EP0175980A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Glow discharge method of applying a carbon coating onto a substrate and coating applied thereby
Assignee: Ovonic Synthetic Materials Co Inc
•
Filing: 1985-09-05
•
Granted: —
•
Expires: 2005-09-05
Abstract
Abstract 57 Disclosed is a method of forming a hard, carbonaceous film on a substrate and the hard carbonaceous film formed thereby. The hard carbonaceous film is formed by decomposing a gaseous hydrocarbon having carbon atoms tetrahedrally coordinated to carbon nearest neighbors through carbon-carbon single bonds. The gaseous hydrocarbon is decomposed in a radio frequency maintained plasma and the plasma decomposition products are deposited on a cathodic substrate. Optionally, fluorocarbons may be present in a decomposition gas.
Inventors
- 👤 Stanford R. Ovshinsky
- 👤 James Flasck
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-25 20:24
CPC Classifications
H; H10; H10P; H10P95/00; C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/66; H10P14/668; H10P14/69; H10P14/6902
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
56 words
A method of depositing a hard, carbonaceous film on a solid substrate, said method characterized by depositing the film on the solid substrate by glow discharge decomposition of a reaction gas comprising at least a gaseous hydrocarbon compound having at least one carbon atom in tetrahedral coordination with nearest neighbor carbon atoms through carbon-carbon single bonds.
Claim 2
Independent Claim
56 words
A method of depositing a hard, carbonaceous film on a solid substrate, said method characterized by depositing the film on the solid substrate by glow discharge decomposition of a reaction gas comprising at least a gaseous hydrocarbon compound having at least one carbon atom in tetrahedral coordination with nearest neighbor carbon atoms through carbon-carbon single bonds.
Claim 3
Dependent Claim
17 words
The method of Claim 1, wherein the solid film comprises an amorphous material having long range disorder.
Claim 4
Dependent Claim
26 words
The method of Claim 2, wherein the localized order of the carbon atoms with respect to each other in the solid film includes tetrahedral, four-fold coordination.
Claim 5
Dependent Claim
15 words
The method of Claim 2, wherein the amorphous material is a wide band gap material.
Claim 6
Dependent Claim
23 words
The method of Claim 4, wherein the wide band gap material has an optical band gap of at least about 1.3 electron volts.
Claim 7
Dependent Claim
13 words
The method of Claim 1, wherein the gaseous hydrocarbon is an x,x-dialkyl hydrocarbon.
Claim 8
Dependent Claim
12 words
The method of Claim 6, wherein the x,x-dialkyl hydrocarbon is 2,2-dimethyl propane.
Claim 9
Dependent Claim
14 words
The method of Claim 2, wherein the reaction gas further includes a halogen compound.
Claim 10
Dependent Claim
13 words
The method of Claim 8, wherein the halogen compound is a fluorine compound.
Claim 11
Dependent Claim
20 words
The method of Claim 9, wherein the fluorine compound is chosen from the group consisting of fluorocarbons and fluorinated hydrocarbons.
Claim 12
Dependent Claim
15 words
The method of Claim 2, wherein the reaction gas mixture further comprises an inert gas.
Claim 13
Dependent Claim
31 words
The method of Claim 11 wherein the inert gas is argon, comprising maintaining the volume ratio of hydrocarbon to argon below about 1:1 whereby to obtain a relatively hard, carbonaceous film.
Claim 14
Dependent Claim
25 words
The method of Claim 2 comprising depositing the solid film on a polymeric substrate chosen from the group consisting of polycarbonates, polyacrylates, and poly(allyl carbonates).
Claim 15
Dependent Claim
14 words
The method of Claim 2 comprising depositing the solid film on a metallic substrate.
Claim 16
Dependent Claim
16 words
The method of Claim 1 comprising depositing the solid film on a moving, continuous web substrate.
Claim 17
Dependent Claim
18 words
The method of Claim 15 comprising depositing the solid film substantially continuously on the moving, continuous web substrate.
Claim 18
Dependent Claim
23 words
The method of Claim 16 comprising depositing the solid film substantially continuously on the moving web substrate in a multi-deposition chamber deposition means.
Claim 19
Dependent Claim
38 words
A semiconductor device having a semiconductor substrate body and a film thereon comprising an alloy of carbon and hydrogen, said film including carbon four-fold, tetrahedrally coordinated through carbon-carbon single bonds, and deposited by the method of Claim 1.
Claim 20
Dependent Claim
50 words
The method of Claim 1 comprising depositing the film atop the substrate by glow discharge decomposition of a reaction gas comprising at least (a) a gaseous hydrocarbon compound, and (b) a fluorine compound, wherein fluorine is incorporated into the solid during deposition thereof, whereby to yield a solid, tetrahedral-like film.
Claim 21
Dependent Claim
54 words
The method of Claim 1 comprising depositing the film atop the substrate by microwave glow discharge decomposition of a reaction gas comprising at least a gaseous hydrocarbon compound having at least one carbon aton. in tetrahedral coordination with nearest neighbor carbon atoms through carbon-carbon single bonds, whereby to yield a solid, tetrahedral like film.
Claim 22
Dependent Claim
37 words
A coated article prepared by the method of Claim 1 and comprising a substrate and a film thereon comprising a tetrahedral-like alloy of carbon and hydrogen, said film including carbon four-fold, tetrahedrally coordinated through carbon-carbon single bonds.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.