US4777090A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coated article and method of manufacturing the article
Assignee: Ovonic Synthetic Materials Co Inc
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Filing: 1986-11-03
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Granted: 1988-10-11
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Expires: 2006-11-03
Abstract
Abstract Disclosed is a coated article having a substrate with an adherent, abrasion resistant carbon coating. In a preferred examplification the coating is substantially transparent to visible light and partially absorbing to ultraviolet light. The coating has a relatively disordered portion at the substrate-coating interface and a relatively ordered portion remote from the substrate-coating interface. The coating is a microwave deposited coating with deposition initially at a low microwave energy, and thereafter at a high microwave energy.
Inventors
- 👤 Stanford R. Ovshinsky
- 👤 Russell C. Custer
- 👤 Arnold Register
- 👤 James D. Flasck
- 👤 Daniel P. Durisin
- 👤 Kenneth Havener
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 02:38
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/02; C23C16/0272; C23C16/029; C23C16/22; C23C16/26; C23C16/44; C23C16/50; C23C16/511; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/02; C30B29/04; G02B1/105; G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/111; G02B1/14; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/30; Y10T428/31504; Y10T428/31507; Y10T428/31551; Y10T428/31678; Y10T428/31855
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
80 words
A coated article comprising: (a) a substrate chosen from the group consisting of soft metals, semiconductors and organic polymers; and (b) an adherent, abrasion resistant coating thereon substantially amorphous and consisting essentially of carbon at the substrate-coating interface, graded in composition remote from the substrate-coating interface, and consisting essentially of one or more of C, or silicon dioxide, and mixtures thereof, where the compositionally graded material remote from the substrate-coating interface comprises SiOx where x is from 1.60 to 2.00.
Claim 2
Dependent Claim
80 words
A coated article comprising: (a) a substrate chosen from the group consisting of soft metals, semiconductors and organic polymers; and (b) an adherent, abrasion resistant coating thereon substantially amorphous and consisting essentially of carbon at the substrate-coating interface, graded in composition remote from the substrate-coating interface, and consisting essentially of one or more of C, or silicon dioxide, and mixtures thereof, where the compositionally graded material remote from the substrate-coating interface comprises SiOx where x is from 1.60 to 2.00.
Claim 3
Dependent Claim
30 words
The coated article of claim 1 wherein the coating has a a thickness of 2 to 5 microns and a transmissivity of 89 percent at wavelengths in the visible spectrum.
Claim 4
Dependent Claim
14 words
The coated article of claim 1 wherein the coated article has a polymeric substrate.
Claim 5
Dependent Claim
24 words
The coated article of claim 7 wherein the substrate is a polymer chosen from the group consisting of polyacrylates, polycarbonates, poly(allyl carbonates), and polyurethanes.
Claim 6
Dependent Claim
17 words
The coated article of claim 1 wherein the coated article has a metallic substrate or semiconductor substrate.
Claim 7
Dependent Claim
15 words
The coated article of claim 5 wherein the metallic substrate is a soft metallic substrate.
Claim 8
Dependent Claim
13 words
The coated article of claim 5 wherein the semiconductor substrate comprising amorphous silicon.
Claim 9
Dependent Claim
132 words
The coated article of claim 1 wherein the coating is prepared by the method comprising: (a) providing a substrate to be coated in a vacuum chamber; (b) providing a deposition gas comprising an inert gas and an active gas chosen from the group consisting of hydrocarbons and silanes; (c) maintaining the deposition gas at a pressure of less than 10 -6 atmospheres; (d) forming and maintaining a microwave plasma in contact with the substrate at an initial relatively high microwave power to decompose the gas and deposit a disordered coating a the substrate; and (e) thereafter maintaining the microwave plasma in contact with the substrate at a relatively higher power and a graded gas pressure and increasing the silane content of the gas to build up the graded portion of the coating.
Claim 10
Dependent Claim
38 words
The coated article of claim 1 wherein the coating thereon is matched in stress influencing parameters at an interface with the substrate, mix-matched in stress influencing parameters remote from the substrate, and graded in stress influencing parameters therebetween.
Claim 11
Dependent Claim
47 words
The coated article of claim 9 wherein the coating is matched to the substrate of the interface therewith in one or more stress influencing parameters chosen from the group consisting of modulus of elasticity, coefficient of thermal expansion, lattice parameters, extent of crystallinity, or degree of crystallinity.
Claim 12
Dependent Claim
53 words
The coated article of claim 9 wherein the coating is graded with respect to one or more stress influencing parameters chosen from the group consisting of composition, modulus of elasticity, coefficient of thermal expansion, lattice parameters, extent of crystallization, or degree of composition over a depth of several atomic diameters to 10 microns.
Claim 13
Dependent Claim
15 words
The coated article of claim 9 wherein the substrate is an amorphous silicon alloy semiconductor.
Claim 14
Dependent Claim
14 words
The coated article of claim 9 wherein the substrate is a transparent conductive oxide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-11 | 1992-04-11 | 1992-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-11 | 1996-04-11 | 1996-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-11 | 2000-04-11 | 2000-10-11 | $7700.00 | Window Closed / Lapsed |