Abstract A conductivity modulated MOSFET, having a semiconductor substrate of a first conductivity type, a semiconductor layer of a second conductivity type formed on the semiconductor substrate and having a high resistance, a base layer of the first conductivity type formed in the semiconductor layer, a source layer of the second conductivity type formed in the base layer, a gate electrode formed on a gate insulating film which is formed on a channel region, the channel region being formed in a surface of the base layer between the semiconductor layer and the source layer, a source electrode ohmic-contacting the source layer and the base layer, and a drain electrode formed on the surface of the semiconductor substrate opposite to the semiconductor layer, characterized in that the conductivity modulated MOSFET has a saturation current smaller than a latch-up current when a predetermined gate voltage is applied to the gate electrode.
A lateral conductivity modulated metal oxide semiconductor field effect transistor, comprising: a semiconductor substrate; a high resistance semiconductor layer of a first conductivity type formed over said semiconductor substrate and having a high resistance; a semiconductor region of the first conductivity type formed in a surface of said high resistance semiconductor layer and having an impurity concentration higher than that of said high resistance semiconductor layer; a drain region of a second conductivity type formed and located in said semiconductor region; a base region of the second conductivity type formed in said surface of said high resistance semiconductor layer, said base region surrounding a window of said high resistance semiconductor layer which is in said surface; a source region of the first conductivity type formed in said base region; a gate insulating film formed on a channel region which is formed in a surface of said base region between said high resistance semiconductor layer and said source region; a gate electrode formed on said gate insulating film; a source electrode ohmicly contacting said source region and said base region; and a drain electrode ohmicly contacting said drain region, whereby said lateral conductivity modulated metal oxide semiconductor field effect transistor can be operated in a condition that a latch up current is larger than a saturation current.
Claim 2
Dependent Claim
216 words
A lateral conductivity modulated metal oxide semiconductor field effect transistor, comprising: a semiconductor substrate; a high resistance semiconductor layer of a first conductivity type formed over said semiconductor substrate and having a high resistance; a semiconductor region of the first conductivity type formed in a surface of said high resistance semiconductor layer and having an impurity concentration higher than that of said high resistance semiconductor layer; a drain region of a second conductivity type formed and located in said semiconductor region; a base region of the second conductivity type formed in said surface of said high resistance semiconductor layer, said base region surrounding a window of said high resistance semiconductor layer which is in said surface; a source region of the first conductivity type formed in said base region; a gate insulating film formed on a channel region which is formed in a surface of said base region between said high resistance semiconductor layer and said source region; a gate electrode formed on said gate insulating film; a source electrode ohmicly contacting said source region and said base region; and a drain electrode ohmicly contacting said drain region, whereby said lateral conductivity modulated metal oxide semiconductor field effect transistor can be operated in a condition that a latch up current is larger than a saturation current.
Claim 3
Dependent Claim
16 words
The transistor according to claim 1, wherein said semiconductor substrate is of the first conductivity type.
Claim 4
Dependent Claim
16 words
The transistor according to claim 1, wherein said semiconductor substrate is of the second conductivity type.
Claim 5
Dependent Claim
17 words
The transistor according to claim 1, wherein said window is constructed by at least two parallel sides.