US4772130A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Quartz thermometer
Assignee: Yokogawa Electric Corp
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Filing: 1986-05-30
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Granted: 1988-09-20
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Expires: 2006-05-30
Abstract
Abstract A quartz thermometer adapted to measure the ambient temperature through detection of a change in the resonance frequency of a quartz resonator due to change in the temperature, wherein a quartz wafer of 0.02 to 0.2 mm thickness is cut from a region of a quartz within -30 DEG to -70 DEG in terms of rotation angle about the X axis of the quartz thereby to form a quart resonator within a range of between -15 DEG to +15 DEG in terms of angle of rotation about the Z' axis within the plane of the quartz wafer; and wherein thin metallic films are formed on the surfaces of the resonator to serve as exciting electrodes. The resonator and electrodes are produced by photolithography and anisotropic quartz etching processes. The resulting quartz thermometer has a large first order temperature coefficient of frequency.
Inventors
- 👤 Toshitsugu Ueda
- 👤 Fusao Kohsaka
- 👤 Toshio Iino
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 13:45
CPC Classifications
G; G01; G01K; G01K7/00; G01K7/32; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
140 words
A quartz thermometer comprising a quartz resonator comprising a tuning fork of a desired shape and adapted to measure the ambient temperature from a change in the resonance frequency of said quartz resonator, said quartz resonator being produced by the steps of rotating a Z-cut quartz plate about its X-axis by an angle ranging from -30 to -70 degrees so that said plate has new coordinate axes of X, Y' and Z'; and forming a quartz resonator of a thickness of 0.002 mm to 0.2 mm from a portion of said Z-cut plate falling in the range of from -15 to +15 degree with respect to the Z' axis; wherein said forming is by anisotropic etching of said quartz plate to produce the desired thickness and shape of said tuning fork by use of an aqueous solution comprising ammonium bifluoride.
Claim 2
Dependent Claim
140 words
A quartz thermometer comprising a quartz resonator comprising a tuning fork of a desired shape and adapted to measure the ambient temperature from a change in the resonance frequency of said quartz resonator, said quartz resonator being produced by the steps of rotating a Z-cut quartz plate about its X-axis by an angle ranging from -30 to -70 degrees so that said plate has new coordinate axes of X, Y' and Z'; and forming a quartz resonator of a thickness of 0.002 mm to 0.2 mm from a portion of said Z-cut plate falling in the range of from -15 to +15 degree with respect to the Z' axis; wherein said forming is by anisotropic etching of said quartz plate to produce the desired thickness and shape of said tuning fork by use of an aqueous solution comprising ammonium bifluoride.
Claim 3
Dependent Claim
12 words
The device of claim 1, wherein said resonator comprises a flexural resonator.
Claim 4
Dependent Claim
13 words
The device of claim 2, wherein said flexural resonator comprises a vibrating beam.
Claim 5
Dependent Claim
49 words
The device of claim 3, wherein said vibrating beam comprises a central portion between ends thereof and a neck portion having a width which is about 10 to 50% of the width of said beam, wherein said neck portion prevents transmission of strain produced in one of said ends.
Claim 6
Dependent Claim
44 words
The device of claim 2, wherein said flexural resonator comprises a rectangular plate formed in said quartz wafer by removing a portion of said quartz wafer such that said plate is supported at four points with two points being on sides opposing each other.
Claim 7
Dependent Claim
38 words
The device of claim 1, wherein said quartz resonator comprises a longitudinal resonator which is formed by cutting a portion of said quartz wafer such as to leave a rectangular plate which is supported on two opposing points.
Claim 8
Dependent Claim
32 words
The device of claim 1, wherein said quartz resonator is mounted in a container which is charged with an inert gas at a pressure within the range of 0.01 to 10 Torrs.
Claim 9
Dependent Claim
172 words
A quartz thermometer comprising a quartz resonator which changes its resonance frequency in response to change in ambient temperature so as to indicate ambient temperature; said quartz thermometer being produced by the steps comprising rotating a Z-cut quartz plate about its X-axis by an angle ranging from -30 to -70 degrees so that said plate has new coordinate axes of X, Y' and Z'; forming a quartz resonator of a thickness of 0.02 mm to 0.2 mm from a portion of said Z-cut plate falling in the range of from -15 to +15 degrees with respect to the Z' axis; forming thin metallic films on the surface of said quartz resonator, said films being used as exciting electrodes; and wherein said quartz resonator and said exciting electrodes are formed by photolithography and anisotropic quartz etching; wherein said quartz resonator comprises a second resonator formed therein for producing reference clock signals, said second resonator being formed within the region of 60°±20°, 120°±20° or 240°±20° in terms of rotation angle about the Z' axis.
Claim 10
Dependent Claim
172 words
A quartz thermometer comprising a quartz resonator which changes its resonance frequency in response to change in ambient temperature so as to indicate ambient temperature; said quartz thermometer being produced by the steps comprising rotating a Z-cut quartz plate about its X-axis by an angle ranging from -30 to -70 degrees so that said plate has new coordinate axes of X, Y' and Z'; forming a quartz resonator of a thickness of 0.02 mm to 0.2 mm from a portion of said Z-cut plate falling in the range of from -15 to +15 degrees with respect to the Z' axis; forming thin metallic films on the surface of said quartz resonator, said films being used as exciting electrodes; and wherein said quartz resonator and said exciting electrodes are formed by photolithography and anisotropic quartz etching; wherein said quartz resonator comprises a second resonator formed therein for producing reference clock signals, said second resonator being formed within the region of 60°±20°, 120°±20° or 240°±20° in terms of rotation angle about the Z' axis.
Claim 11
Dependent Claim
12 words
The device of claim 8, wherein said resonator comprises a flexural resonator.
Claim 12
Dependent Claim
13 words
The device of claim 9, wherein said flexural resonator comprises a vibrating beam.
Claim 13
Dependent Claim
47 words
The device of claim 10, wherein said vibrating beam comprises a central portion between ends thereof and a neck portion having a width which is about 10 to 50% of the width of said beam, wherein said neck portion prevents transmission of strain produced in one of
Claim 14
Dependent Claim
44 words
The device of claim 9, wherein said flexural resonator comprises a rectangular plate formed in said quartz wafer by removing a portion of said quartz wafer so that said plate is supported at four points with two points being on sides opposing each other.
Claim 15
Dependent Claim
36 words
The device of claim 8, wherein said quartz resonator comprises a longitudinal resonator which is formed by cutting a portion of said quartz wafer so that a rectangular plate is formed supported on two opposing points.
Claim 16
Dependent Claim
33 words
The device of claim 8, wherein said quart resonator is mounted in a container, said container being charged with an inert gas at a pressure within the range of 0.01 to 10 Torrs.
References Cited (Backward Citations)
US3697766A
Cited
JPS5175892A
Cited
US4039969A
Cited
US4172908A
Cited
US4472652A
Cited
US4313071A
Cited
US4350918A
Cited
US4255228A
Cited
US4263702A
Cited
US4398115A
Cited
JPS5726723A
Cited
US4437773A
Cited
US4453105A
Cited
JPS58206935A
Cited
JPS58206936A
Cited
EP0098651A2
Cited
US4472656A
Cited
JPS59170737A
Cited
US4472655A
Cited
US4592663A
Cited
US4634914A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-09-20 | 1992-03-21 | 1992-09-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-09-20 | 1996-03-21 | 1996-09-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-09-20 | 2000-03-21 | 2000-09-20 | $7700.00 | Window Closed / Lapsed |