High time resolution electron microscope

Claim 2

A high time resolution electron microscope unit comprising: beam source means for generating an exciting beam; microscope means for exposing the surface of a specimen to be observed to the exciting beam for emitting electrons from the surface; image formation means for receiving the emitted electrons and for displaying an image representative of variations in the surface of the specimen; gate means for controlling the flow of emitted electrons from the specimen toward the image formation means; deflecting means including a deflecting plate for deflecting the emitted electrons from the gate means successively onto the image formation means to detect high speed variations; and drive means for synchronizing the operation of the gate means, the deflecting means and the beam source means to obtain a plurality of images on the image formation means in frame form.

Claim 3

The microscope unit of claim 1 wherein the beam source means includes a laser generator, and the microscope beams includes a vacuum tube having a sealable opening therein.

Claim 4

The microscope unit of claim 2 wherein the image formation means includes at least one phosphor screen.

Claim 5

The microscope unit of claim 3 wherein the gate means includes a first deflecting electrode and a beam blocking electrode.

Claim 6

The microscope unit of claim 4 wherein the microscope means includes accelerating means for accelerating electrons emitted from the specimen toward the phosphor screen.

Claim 7

The microscope unit of claim 5 also including lens means for focusing the electrons emitted by the surface into an enlarged image.

Claim 8

The microscope unit of claim 5 wherein the accelerating means includes an anode having an aperture disposed adjacent to the specimen for reflecting the exciting beam and irradiating the specimen.

Claim 9

The microscope unit of claim 1 wherein the microscope means includes a vacuum container, and means for supporting the specimen in the container.

Claim 10

The microscope unit of claim 8 wherein to support means includes a bar-shaped cathode.

Claim 11

A high time resolution electron microscope unit comprising: beam source means for generating an exciting beam; microscope means for exposing the surface of a specimen to be observed to the exciting beam for emitting electrons from the surface, wherein the microscope means includes a vacuum container, and means for supporting the specimen in the container; image formation means for receiving the emitted electrons and for displaying an image representative of variations in the surface of the specimen; gate means for controlling the flow of emitted electrons from the specimen toward the image formation means; deflecting means for deflecting the emitted electrons from the gate means onto the image formation means; and drive means for synchronizing the operation of the gate means, the deflecting means and the beam source means; wherein the container includes a plurality of cylinders each having an inner surface, and the image formation means includes a plurality of phosphor screens on the inner surfaces.

Claim 12

A high time resolution electron microscope unit comprising: beam source means for generating an exciting beam; microscope means for exposing the surface of a specimen to be observed to the exciting beam for emitting electrons from the surface, wherein the microscope means includes a vacuum container, and means for supporting the specimen in the container; image formation means for receiving the emitted electrons and for displaying an image representative of variations in the surface of the specimen; gate means for controlling the flow of emitted electrons from the specimen toward the image formation means; deflecting means for deflecting the emitted electrons from the gate means onto the image formation means; and drive means for synchronizing the operation of the gate means, the deflecting means and the beam source means; wherein the container includes a plurality of cylinders each having an inner surface, and the image formation means includes a plurality of phosphor screens on the inner surfaces.

Claim 13

The microscope unit of claim 10 wherein the drive means includes a sloped voltage generating circuit for applying a sloped voltage to the deflecting means in synchronization with the exciting beam from the beam source.