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Patent US4765844A successfully refreshed from Google Patents.
US4765844A
Expired / Lapsed
US
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Solvents for photoresist removal
Assignee: Clariant Produkte Deutschland GmbH
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Filing: 1986-10-20
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Granted: 1988-08-23
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Expires: 2006-10-20
Abstract
Abstract The invention relates to solvent systems which are based on water-soluble amino derivatives and propylene glycol components, for removing photoresists. These solvent systems are comprised of (a) from about 10 to 100% by weight of at least one water-soluble amine of the general formula <IMAGE> in which R1, R2, R3, R4 denote H or alkyl groups n,m denote 0 to 2, and o denotes 1 to 3; and (b) from about 0 to 90% by weight of at least one water-soluble propylene glycol derivative of the general formula <IMAGE> in which R3, R4 denote H, alkyl or <IMAGE> and P denotes 1 to 3.
Inventors
- 👤 Hans-Joachim Merrem
- 👤 Axel Schmitt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:35
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
134 words
An agent for the removal of photoresists consisting essentially of (a) from about 10 to 90% by weight of at least one water-soluble amine represented by the formula ##STR7## in which R 1 , R 2 , R 3 , R 4 denote H or alkyl groups n, m denote 0 to 2, and o denotes 1 to 3; and (b) from about 10 to 90% by weight of at least one water-soluble propylene glycol derivative represented by the formula ##STR8## in which R 3 , R 4 denote H, alkyl or ##STR9## groups, and P denotes 1 to 3; wherein said agent is biodegradable, of low toxicity, free of ammonium hydroxide base, relatively non corrosive to aluminum and wherein substantially all components of said agent boil at temperatures of at least 160° C.
Claim 2
Dependent Claim
134 words
An agent for the removal of photoresists consisting essentially of (a) from about 10 to 90% by weight of at least one water-soluble amine represented by the formula ##STR7## in which R 1 , R 2 , R 3 , R 4 denote H or alkyl groups n, m denote 0 to 2, and o denotes 1 to 3; and (b) from about 10 to 90% by weight of at least one water-soluble propylene glycol derivative represented by the formula ##STR8## in which R 3 , R 4 denote H, alkyl or ##STR9## groups, and P denotes 1 to 3; wherein said agent is biodegradable, of low toxicity, free of ammonium hydroxide base, relatively non corrosive to aluminum and wherein substantially all components of said agent boil at temperatures of at least 160° C.
Claim 3
Dependent Claim
21 words
An agent as claimed in claim 1, wherein said water-soluble amine is selected from the group consisting of isopropanolamine and N-(2-aminoethyl)-ethanolamine.
Claim 4
Dependent Claim
29 words
An agent as claimed in claim 1, wherein said water-soluble propylene glycol derivative is selected from the group consisting of dipropylene glycol methyl ether and tripropylene glycol methyl ether.
Claim 5
Dependent Claim
40 words
An agent as claimed in claim 1, wherein said agent consists essentially of a water-soluble amine in an amount from about 20-70% by weight, and a water-soluble propylene glycol derivative in an amount from about 30 to 80% by weight.
Claim 6
Dependent Claim
26 words
An agent as claimed in claim 1, wherein the boiling points of said water-soluble amine and said water-soluble propylene glycol derivative are at least 160° C.
Claim 7
Dependent Claim
26 words
An agent as claimed in claim 1, wherein the boiling points of said water-soluble amine and said water-soluble propylene glycol derivative are at least 180° C.
Claim 8
Dependent Claim
29 words
An agent as claimed in claim 2, wherein said water-soluble propylene glycol derivative is selected from the group consisting of dipropylene glycol methyl ether and tripropylene glycol methyl ether.
Claim 9
Dependent Claim
16 words
An agent as claimed in claim 1 consisting essentially of tripropylene glycol methyl ether and N-(2-aminoethyl)-ethanolamine.
Claim 10
Dependent Claim
16 words
An agent as claimed in claim 4 consisting essentially of tripropylene glycol methyl ether and N-(2-aminoethyl)-ethanolamine.
Claim 11
Dependent Claim
20 words
An agent as claimed in claim 1 consisting essentially of approximately equimolar amounts of said amine and said glycol derivative.
Claim 12
Dependent Claim
20 words
An agent as claimed in claim 10 consisting essentially of approximately equimolar amounts of tripropylene glycol methyl ether and N-(2-aminoethyl)-ethanolamine.
References Cited (Backward Citations)
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US4077896A
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EP0075329A1
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US4592787A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-08-23 | 1992-02-22 | 1992-08-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-08-23 | 1996-02-22 | 1996-08-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-08-23 | 2000-02-22 | 2000-08-23 | $7700.00 | Window Closed / Lapsed |