Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
239 words
A method for avoiding shorts between two normally separated layer electrodes in a layered electrical component constructed on a substrate, said substrate being transmissive for selected radiation, said method comprising the steps of: generating a first electode layer on said substrate, said first electrode layer being transmissive for said selective radiation; generating an intermediate non-electrode layer, which may have voids therein, over said first electrode layer, said intermediate layer being non-transmissive for said selected radiation; generating a photo-resist layer on said intermediate layer, said photo-resist layer filling any voids which may exist in said intermediate layer; exposing said photo-resist in said voids by irradiation with said selected radiation through said substrate and said first electrode layer such that the exposed photo-resist in said voids has a greater solubility than the unexposed remainder of said photo-resist layer; removing said photo-resist having a greater solubility in said voids, leaving said voids empty and leaving a remainder of said photo-resist layer covering said intermediate layer; filling said empty voids with insulating material using said remaining photo-resist layer as a mask; removing said remaining photo-resist layer leaving said intermediate layer uncovered and leaving said voids filled with said insulating material as plugs; and covering said intermediate layer including the plug-filled voids with a second electrode layer, whereby the material of said second electrode layer is prevented by said plugs from flowing through said voids to cause short circuits with said first electrode layer.
Claim 2
Independent Claim
239 words
A method for avoiding shorts between two normally separated layer electrodes in a layered electrical component constructed on a substrate, said substrate being transmissive for selected radiation, said method comprising the steps of: generating a first electode layer on said substrate, said first electrode layer being transmissive for said selective radiation; generating an intermediate non-electrode layer, which may have voids therein, over said first electrode layer, said intermediate layer being non-transmissive for said selected radiation; generating a photo-resist layer on said intermediate layer, said photo-resist layer filling any voids which may exist in said intermediate layer; exposing said photo-resist in said voids by irradiation with said selected radiation through said substrate and said first electrode layer such that the exposed photo-resist in said voids has a greater solubility than the unexposed remainder of said photo-resist layer; removing said photo-resist having a greater solubility in said voids, leaving said voids empty and leaving a remainder of said photo-resist layer covering said intermediate layer; filling said empty voids with insulating material using said remaining photo-resist layer as a mask; removing said remaining photo-resist layer leaving said intermediate layer uncovered and leaving said voids filled with said insulating material as plugs; and covering said intermediate layer including the plug-filled voids with a second electrode layer, whereby the material of said second electrode layer is prevented by said plugs from flowing through said voids to cause short circuits with said first electrode layer.
Claim 3
Dependent Claim
15 words
A method as claimed in claim 1, wherein said photo-resist layer is an insulating layer.
Claim 4
Dependent Claim
19 words
A method as claimed in claim 1, wherein said intermediate layer is an internally structured layer of amorphous silicon.
Claim 5
Dependent Claim
18 words
A method as claimed in claim 3, wherein said amorphous silicon is applied in a p-i-n layer structure.
Claim 6
Dependent Claim
18 words
A method as claimed in claim 3, wherein said amorphous silicon is applied in a n-i-p layer structure.
Claim 7
Dependent Claim
14 words
A method as claimed in claim 1, wherein said selected radiation is ultraviolet radiation.
Claim 8
Dependent Claim
24 words
A method as claimed in claim 1, wherein said ultraviolet radiation has a wavelength in the range from about 350 through about 400 nm.
Claim 9
Dependent Claim
12 words
A method as claimed in claim 1, wherein said substrate is glass.
Claim 10
Dependent Claim
16 words
A method as claimed in claim 1, wherein said first electrode layer is fluorine-doped tin oxide.
Claim 11
Dependent Claim
14 words
A method as claimed in claim 1, wherein said photo-resist layer is a Novolak/epoxy/photopolymer.
Claim 12
Dependent Claim
26 words
A method as claimed in claim 1, wherein said second electrode layer is comprised of material selected from the group consisting of silver, palladium, and nickel-chrome.