after the etching.

Inventors

  • 👤 Osamu Kano
  • 👤 Atsuo Senda

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 06:25
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/51; C04B41/80; C04B41/81; C04B41/85; C04B41/88; H; H05; H05K; H05K3/00; H05K3/38; H05K3/381

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 70 words
A method of metallizing a ceramic material comprising: (a) forming a metal thin film on the surface of said ceramic material by electroless plating; (b) performing heat treatment in a temperature range of substantially 900° to 1200° C. on said ceramic surface having said metal thin film formed thereon; (c) chemically etching to remove said metal thin film; and (d) metallizing said ceramic surface by electroless plating after said etching.
Claim 2
Independent Claim 70 words
A method of metallizing a ceramic material comprising: (a) forming a metal thin film on the surface of said ceramic material by electroless plating; (b) performing heat treatment in a temperature range of substantially 900° to 1200° C. on said ceramic surface having said metal thin film formed thereon; (c) chemically etching to remove said metal thin film; and (d) metallizing said ceramic surface by electroless plating after said etching.
Claim 3
Dependent Claim 29 words
A method of metallizing a ceramic material in accordance with claim 1, wherein said metal thin film formed by said electroless plating is 0.05 to 0.5 μm in thickness.
Claim 4
Dependent Claim 32 words
A method of metallizing a ceramic material in accordance with claim 1, wherein said ceramic material is prepared from ZrO 2 -TiO 2 -SnO 2 ceramics or Al 2 O 3 .
Claim 5
Dependent Claim 26 words
A method of metallizing a ceramic material in accordance with claim 1, wherein said metal thin film comprises copper and said heat treatment forms copper oxide.
Claim 6
Dependent Claim 45 words
A method of metallizing a ceramic material in accordance with claim 1, further comprising prior to step (a) the additional steps of: sensitizing the ceramic material surface with a solution of stannous chloride; and activating the ceramic material surface with a solution of palladium chloride.
Claim 7
Dependent Claim 26 words
A method of metallizing a ceramic material in accordance with claim 1, wherein said metallizing step (d) forms a copper film substantially 1-10 μm in thickness.
Claim 8
Dependent Claim 26 words
A method of metallizing a ceramic material in accordance with claim 2, wherein said metal thin film is chemically etched with an acid having low concentration.
Claim 9
Dependent Claim 25 words
A method of metallizing a ceramic material in accordance with claim 2, wherein said metal thin film is substantially 0.1 to 0.5 μm in thickness.
Claim 10
Dependent Claim 23 words
A method of metallizing a ceramic material in accordance with claim 8, wherein said metal thin film is substantially 0.3 μm in thickness.
Claim 11
Dependent Claim 25 words
A method of metallizing a ceramic material in accordance with claim 9, wherein said heat treatment is performed substantially at a temperature of 1000° C.
Claim 12
Dependent Claim 56 words
A method of metallizing a ceramic material in accordance with claim 7, wherein said metal thin film is chemically etched for less than substantially 10 minutes at a temperature lower than substantially 100° C. with an acid selected from the group consisting of dilute hydrochloric acid, dilute nitric acid, and an aqueous solution of hydrofluoric acid.

References Cited (Backward Citations)

US3212917A Cited
US3690921A Cited
US4066809A Cited
US4328048A Cited
US4402494A Cited
US4464422A Cited
US4448804A Cited
US4552787A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-01-03 1992-07-04 1993-01-03 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-01-03 1996-07-04 1997-01-03 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-01-03 2000-07-04 2001-01-03 $7700.00 Window Closed / Lapsed

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