US4792516A
Expired / Lapsed
US
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Photosensitive composition
Assignee: Resonac Corp
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Filing: 1987-01-05
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Granted: 1988-12-20
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Expires: 2007-01-05
Abstract
Abstract A photosensitive composition comprising (a) a photosensitive component such as an aromatic diazo compound or an aromatic azide, (b) a polymer and (c) a quaternary alkylammonium salt wherein each straight- or branched-chain alkyl group has 1 to 7 carbon atoms is suitable for producing a positive type or negative type photresist excellent in contrast and sensitivity in the microlithography of semiconductor elements.
Inventors
- 👤 Minoru Toriumi
- 👤 Hiroshi Shiraishi
- 👤 Ryotaro Irie
- 👤 Shigeru Koibuchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:34
CPC Classifications
G; G03; G03C; G03C1/00; G03F; G03F7/00; G03F7/004; G03F7/016; G03F7/0166; G03F7/008; G03F7/0085; G03F7/04
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
145 words
A photosensitive composition comprising an admixture containing (a) an aromatic azide compound represented by the formula: ##STR9## wherein Z and Y are independently an aromatic substituent or a heterocyclic substituent, at least one of said aromatic substituents or heterocyclic substituents having a photosensitive azido group; and n and m are independently 0 or 1, (b) an alkali-soluble polymer and (c) an alkylammonium compound represented by the formula: ##STR10## wherein R 1 , R 2 , R 3 and R 4 are independently a straight- or branched-chain alkyl group having 1 to 7 carbon atoms or at least one hydrogen atom of said alkyl group being substituted by an alkoxy group having 1 to 5 carbon atoms; and X is a chlorine, bromine or iodine atom or a hydroxyl group; (a), (b) and (c) being present in amounts sufficient to provide a negative type photoresist film.
Claim 2
Dependent Claim
145 words
A photosensitive composition comprising an admixture containing (a) an aromatic azide compound represented by the formula: ##STR9## wherein Z and Y are independently an aromatic substituent or a heterocyclic substituent, at least one of said aromatic substituents or heterocyclic substituents having a photosensitive azido group; and n and m are independently 0 or 1, (b) an alkali-soluble polymer and (c) an alkylammonium compound represented by the formula: ##STR10## wherein R 1 , R 2 , R 3 and R 4 are independently a straight- or branched-chain alkyl group having 1 to 7 carbon atoms or at least one hydrogen atom of said alkyl group being substituted by an alkoxy group having 1 to 5 carbon atoms; and X is a chlorine, bromine or iodine atom or a hydroxyl group; (a), (b) and (c) being present in amounts sufficient to provide a negative type photoresist film.
Claim 3
Dependent Claim
42 words
A photosensitive composition according to claim 1, wherein R 1 , R 2 , R 3 and R 4 of the alkylammonium compound represented by the formula (1) are independently a straight- or branched-chain alkyl group having 1 to 7 carbon atoms.
Claim 4
Dependent Claim
22 words
A photosensitive composition according to claim 1, wherein X of the alkylammonium compound represented by the formula (1) is a chlorine atom.
Claim 5
Dependent Claim
40 words
A photosensitve composition according to claim 4, wherein R 1 , R 2 , R 3 and R 4 of the alkylammonium compound represented by the formula (1) are independently a straight- or branched-chain alkyl group having 5 carbon atoms.
Claim 6
Dependent Claim
39 words
A photosensitive composition according to claim 1, wherein the content of the alkylammonium compound represented by the formula (1) is in the range of from 0.1 to 10% by weight based on total solids content of the photosensitive composition.
Claim 7
Dependent Claim
33 words
A photosensitive composition according to claim 5, wherein the aromatic azide compound content is in the range of from 5 to 30% by weight based on total solids content of the photosensitive composition.
Claim 8
Dependent Claim
52 words
A photosensitive composition according to claim 1, wherein the alkali-soluble polymer is an alkali-soluble polymer having phenolic hydroxy groups, and is at least one member selected from the group consisting of cresol novolac resins, hydroxystyrene polymers and copolymers thereof, partially modified products of these polymers, and condensation products of phenols with formaldehyde.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-12-20 | 1992-06-20 | 1992-12-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-12-20 | 1996-06-20 | 1996-12-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-12-20 | 2000-06-20 | 2000-12-20 | $7700.00 | Window Closed / Lapsed |