US4464422A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for preventing oxidation of copper film on ceramic body
Assignee: Murata Manufacturing Co Ltd
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Filing: 1982-11-09
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Granted: 1984-08-07
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Expires: 2002-11-09
Abstract
Abstract A process for preventing the oxidation of a copper film formed on a ceramic body, which comprises the steps of forming a copper film on a ceramic body by a dry-plating process, treating the resultant copper film with a deactivating agent comprising at least one volatile hydrocarbon halide monomer by feeding the same into a vacuum chamber of a dry-plating apparatus.
Inventors
- 👤 Atsuo Senda
- 👤 Suehiro Kato
- 👤 Toru Kasanami
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:01
CPC Classifications
B; B23; B23K; B23K35/00; B23K35/22; B23K35/226
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
60 words
A process for preventing oxidation of a copper film which has been formed on a ceramic body by a dry-plating process, which comprises contacting said copper film with a deactivating agent comprising at least one volatile hydrocarbon halide monomer in an evacuated vacuum chamber of the dry-plating apparatus before exposing the copper film on the ceramic body to the atmosphere.
Claim 2
Dependent Claim
60 words
A process for preventing oxidation of a copper film which has been formed on a ceramic body by a dry-plating process, which comprises contacting said copper film with a deactivating agent comprising at least one volatile hydrocarbon halide monomer in an evacuated vacuum chamber of the dry-plating apparatus before exposing the copper film on the ceramic body to the atmosphere.
Claim 3
Dependent Claim
28 words
The process according to claim 1 wherein said copper film is contacted with the deactivating agent by feeding the deactivating agent in a gaseous form into said chamber.
Claim 4
Dependent Claim
24 words
The process according to claim 1 wherein said copper film is contacted with the deactivating agent by spraying the deactivating agent into the chamber.
Claim 5
Dependent Claim
39 words
The process according to claim 1 wherein the copper film is contacted with the deactivating agent by feeding the deactivating agent into the chamber simultaneously with the surrounding atmosphere that is supplied for increasing the pressure in the chamber.
Claim 6
Dependent Claim
37 words
The process according to claim 1 wherein the deactivating agent is at least one volatile hydrocarbon halide monomer selected from the group consisting of trichloroethylene, tetrachloroethylene, trichlorofluoromethane, dichlorodifluoromethane, chlorodifluoromethane, 1,1,2-trichloro-1,2,2-trifluoroethane, carbon tetrachloride, methylchloride, methylene chloride, and chlorobenzene.
Claim 7
Dependent Claim
70 words
A process for producing copper-plated ceramic products for electronic ceramic components comprising the steps of forming a copper film on a ceramic body in an evacuated vacuum chamber by a dry-plating process, containing the resultant copper-plated ceramic body with a deactivating agent consisting essentially of at least one volatile hydrocarbon halide monomer to allow the copper to lose its catalytic activity before exposing said copper-plated caramic body to the atmosphere.
Claim 8
Dependent Claim
70 words
A process for producing copper-plated ceramic products for electronic ceramic components comprising the steps of forming a copper film on a ceramic body in an evacuated vacuum chamber by a dry-plating process, containing the resultant copper-plated ceramic body with a deactivating agent consisting essentially of at least one volatile hydrocarbon halide monomer to allow the copper to lose its catalytic activity before exposing said copper-plated caramic body to the atmosphere.
Claim 9
Dependent Claim
18 words
The process according to claim 6 wherein said copper film is formed by the vapor deposition of copper.
Claim 10
Dependent Claim
17 words
The process according to claim 6 wherein said copper film is formed by the sputtering of copper.
Claim 11
Dependent Claim
14 words
The process according to claim 6 wherein said copper film is formed by ion-plating.
Claim 12
Dependent Claim
27 words
The process according to claim 6 wherein said copper-plated ceramic body is contacted with the deactivating agent by introducing said agent in gaseous form into said chamber.
Claim 13
Dependent Claim
25 words
The process according to claim 6 wherein said copper-plated ceramic body is contacted with the deactivating agent by spraying the deactivating agent into said chamber.
Claim 14
Dependent Claim
36 words
The process according to claim 6 wherein the deactivating agent is at least one volatile hydrocarbon halide monomer selected from the group consisting of trichloroethylene, tetrachloroethylene, trichlorofluoromethane, dichlorodifluoromethane, chlorodifluoromethane, 1,1,2-trichloro-1,2,2-trifluoroethane, carbon tetrachloride, methylchloride, methylenechloride, and chlorobenzene.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-07 | 1988-02-06 | 1988-08-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-07 | 1992-02-06 | 1992-08-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-07 | 1996-02-06 | 1996-08-07 | $7700.00 | Window Closed / Lapsed |